High Vacuum Angle Valve A XLAV: Air operated, With solenoid valve J N M Port 1(P) K L Port 3(R) Solenoid valve [mm] Model J K L M N XLAV-16-2 41 18.5 8.5 2.7 3 XLAV-25-2 45.5 22.5 8.5 2.7 3 XLAV-40-2 54.5 35 8.5 2.7 3 XLAV-50-2 61 39.5 8.5 2.7 3 XLAV-63-2 80.5 44 12 4 2 XLAV-80-2 90.5 60 12 4 2 6 Aluminum High Vacuum Angle Valve Double Acting, Bellows Seal RoHS XLC Series How to Order q w e r t y u XLC 2 M9N 16
3 e w t !3 A A !0 !2 !7 !6 o !5 !1 i !4 Section A-A u Parts list Material Note No. Description No.
(R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w e w q VQ1200 VQ1201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w VQ1301 VQ1401 VQ1300 VQ1400 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) VQ1500 VQ1501 r r (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w VQ1A01
unit) Slave unit (S1 unit) Slave unit Master station (S1 unit) FG SG B A FG SG B A FG SG B A SG B A 24 V 0 V Power supply FG Transmission line Twisted pair wire with shielding Master unit SI unit SI unit Terminal resistor Terminal resistor FG DG DB DA FG DG DB DA DG DB DA SLD FG b) 3-wire type Twisted pair wire with shielding Type 3 ground Type 3 ground Type 3 ground Type 3 ground Power
C1 = C (mm) (mm) D1 D2 L1 max L2 max X Y Size Size D1 = 10 10 3 to 3.9 3 to 3.9 X 1 Y 1 2 to 14 2 to 14 15 15 C1 3 to 4.9 3 to 4.9 X 1.5 Y 1.5 3 to 18 3 to 18 Y = L2 = C2 20 20 3 to 5.9 3 to 5.9 X 1.5 Y 1.5 3 to 20 3 to 20 D2 = X = C2 = C 30 30 3 to 7.9 3 to 7.9 X 2 Y 2 3 to 22 6 to 22 L1 = 40 40 3 to 9.9 5 to 9.9 X 3 Y 4.5 4 to 30 6 to 30 Symbol: A45 The long shaft can be further
C1 = C (mm) (mm) D1 D2 L1 max L2 max X Y Size Size D1 = 10 10 3 to 3.9 3 to 3.9 X 1 Y 1 2 to 14 2 to 14 15 15 C1 3 to 4.9 3 to 4.9 X 1.5 Y 1.5 3 to 18 3 to 18 Y = L2 = C2 20 20 3 to 5.9 3 to 5.9 X 1.5 Y 1.5 3 to 20 3 to 20 D2 = X = C2 = C 30 30 3 to 7.9 3 to 7.9 X 2 Y 2 3 to 22 6 to 22 L1 = 40 40 3 to 9.9 5 to 9.9 X 3 Y 4.5 4 to 30 6 to 30 Symbol: A45 The long shaft can be further
C1 = C (mm) (mm) D1 D2 L1 max L2 max X Y Size Size D1 = 10 10 3 to 3.9 3 to 3.9 X 1 Y 1 2 to 14 2 to 14 15 15 C1 3 to 4.9 3 to 4.9 X 1.5 Y 1.5 3 to 18 3 to 18 Y = L2 = C2 20 20 3 to 5.9 3 to 5.9 X 1.5 Y 1.5 3 to 20 3 to 20 D2 = X = C2 = C 30 30 3 to 7.9 3 to 7.9 X 2 Y 2 3 to 22 6 to 22 L1 = 40 40 3 to 9.9 5 to 9.9 X 3 Y 4.5 4 to 30 6 to 30 Symbol: A45 The long shaft can be further
Note 1) 25P Note 1) 26P 20P Side entry Side entry Side entry Connector entry direction Connector entry direction Connector entry direction P. 523 P. 527 P. 531 P. 535 Top entry Side entry Top entry Top entry Side entry Side entry Without cable S0 S1 S2 S3 U0 U1 U2 U3 S0 S1 S2 S3 0 1 2 3 U0 U1 U2 U3 U0 U1 U2 U3 S0 S1 S2 S3 Without cable Without cable With cable (1.5 m) With cable (3 m) With
Note 1) 25P Note 1) 26P 20P Side entry Side entry Side entry Connector entry direction Connector entry direction Connector entry direction P. 523 P. 527 P. 531 P. 535 Top entry Side entry Top entry Top entry Side entry Side entry Without cable S0 S1 S2 S3 U0 U1 U2 U3 S0 S1 S2 S3 0 1 2 3 U0 U1 U2 U3 U0 U1 U2 U3 S0 S1 S2 S3 Without cable Without cable With cable (1.5 m) With cable (3 m) With
A 24 V 0 V Power supply FG Transmission line Twisted pair wire with shielding Master unit SI unit SI unit Terminal resistor Terminal resistor FG DG DB DA FG DG DB DA DG DB DA SLD FG b) 3-wire type Twisted pair wire with shielding Type 3 ground Type 3 ground Type 3 ground Type 3 ground Power supply 24 V 0 V 24 V 0 V D G D G 24 V 0 V Slave unit (S1 unit) Slave unit (S1 unit) Slave unit Master
A 24 V 0 V Power supply FG Transmission line Twisted pair wire with shielding Master unit SI unit SI unit Terminal resistor Terminal resistor FG DG DB DA FG DG DB DA DG DB DA SLD FG b) 3-wire type Twisted pair wire with shielding Type 3 ground Type 3 ground Type 3 ground Type 3 ground Power supply 24 V 0 V 24 V 0 V D G D G 24 V 0 V Slave unit (S1 unit) Slave unit (S1 unit) Slave unit Master
Y (mm) 10 3 Y1 2 to 8 Size D1 L1 max. X 15 Y1.5 3 to 9 3 to 4 C1 C2 Y = L2 = L1= 10 3 X1 2 to 14 20 Y1.5 3 to 10 3 to 5 15 X1.5 3 to 18 3 to 4 D2 = 30 Y2 3 to 13 3 to 6 C2 = C X = 20 X1.5 3 to 20 3 to 5 40 Y4.5 6 to 15 3 to 8 30 X2 3 to 22 3 to 6 Symbol: A7 Symbol: A8 The short shaft can be further shortened by machining it into a stepped round shaft with male threads.
A 24 V 0 V Power supply FG Transmission line Twisted pair wire with shielding Master unit SI unit SI unit Terminal resistor Terminal resistor FG DG DB DA FG DG DB DA DG DB DA SLD FG b) 3-wire type Twisted pair wire with shielding Type 3 ground Type 3 ground Type 3 ground Type 3 ground Power supply 24 V 0 V 24 V 0 V D G D G 24 V 0 V Slave unit (S1 unit) Slave unit (S1 unit) Slave unit Master
A 24 V 0 V Power supply FG Transmission line Twisted pair wire with shielding Master unit SI unit SI unit Terminal resistor Terminal resistor FG DG DB DA FG DG DB DA DG DB DA SLD FG b) 3-wire type Twisted pair wire with shielding Type 3 ground Type 3 ground Type 3 ground Type 3 ground Power supply 24 V 0 V 24 V 0 V D G D G 24 V 0 V Slave unit (S1 unit) Slave unit (S1 unit) Slave unit Master
Digital Display (3% digit LCO) . Predicted Failure Function . 2 Setpoint Use . High Accuracy O Do not subiect body to excessive exiernal force. O Plping tightening to.ques How To Older (Exampre) 3 4 ( 3 1 3 1 7 ( 1 5 1 5 2 0 ( 1 7 NZXl Nozzle Diameter (Same as Std.) Eiector Exhaust Type (Same as Std.)
Digital Display (3% digit LCO) . Predicted Failure Function . 2 Setpoint Use . High Accuracy O Do not subiect body to excessive exiernal force. O Plping tightening to.ques How To Older (Exampre) 3 4 ( 3 1 3 1 7 ( 1 5 1 5 2 0 ( 1 7 NZXl Nozzle Diameter (Same as Std.) Eiector Exhaust Type (Same as Std.)
type 3 m Right angle type 3 m Without cable connector Monitor output Analog output 1 to 5V DC Switch output/NPN output Switch output/PNP output Analog output 4 to 20 mA (Sink type) 1 2 3 4 Thread type N T F Rc NPT NPTF G Bracket Port size B C 1/8 (1000 type) 1/4 (1000, 2000 type) 3/8 (2000 type) Without bracket Flat bracket L-bracket 1 2 3 14-8-27 28 Series ITV1000/2000/3000 Specific Product
3 !4 !3 !4 !0 !0 o i !1 o !1 i Component Parts r r No.