Rodless Cylinder for Vacuum Series CYV ø15, ø32 1

MTS Cylinder: CYV32-100 Workpiece weight: 5 kg Average speed: 100 mm/s Measurement environment: Operation in the atmosphere after baking at 150C for 48 hours. Leakage [Pam3/sec] 10-8 MY Note 2) The leakage test result shown is based on a test conducted for 10 minutes after the cylinder was pressurized with helium at 0.1 MPa.

Heat Resistant 2-Color Indicator

INFORMATION Heat Resistant 2-Color Indicator Solid State Auto Switch Direct Mounting Type RoHS Heat resistant (Max. 302F [150C]) type added to the D-M9 compact auto switch.

10

V V V V V V 25A Copper (Cu) and Zinc (Zn)-free Note 1) 32 to 100 V v v v v v v v MBlR V Water resistant V v V v V v V v 10Clean series Note 6) v v v v v v v v 32 to 125 20Copper Note 5) and Fluorine-free Note 6) Note 9) Note 9) Note 9) Note 9) Note 9) Note 9) Note 9) Note 9) XAl Change of rod end shape XB5 Oversized rod cylinder Note 6) v v v v v v v XB6 Heat resistant cylinder (10 to 150C

CY1

Symbol Symbol 4 Very low speed (7 to 50mm/s) specifications 1 Heat resistant (10 to 150C) specifications -XB13 -XB6 CY1B CY1B XB6 Bore Stroke H Magnetic holding force CY1S XB13 Bore Stroke CY1L Heat resistant specifications 1. Basic specifications Very low speed (7 to 50mm/s) specifications There is no sticking and slipping even at very low drive speeds of 7 to 50mm/s.

CYV

(Atmospheric conditions) 0.1 Note 1) This data indicates deterioration with age of the average number of particles per operation under the following test conditions. 5.0 Particulate generation [particles/cycle] Cylinder: CYV32-100 Work piece weight: 5kg Average speed: 100mm/s Measurement environment: Operation in the atmosphere after baking at 150C for 48 hours.

The LES series electric slide table actuator uses a compactly-integrated, recirculating linear guide for high rigidity and high precision. When the LES is ordered with the controller, initial data of the actuator is preset in the controller allowing start-up in a short time with the in.easy modein.. Two types of built-in motors * are available. The series can be top or bottom mounted. In

Series: LEFS (Ball Screw Drive), Accuracy: Basic Type, Size: 40, Motor Mounting Position: In-line, Motor: Step Motor (Servo 24 VDC), Lead Screw: A (Size 16: 10mm, Size 25: 12mm, Size 32: 16mm, Size 40: 20mm), Stroke: 600mm, Motor Option: w/o Lock, Auto Switch Mounting Bracket: None, Grease Application: with, Positioning Pin Hole: Housing B, Bottom, Actuator Cable: S (Standard Cable), Actuator

Size: 16, Motor Mounting Position: Basic Type, Motor Type: Step Motor, (Servo/24 VDC), Lead: LES8: 4mm; LES16: 5mm; LES25: 8mm, Stroke: 50mm, Motor Option: w/o Lock, Body Option: Basic Type, Mounting: w/o Side Holder, Actuator Cable Type: Standard Cable, Actuator Cable Length: 5m, Controller Type - LEC, JXC: AP [LECPA, (Pulse Input Type), PNP], I/O Cable Length for LEC: w/o Cable, Controller

Size: 16, Motor Mounting Position: R (Basic Type), Motor Type: Step Motor, (Servo/24 VDC), Lead: K (LES8: 4mm; LES16: 5mm; LES25: 8mm), Stroke: 50mm, Motor Option: w/o Lock, Body Option: Basic Type, Mounting: w/o Side Holder, Actuator Cable Type: S (Standard Cable), Actuator Cable Length: 5 (5m), Controller Type - LEC, JXC: AP [LECPA, (Pulse Input Type), PNP], I/O Cable Length for LEC: w/

Table Accuracy: Basic, Size: 10, Max. Rotation Torque: J (Basic, LER10: 0.2; LER30: 0.8; LER50: 6.6), Rotation Angle: 3 (External Stopper: 90°), Motor Cable Entry: Basic, Entry on the Right Side, Actuator Cable: S (Standard Cable), Actuator Cable Length: 5 (5), Controller Type - LEC, JXC: AP (LECPA, Pulse Input Type, PNP), I/O Cable Length for LEC: w/o Cable, Controller Option: D (DIN Rail

Series: LEFS (Ball Screw Drive), Accuracy: Basic Type, Size: 32, Motor Mounting Position: In-line, Motor: Step Motor (Servo 24 VDC), Lead Screw: H (Size 25: 20mm, Size 32: 24mm, Size 40: 30mm), Stroke: 600mm, Motor Option: w/o Lock, Auto Switch Mounting Bracket: None, Grease Application: with, Positioning Pin Hole: Housing B, Bottom, Actuator Cable: S (Standard Cable), Actuator Cable Length

Table Accuracy: Basic, Size: 10, Max. Rotation Torque: Basic, LER10: 0.2; LER30: 0.8; LER50: 6.6, Rotation Angle: External Stopper: 90°, Motor Cable Entry: Basic, Entry on the Right Side, Actuator Cable: Standard Cable, Actuator Cable Length: 5, Controller Type - LEC, JXC: LECPA, Pulse Input Type, PNP, I/O Cable Length for LEC: w/o Cable, Controller Option: DIN Rail Mounting, Communication

Series: Ball Screw Drive, Accuracy: Basic Type, Size: 40, Motor Mounting Position: In-line, Motor: Step Motor (Servo 24 VDC), Lead Screw: Size 16: 10mm, Size 25: 12mm, Size 32: 16mm, Size 40: 20mm, Stroke: 600mm, Motor Option: w/o Lock, Auto Switch Mounting Bracket: None, Grease Application: with, Positioning Pin Hole: Housing B, Bottom, Actuator Cable: Standard Cable, Actuator Cable Length

Series: Ball Screw Drive, Accuracy: Basic Type, Size: 32, Motor Mounting Position: In-line, Motor: Step Motor (Servo 24 VDC), Lead Screw: Size 25: 20mm, Size 32: 24mm, Size 40: 30mm, Stroke: 600mm, Motor Option: w/o Lock, Auto Switch Mounting Bracket: None, Grease Application: with, Positioning Pin Hole: Housing B, Bottom, Actuator Cable: Standard Cable, Actuator Cable Length: 5m, Controller

C76

Standard cylinder seals are replaced with special ones and other modifications are made in order to enable the cylinder to operate at a high ambient temperature (10 to 150C). Possible applications: Bore size 32 and 40 mm Rubber bumper Without magnets (Auto switches cannot be used at high temperature.)

CJ5-S

The temperature range for the protective label cover is between 40 to 110C, and the temperature range for grease is between 20 to 150C. (However, there is no relationship with the chemicals listed above.)

Slit Valve

With Built-in Heater (Up to 150C) 1 High Temperature Type (150C) 2 O-ring, guide etc. which is the part of actuator are changed to heat resistance. Heater Holding Function of the Seal (When Operating Pressure is Stopped) 3 Sealing is maintained when operating pressure is stopped.

XLAQ/XLDQ

Without auto switch (Without built-in magnet) Remarks Symbol Heater Temperature 16 D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// Nil H0 H4 H5 5 to 60C None None With 100C heater With 120C heater Solid state auto switch 5 to 150C Reed auto switch (Not applicable to flange size 16) Note) Size 16 is not

NCQ8

Specifications 15 to 300F (10 to 150C) Ambient temperature range Seals material Fluoro rubber Note 4) Piston speed is ranged from 2 to 20 in/sec. Grease Heat resistant grease Additional specifications Dimensions Note 5) With rubber bumper excluded.

CJ5-S

The temperature range for the protective label cover is between 40 to 110C, and the temperature range for grease is between 20 to 150C. (However, there is no relationship with the chemicals listed above.)