VQ4000

light 50 11 (12.5) 11 (12.5) 2 4 4(A) port 2(B) port 24.6 38 48 4 2 B A 24.6 A B 38 48 14 12 5 3 1 B A 30 45 14 3 5 1 12 2-5.6 Mounting hole Manual override 2-5.6 Mounting hole 45 30 Manual override 14.5 27 30.5 32 41.5 91.5 129 79 PE X PE X 32 41.5 30.5 27 R1 R2 P R2 R1 14.5 P 19.5 19.5 (21) (21) Rc 1/8 External pilot port Rc 1/8 PE port Rc 1/8 PE port 19.5 (21) 19.5 (21) 31 31 5-Rc 1/4

Large Size Vacuum Module: Series ZR

(Function plate) ZR1-R1-4 1pc.

0.4

(R1) r r e q w e q w VQ1301 VQ1401 VQ1300 VQ1400 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) VQ1500 VQ1501 r r (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w VQ1A01 VQ1B01 4 (A) 2 (B) 4 (A) 2 (B) 5 (R1) 3 (R2) 5 (R1) 3 (R2) 1 (P) 1 (P) r VQ1C01 4 (A) 2 (B) 5 (R1) 3 (R2) 1 (P) Component

One-touch Fittings

/8 02 R1/4 03 R3/8 04 R1/2 Applicable tubing O.D.

42

) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ 1/2 VQ 4/5 VQ 4/5 VQC 1/2 VQC 4/5 VQZ (A) 4 (B) 2 (A) 4 (B) 2 VQ4250 VQ4251 SQ VFS 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VFR VQ7 (A) 4 (B) 2 (A) 4 (B) 2 VQ4351 VQ4350 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) (A) 4 (B) 2 (A) 4 (B) 2 VQ4451 VQ4450 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) (A) 4 (B) 2 (A) 4 (B) 2 VQ4551 VQ4550 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3

Battery-less

Top3 D4 Bottom3 t Lead [mm] y Stroke4 5 [mm] Symbol LEYG16 LEYG25 LEYG32/40 A 10 12 16 B 5 6 8 C 2.5 3 4 Stroke Note Size Applicable stroke 30 to 200 16 30, 50, 100, 150, 200 30 to 300 25/32/40 30, 50, 100, 150, 200, 250, 300 u Motor option6 i Guide option7 o Actuator cable type/length Robotic cable [m] Nil None R8 88 R1 1.5 RA 108 R3 3 RB 158 R5 5 RC 208 C With motor cover W With lock/motor

5 Port Solenoid Valve Series SV1000/2000/3000/4000

Note 4) Not applicable for dual 3-port valves 2(B) (A)4 1 (P) (R1) 5 3 (R2) C: Locking type (Manual) 3-position closed center 2(B) (A)4 3 B A 1 (P) (R1) 5 3 (R2) 3-position exhaust center r Coil voltage 2(B) (A)4 D: Slide locking type (Manual) 24 VDC 5 4 1 (P) (R1) 5 3 (R2) t Light/surge voltage suppressor 3-position pressure center 2(B) (A)4 Y es Nil 5 1 (P) (R1) 5 3 (R2) 4-position dual

5 Port Solenoid Valve

) 3 (R2) 1 (P) 5 (R1) 3 (R2) e q w e q w (A) 4 (B) 2 (A) 4 (B) 2 VQC4200 VQC4201 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) e q w r e q w r (A) 4 (B) 2 (A) 4 (B) 2 VQC4300 VQC4301 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) (A) 4 (B) 2 (A) 4 (B) 2 VQC4400 VQC4401 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) (A) 4 (B) 2 (A) 4 (B) 2 VQC4500 VQC4501 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) Component Parts

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

mounting hole Indicator light P R2 R1 2-8 mounting hole Indicator light 49 (64) 49 (64) M12 connector M12 connector 126.5 (139.5) 126.5 (139.5) PE port PE port PE port PE port 50 (63) 3 5 38 (53) 50 (63) 32 (42) 3 5 1 38 (53) 23 (30) 32 (42) 1 23 (30) 1/8 14 port 3/8, 1/2, 3/4-2 port 3, 5 port 30 (42) 30 (42) 1/8 14 port 3/8, 1/2, 3/4-2 port 3, 5 port 30 (42) 30 (42) 3/8, 1/2, 3/4 1 port

Modular/F.R.L. Units Series AC

Information SMC Corporation of America 10100 SMC Boulevard Noblesville, IN 46060 Epoxy Coated F.R.L.Units www.smcusa.com AC21/31/41-***-*-X2217 AF20/30/40-***-*-X480 AR20/30/40-***-*-X48 AL20/30/40-***-*-X480 AW20/30/40-***-*-X48 VHS20/30/40-***-*-X513 Y20/30/40*-T4 Application: Air preparation in an environment that requires enhanced corrosion protection.

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

For 20A/20B 25 5 1.5 4 x 2.6 Depth 7 or less Atmospheric vent port 30 20 30 20 Lead wire with connector M5 x 0.8 Thread depth 3.5 01 4 x 2.6 Depth 7 or less Atmospheric vent port 15.2 R1/8 7.2 N01 NPT1/8 A Piping specification Port size A 01 R1/8 Width across flats 10 N01 NPT1/8 Width across flats 12 20 ZSE20(F)/ISE20 Series Dimensions With bracket ZSE20(F) ISE20 Option 2 30 A1 25 20 Bracket

AC

G27-10-R1-X2092pcs. G46-10-012pcs. G27-10-R1-X2092pcs. G46-10-012pcs.

Air Cylinder Series CM2

R1 ND MM ND MM R1 MM E1 ND NX1 A U1 R2 H Z E1 NX U1 L1 A A NX A1 (Min.) A1 U1 L1 Applicable bore size 20 25, 32 40 MM NDH10 R1 L1 NX E1 MM NX1 U1 A1 U1 A R2 Y Z A H NDH10 Part no.

Vacuum Module Series ZX

PV PS PD PE R16 PV PS PD PE R1 ZMA Dummy spacer ZX1-R16 Individual air supply port PV ZQ Pressure sensor Pressure sensor Dummy spacer ZX1-R16 Dummy spacer R16 R1 ZH Individual spacer ZX1-R1 39.9 ZU ZL A cross section Dummy spacer R16 ZY External release port External release port Pilot pressure EXH port (PE) M3 ZF Pilot port Pilot port + + ZP Individual spacer R1 Individual spacer R1 SMC

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

center 3 position exhaust center 3 position closed center 3 position pressure center (1) 3 position exhaust center 3 position closed center (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) Note 1) Except VQZ1000 and metal seal.

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

center 3 position closed center 3 position exhaust center 3 position exhaust center 3 position pressure center 3 position pressure center (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) Note 1) Except for VQZ1000 and metal seal Component Parts No

Metal Seal/Rubber Seal Series VQ Body Ported

AXT661-12A AXT661-14AN AXT661-14AN-6 AXT661-14AN-10 AXT661-14AN-20 AXT661-14AN-30 AXT661-13AN AXT661-13AN-6 AXT661-13AN-10 AXT661-13AN-20 AXT661-13AN-30 AXT661-13A AXT661-13A-6 AXT661-13A-10 AXT661-13A-20 AXT661-13A-30 Note 1) 100/110 VAC for single: AXT661-31A-; for double: AXT661-32A200/220 VAC for single: AXT661-34A-; for double: AXT661-35Aare in accordance with the above table.

ZX

ZX1-R1-1 ZX1-R1-3 ZX1-R16 4 pcs. F G T NPTF (Ordering example) ZXX106-R1 pc. (Manifold base) ZX1101-K15LZ-EC5 pcs. (Vacuum single unit) ZX1-BM11 pc.

New

Z Dimensions (mm) Model A B C E H I X Y Z J K L S 250 250 250 30 30 30 VXF25B< VXF26B< VXF27B< VXF28B< 182 206 206 206 18.3 34 34 34 90 100 110 120 78.4 78.4 78.4 78.4 118 121 121 121 59.8 59.8 59.8 59.8 47 50 50 50 24 24 24 24 18.6 18.6 18.6 18.6 30 30 30 30 17 17 17 17 Grommet Grommet (with surge voltage suppressor) DIN terminal Model Q R U Q R U 27 27 27 27 R U T 64.5 64.5 64.5 64.5

ZR

Nil F G Rc Example) Attached to the first and third stations ZR1-RV1-1 ZR1-RV1-3 ZR1-R1-A3 T NPTF Example) Attached to the first and third stations ZR1-R1-1 ZR1-R1-3 Example) ZZR106-R .1 pc. (Manifold base only) ZR120S1-K15MZ-EC ... 5 pcs. (Unit) ZR1-BM1 . 1 pc. (Blank plate) ZR1-R1-3 . 1 pc.