M3 x 10 (4 pcs.) 11 14 15 20 740 AHC System Series MA2 How to Order AHC unit AHC unit MA 210 Y M3 N R3 Tool adapter Robot adapter Without robot adapter 8 10 11 14 15 20 Nil S1 R1 R2 R3 R4 R5 Auto hand changer Air gripper for AHC Applicable shaft diameter Transportable mass Transportable mass 3 kg 2 AHC unit Electric specifications Air connection size M3 M3 x 0.5 None N Air gripper for AHC
/Dimensions 3/8, 1/2 2(A) port Standard/VPA744-1l 03 04 A B 40 16 64 24 3/8, 1/2 3(R) port 1/8 12(PA) port 18 67 2 x 6.2 (For mounting) NO 2A NC 53 66 12 12 3R NC 1P (1/8) 12(PA) port 11.5 16 115.1 107.1 24 96.5 95.5 32.5 M5 x 0.8 (Breathing hole) 16 X 40 3/8, 1/2 1(P) port 80 03 04 A B For vacuum/VPA744V-1l 3/8, 1/2 2(A) port 40 16 64 3/8, 1/2 3(R) port 24 18 67 2 x 6.2 (For mounting) NO
ZX1-R1 R2 R3 R4 R5 R6 R7 R8 Symbol Part no. ZX1-R 9 R10 R11 R12 R13 R14 R15 R16 PS PS PS PS PV PV PV PV PV PV PV PV R1 R2 R3 R4 R5 R6 R7 R8 R 9 R10 R11 R12 R13 R14 R15 R16 PE PE Caution when ordering manifold PD PD PD PD PE PE The asterisk denotes the symbol for assembly. Prefix it to the ejector part numbers to be mounted.
Symbol ZR1-R1 -R2 -R3 -R4 -R5 -R6 -R7 -R8 BM1 ZR1 R1 R2 R3 R4 R5 R6 R7 R8 R9 R10 R11 R12 R13 R14 R15 R16 PV PV PV PV PV PV PV PV PE PE Refer to Example 1).
235.5 225 235.5 237.5 248 250 260.5 262.5 273 L3 L4 100 110.5 2-4-40 Body Ported Series VQ0/1000/2000 Plug Lead Unit: Flip Type VQ2000 55.5 (L plug connector) AC, Latching Manual override 50.5 (L plug connector) VQC L4 L3 49 (L plug connector) 5.2 AC, Latching L2 L1 52.5 SQ 44 (L plug connector) 48 Indicator light DIN rail clamp screw 5.5 31 VQ0 12 D-sub connector mounting screw VQ4 VQ5 R5
side ported. 284 SY3000/5000/7000 Series Dimensions: SY3000 Series Bottom Ported Plug-in Single Unit/Sub-plate SY3l0 0 1l-lll1-Wl-B01l (Bottom ported) For "F" marking (Thread type) Plug 19 F 83.2 51.1 34.5 8.8 Manual override ( ) 35.9 (Max. 3) Push-turn locking slotted type: Press, then rotate it. 2 x 3.2 (For mounting) 4(A) port side: Blue (For rubber seal) : Gray (For metal seal) 2(B)
JIS symbol 1/8, 5/32 3/16, 1/4 3/8 5/16 3/16, 1/4 1/4 3/16 1/4, 5/16 1/2 Inch sizes 3/8 5/32 Flow rate l/min (ANR) {Nl/min} 920 660 230 420 1390 290 460 1050 100 130 Controlled (Free) Effective area mm flow 14 10 3.5 6.5 21 4.5 7 16 2 1.5 1l/min=0.035SCFM 18mm2=1Cv Note 1) Flow rate values are at a pressure of 0.5MPa (72.5psi) and temperature of 20C (68F).
/min 1l/pulse 10 to 210l/min 10 to 210l/min 20 to 200l/min 2l/min 2l/pulse 25 to 525l/min 25 to 525l/min 50 to 500l/min 5l/min 5l/pulse Accumulated pulse flow rate exchange value (Pluse width: 50ms) l/min, CFM x 10-2 l/min, CFM x 10-1 Real-time flow rate Accumulated flow Display units Note 1, 2) l, ft3 x 10-1 Operating fluid temperature Linearity Repeatability Temperature characteristics
Note 3) Includes dew point indicator purge air flow rate of 1l/min (ANR) (inlet air pressure at 0.7MPa).
to 4 (0.02 to 0.4) NPN PNP Rc 3/8 1/2 3/4 3/4 3/4 NPT 3/8 1/2 G 3/8 1/2 New PFW704 Integrated display type PFW720 New PFW740 PFW300 New PFW310 New PFW320 Display unit PFW301 New Separate type PFW311 New PFW321 New PFW504 Sensor unit PFW520 New PFW540 3 Series PFA Digital Flow Switch for Air How to order 10 02 27 PFA7 Flow rate range 1 to 10l/min 5 to 50l/min 10 50 Wiring specifications 1l
5 (R)-M57 (Lead wire length) Cross section 0.23 mm2 Cover diameter 1.5 300 58.5 <63.5> 73.5 137.5 Indicator light 62 160 < >: AC 2-7-44 Base Mounted 45 45 Series VQZ1000/2000/3000 Plug Lead Unit: Single Unit VQZ3000 2 position single Grommet (G): VQZ3150 1(R)-G-02 03 300 (Lead wire length) 95 58 28 10.5 10.5 (For Rc 3/8) (For Rc 3/8) 9 9 24.5 mounting hole (For Rc 1/4) (For Rc 1/4) 5 R5
plug connector (M): VQZ2 5 (R)lMl 0 1 01 02 57 Indicator light Cover diameter 1.5 Cross section 0.23mm2 (Lead wire) 73.5 135.5<137.5> 300 61.5<62.5> 160 58.5<63.5> < >: AC 1.12-42 VQZ1000/2000/3000 Base Mounted VQZ3000 2 position single 0 1 02 03 Grommet(G): VQZ315 (R)lGl 300 95 58 28 (Lead wire length) 10.5 10.5 24.5Mounting holes (Rc(PT)3/8) (Rc(PT)3/8) 9 9 (Rc(PT)1/4) (Rc(PT)1/4) 5 R5
Fluid: Water Flow rate: 1L/min Fluid: Water Flow rate: 1L/min Low noise fan option When dispose the product, contact an industrial waste disposal company 800 800 Aug V yV ZV AV BV CV DV . for disposal of the product. To minimize the risk, drain the fluid from the product when it is scrapped.
PD01 *DIA1 Input signal automatic ON selection 1 PC02 PD02 *DI0 Input signal device selection 0 (CN1-23, CN1-25) PC03 STC S-pattern acceleration/deceleration time PD03 *DI1-1 Input signal device selection 1L (CN1-3) constant PD04 *DI1-2 Input signal device selection 1H (CN1-3) PC04 This parameter is not used.
/symbol/ Setting mode digit Function name [unit] P S T PD03 *DI1L Input device selection 1L Any input device can be assigned to the CN1-15 pin. _ _ x x Position control mode Device selection 02h Refer to table 5.10. x x _ _ Speed control mode Device selection 02h Refer to table 5.10.
Fig. 5-6 Cooling capacity *The Radiating water flow rate of 1L/min is for reference. Radiating water Temp.20 Ambient Temp.20 Fluid water 1000 Cooling capacity W 5 Radiating water flow rate L/min 800 1 3 600 400 200 0 0 10 20 30 40 50 60 70 Recirculating fluid temp.
Flow-rate Characteristics Note) Values when the main valve is fully open Male thread nozzle High efficiency nozzle 1L = 0.035 SCFM 1L = 0.035 SCFM 14.5 29.0 43.5 58.0 72.5 87.0 102 116 131 145 psi 14.5 29.0 43.5 58.0 72.5 87.0 102 116 131 145 psi 1500 1400 1300 1200 1100 1000 900 800 700 600 500 400 300 200 100 400 VMG1-R02-400:4 KNH-R02-200 VMG1-R02-350:3.5 350 VMG1-R02-300:3 Flow rate [
1 2 3 4 5 6 Time to reach vacuum [S] Time to reach vacuum [S] Viewing the graphs The graphics indicate the time required to reach a vacuum pressure determined by adsorption conditions for work pieces, etc., starting from atmospheric pressure in a 1l sealed tank.