Electric Actuator / Low profile slider type Stroke Standard/Produced upon receipt of order 50 100 150 200 250 300 350 400 450 500 550 600 700 800 900 1000 1100 1200 1300 1400 1500 LEMH25 LEMH32 50 100 150 200 250 300 350 400 450 500 550 600 700 800 900 1000 1100 1200 1300 1400 1500 LEMH25 LEMH32 Please consult with SMC as all non-standard and non-made-to-order strokes are produced as special orders.
force (N) Size 16 25 32 40 16 25 32 40 141 452 707 1058 Up to 300 Up to 400 Up to 500 Up to 500 Up to 200 Up to 300 Up to 300 Up to 300 141 452 707 1058 AC Servo Motor Basic type Series LEY In-line motor type Guide rod type Series LEYG Guide rod type /In-line motor type Series LEYD Series LEYGD Dust/Drip proof compatible Dust/Drip proof compatible Series LEY Series LEY Series LEYG Series
Applicable Controller Power Supply Voltage 100VAC Specification Series LJ1H10 Series LJ1H20 LJ1H1021H-K (8mm lead) LJ1H2021F-K (5mm lead) 250 400 225 350 12kg 6kg 200 300 175 250 Speed (mm/s) Speed (mm/s) 150 8kg 13kg 125 200 10kg 100 150 14kg 75 100 15kg 50 50 25 0 100 200 Stroke (mm) 300 400 0 100 200 300 400 500 600 Stroke (mm) When an actuator is operated under conditions that exceed
-150 MXQ25-150 MXQ25-100 MXQ25-125 0.06 0.08 MXQ25-30 MXQ25-50 MXQ25-50 MXQ25-30 MXQ25-50 MXQ25-125 0.08 0.06 MXQ25-20 MXQ25-20 0.04 MXQ25-20 0.04 MXQ25-10 MXQ25-10 0.04 0.02 0.02 0 0 0 100 200 300 400 500 100 200 300 400 500 800 200 400 600 Load (N) Load (N) Load (N) D-X Individual -X 97 Series MXQ Dimensions: MXQ6 For detailed dimensions about the stroke adjuster, refer to the option for
1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.
T|lULTI'PURPOSE APPLICATIONS FOF USE AS: PORT'A' PORT "P" PORT "E'' Opg.ltng PrEsluEr 28" vacuum to 300 PSIG. (2oKgtcflf) 2-Way Normally Closed O!
1 Made to Order Nil 1 3 5 Without cable 1.5 Nil D Screw mounting DIN rail mounting1 Nil X5 Standard product With magnet/switch rail 3 1 Only available for the controller types 6N and 6P 2 DIN rail is not included. Order it separately. 5 When Without controller is selected for controller types, I/O cable length cannot be selected.
Step Motor (Servo/24 VDC) Electric Actuator/Low Profile Slider Type Basic Type LEMB Series LEMB25, 32 Caution E-MY16 E-MY25 LEM25 LEM32 LEM series E-MY series How to Order 25 LEMB 300 T S q w e r t y !1 u 1 i 1 !
G The lead-wire length for a valve with a lead-wire is 300 mm. When in need of a valve with a lead-wire longer than 600 mm, place an order for a valve without a connector and connector assembly.
Size: 32, Motor Mounting Position: In-line, Motor: Step Motor (Servo 24 VDC), Lead Screw: A (Size 16: 10mm, Size 25: 12mm, Size 32: 16mm, Size 40: 20mm), Stroke: 300mm, Motor Option: w/o Lock, Auto Switch Mounting Bracket: None, Grease Application: with, Positioning Pin Hole: Housing B, Bottom, Actuator Cable: Without Cable, Actuator Cable Length: Without Cable, Controller Type - LEC, JXC: 6P
Size: 25, Motor Mounting Position: Top, Motor: Step Motor (Servo 24 VDC), Lead Screw: A (Size 16: 10mm, Size 25: 12mm, Size 32/40: 16mm), Stroke: 300mm, Motor Option: None, Rod End Thread: Female, Mounting: Both Ends Tapped (Standard), Actuator Cable: Without Cable, Actuator Cable Length: Without Cable, Controller Type - LEC, JXC: 6P (LECA6, PNP, Step Data Input Type)
Size: 25, Motor Mounting Position: Top, Motor: Step Motor (Servo 24 VDC), Lead Screw: Size 16: 10mm, Size 25: 12mm, Size 32/40: 16mm, Stroke: 300mm, Motor Option: None, Rod End Thread: Female, Mounting: Both Ends Tapped (Standard), Actuator Cable: Without Cable, Actuator Cable Length: Without Cable, Controller Type - LEC, JXC: LECA6, PNP, Step Data Input Type, I/O Cable Length for LEC: -,
Series: Ball Screw Drive, Accuracy: Basic Type, Size: 32, Motor Mounting Position: In-line, Motor: Step Motor (Servo 24 VDC), Lead Screw: Size 16: 10mm, Size 25: 12mm, Size 32: 16mm, Size 40: 20mm, Stroke: 300mm, Motor Option: w/o Lock, Auto Switch Mounting Bracket: None, Grease Application: with, Positioning Pin Hole: Housing B, Bottom, Actuator Cable: Without Cable, Actuator Cable Length
Size: 16, Motor Mounting Position: Top, Motor: Step Motor (Servo 24 VDC), Lead Screw: A (Size 16: 10mm, Size 25: 12mm, Size 32/40: 16mm), Stroke: 300mm
Size: 16, Motor Mounting Position: Top, Motor: Step Motor (Servo 24 VDC), Lead Screw: Size 16: 10mm, Size 25: 12mm, Size 32/40: 16mm, Stroke: 300mm, Motor Option: -, Rod End Thread: -, Mounting: -, Actuator Cable: -, Actuator Cable Length: -, Controller Type - LEC, JXC: -, I/O Cable Length for LEC: -, Controller Mounting: -, Communication Plug Connector or I/O Cable Length for JXC: -
Workpiece: Generic term for the object which is to be adsorbedVacuum Pressure Equivalents Chart Unit Conversion Table -14.7 760 29.9 -101.3 -13.5 700 27.6 -93.3 1 1 _ 6 600 23.6 -80.0 -9.7 500 19.7 -66.7 400 15.8 -53.3 -5.8 300 1 1 . 8 -40.0 -3.9 200 7.9 -26.7 100 3.9 .
Workpiece: Generic term for the object which is to be adsorbedVacuum Pressure Equivalents Chart Unit Conversion Table -14.7 760 29.9 -101.3 -13.5 700 27.6 -93.3 1 1 _ 6 600 23.6 -80.0 -9.7 500 19.7 -66.7 400 15.8 -53.3 -5.8 300 1 1 . 8 -40.0 -3.9 200 7.9 -26.7 100 3.9 .
0 Actuator cable length Nil Without controller/driver 6N LECP6/LECA6 (Step data input type) NPN 6P PNP 1N LECP1*2 Nil Without cable 1 1.5 m 3 3 m 5 5 m 8 8 m* !
0 Controller/Driver type*1 11LEFS Nil Without controller/driver 6N LECP6/LECA6 (Step data input type) NPN 6P PNP 1N LECP1*2 (Programless type) NPN 1P PNP !
Controller/Driver type1 I/O cable length [m]1 Controller/Driver mounting Nil Without controller/driver 6N LECP6/LECA6 (Step data input type) NPN 6P PNP 1N LECP12 (Programless type) NPN 1P PNP AN LECPA2 (Pulse input type) NPN AP PNP Nil Without cable 1 1.5 3 32 Nil Screw mounting D DIN rail mounting DIN rail is not included.