Battery-less

1 Actuator cable type/length Robotic cable [m] Nil None R8 8*7 R1 1.5 RA 10*7 R3 3 RB 15*7 R5 5 RC 20*7 Nil Housing B bottom*6 Housing B bottom K Body bottom 2 locations Body bottom For details on auto switches, refer to the Web Catalog. 21 Battery-less Absolute Encoder Type Slider Type/Ball Screw Drive LEFS Series Battery-less Absolute (Step Motor 24 VDC) !

PFA/PFW

to 4 (0.02 to 0.4) NPN PNP Rc 3/8 1/2 3/4 3/4 3/4 NPT 3/8 1/2 G 3/8 1/2 New PFW704 Integrated display type PFW720 New PFW740 PFW300 New PFW310 New PFW320 Display unit PFW301 New Separate type PFW311 New PFW321 New PFW504 Sensor unit PFW520 New PFW540 3 Series PFA Digital Flow Switch for Air How to order 10 02 27 PFA7 Flow rate range 1 to 10l/min 5 to 50l/min 10 50 Wiring specifications 1l

CLA

1l!l!

Multistage Ejector (N)ZL Series

1 2 3 4 5 6 Time to reach vacuum [S] Time to reach vacuum [S] Viewing the graphs The graphics indicate the time required to reach a vacuum pressure determined by adsorption conditions for work pieces, etc., starting from atmospheric pressure in a 1l sealed tank.

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L RR,IU1 E, A, L, t MM NX Part no A2 NDHIO boreSlzc D1l m l!:;;I~ '!I!

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

(M5) @ NVJ100 Dimensions inch (mm) L Type Plug Connec,tor : tWJl14O-OLOO.M3 : tWJ114O-OLOO-M3 M Type Plug Connector: NvJl14O-OMOO-M3 : NVJ114O-O OO-M3 .E 0.10(2.6) Dia 1.03i26.2) [d, [ 8 ; I F l j { i 1L l o t : ffi0r 9 A l ; l { .?

Process Pump Series PA3000/5000/PAX1000 Series PB1000

Note 3) Includes dew point indicator purge air flow rate of 1l/min (ANR) (inlet air pressure at 0.7MPa).

Air Cylinder RSQ Series Stopper Cylinder

q o 9 l l / 10i11) 20\22) M 1 0 . 2 E Min. lead wire bending radius: 10 rNole 4lTh I our shows an o.rendedpisron tod .Note Jl Lor ( lare arhro. olF roLcF -.os re p'o{deo onr o_ rFe oo qde, lNole 1l Dimensions for moders wlhoutan aulo sw ich ar61he same as the above.

PA3000/5000/PAX1000

Note 3) Includes dew point indicator purge air flow rate of 1l/min (ANR) (inlet air pressure at 0.7MPa).

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(M5) @ NVJ100 Dimensions inch (mm) L Type Plug Connec,tor : tWJl14O-OLOO.M3 : tWJ114O-OLOO-M3 M Type Plug Connector: NvJl14O-OMOO-M3 : NVJ114O-O OO-M3 .E 0.10(2.6) Dia 1.03i26.2) [d, [ 8 ; I F l j { i 1L l o t : ffi0r 9 A l ; l { .?

FSQ seies

q o 9 l l / 10i11) 20\22) M 1 0 . 2 E Min. lead wire bending radius: 10 rNole 4lTh I our shows an o.rendedpisron tod .Note Jl Lor ( lare arhro. olF roLcF -.os re p'o{deo onr o_ rFe oo qde, lNole 1l Dimensions for moders wlhoutan aulo sw ich ar61he same as the above.

Title not found

Note 1l Withoul a valve functon. Note 2) For NPT rhread type Note 2) Dfan glde s G1/4 (app cab e ro AFD30 and 40). Port size Accessories li.

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(M5) @ NVJ100 Dimensions inch (mm) L Type Plug Connec,tor : tWJl14O-OLOO.M3 : tWJ114O-OLOO-M3 M Type Plug Connector: NvJl14O-OMOO-M3 : NVJ114O-O OO-M3 .E 0.10(2.6) Dia 1.03i26.2) [d, [ 8 ; I F l j { i 1L l o t : ffi0r 9 A l ; l { .?

SMC's series LER electric rotary table is available in a basic or high precision style, and features a low profile, space-saving design.  A digital control allows easy setting of the angular speed, and angular acceleration/deceleration, etc.  Rotation angle is possible up to 320° (310° on LER10).  Up to 6.6 N·m of rotation torque (3.3 N·m of pushing torque available).  The rotation speed

VQZ1000/2000/3000

5 (R)-M57 (Lead wire length) Cross section 0.23 mm2 Cover diameter 1.5 300 58.5 <63.5> 73.5 137.5 Indicator light 62 160 < >: AC 2-7-44 Base Mounted 45 45 Series VQZ1000/2000/3000 Plug Lead Unit: Single Unit VQZ3000 2 position single Grommet (G): VQZ3150 1(R)-G-02 03 300 (Lead wire length) 95 58 28 10.5 10.5 (For Rc 3/8) (For Rc 3/8) 9 9 24.5 mounting hole (For Rc 1/4) (For Rc 1/4) 5 R5

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

plug connector (M): VQZ2 5 (R)lMl 0 1 01 02 57 Indicator light Cover diameter 1.5 Cross section 0.23mm2 (Lead wire) 73.5 135.5<137.5> 300 61.5<62.5> 160 58.5<63.5> < >: AC 1.12-42 VQZ1000/2000/3000 Base Mounted VQZ3000 2 position single 0 1 02 03 Grommet(G): VQZ315 (R)lGl 300 95 58 28 (Lead wire length) 10.5 10.5 24.5Mounting holes (Rc(PT)3/8) (Rc(PT)3/8) 9 9 (Rc(PT)1/4) (Rc(PT)1/4) 5 R5

New

Rc Special voltage With light Without DIN connector (With surge voltage suppressor) G 24 VAC 12 VDC 48 VAC NPT 1K 1L Rc 220 VAC 240 VAC Applicable to air and water (VXN<2) Conduit terminal 1M 1W (With surge voltage suppressor) 24 VAC 12 VDC 48 VAC 1N 1P 1Q 1R 1Y 1S 1T 2A 2B 2C 2D 2E 2F Enter symbols in the order below when ordering a combination of electrical option, other option. 220 VAC

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W j j 1l flats 12 / IE Adaplor plate i!1 ~~~ Flat with rib T ~ . ~ Deep type/ zpnOD'16D only l..!.

PF-OMM0004_C

L/min 0.0) 1.722.0 L/min ( 1.7 L/min 0.0) 0.355.50 L/min ( 0.35 L/min 0.00) 20350 L/min ( 20 L/min 0) 7140 L/min ( 7 L/min 0) 0.355.50 L/min 1.722.0 L/min 3.555.0 L/min 7140 L/min 20350 L/min 0.01 L/min 0.1 L/min 1 L/min 2 L/min (50 ms) 0.05 L/pulse 0.1 L/pulse 0.5 L/pulse 1 L/pulse 2 L/pulse 090 () 070 ( ) L/minL 3F.S. 3F.S. 2F.S. 2 5%F.S.(25 ) 3 3 9.9 L 9 L 4 0.1L 0.5L 1L

Table of Contents

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Control Unit Specifications Control Unit/Option VVFS2000-24A-1R (D side mounting) VVFS2000-24A-1L (U side mounting) VVFS2000-24A-2R (D side mounting) VVFS2000-24A-2L (U side mounting) Air filter (With auto-drain/With