Table of Contents

Kit/Electrical entry/Cable length F P kit (D-sub connector) kit (Flat ribbon cable connector) Top entry Side entry Top entry 26P Note 2) Side entry 26P Note 2) 25P Note) 25P Note) Connector entry direction Top entry Side entry Connector entry direction Top entry Side entry P. 2-4-38 P. 2-4-42 U0 U1 U2 U3 U0 U1 U2 U3 S0 S1 S2 S3 S0 S1 S2 S3 Without cable Without cable (2) (2) With cable (1.5

Electric Actuator

Step 1 Step 2 Check the cycle time.

PC Wiring System Series PCW

3 2 1 0 1 1 2 3 4 CN0 1 2 3 4 CN1 1 2 3 4 CN2 1 2 3 4 CN3 1 2 3 4 CN4 1 2 3 4 CN5 1 2 3 4 CN6 1 2 3 4 CN7 1 2 3 4 CN8 1 2 3 4 CN9 1 2 3 4 CNA 1 2 3 4 CNB 1 2 3 4 CNC 1 2 3 4 CND 1 2 3 4 CNE 4 3 2 1 24 VDC 2 *S2 (S2) 3 0 VDC CNF 4 S1 INPUT Input connector PCW-EC16YBR00 PCW-EC16YBR01 [Applicable PLC example: OMRON Corporation C200H-OD219] 115 114 113 112 111 110 109 108 107 106 105 104 103

Table of Contents

Refer to pages 13-2-4 to 13-2-5 for ejector system unit. Refer to pages 13-2-32 for ejector system manifold. Refer to pages 13-2-40 to 13-2-41 for external vacuum supply system unit. Single unit Single unit 13-2-68 to 13-2-72 Manifold Manifold Refer to page 13-2-54 for external vacuum supply system manifold.

ZX

Refer to pages 13-2-4 to 13-2-5 for ejector system unit. Refer to pages 13-2-32 for ejector system manifold. Refer to pages 13-2-40 to 13-2-41 for external vacuum supply system unit. Single unit Single unit 13-2-68 to 13-2-72 Manifold Manifold Refer to page 13-2-54 for external vacuum supply system manifold.

3 Port Solenoid Valve/

Safety Standard ISO13849-1 Certied2 (Corresponding to Category 2 to 4) 3 Port Solenoid Valve/ Residual Pressure Release Valve with Detection of Main Valve Position 1 1. Refer to page 2 for compliant products. RoHS 2. Refer to page 2 for certified products.

2

(See Fig. 2.)

Electric Actuator/Slider Type

6 e u @0 @1 @2 w !4 !2 !0!1 !3 !

Series VQ Base Mounted Metal Seal/Rubber Seal

Connector location Connector location P.1.10-124 P.1.10-128 P.1.10-132 Top (vertical) Side (honzontal) Top (vertical) Side (honzontal) Without cable With cable (1.5m) With cable (3m) With cable (5m) Without cable Without cable F F S0 S1 S2 S3 P P S0 S1 S2 S3 S0 S1 S2 S3 U0 U1 U2 U3 U0 U1 U2 U3 U0 U1 U2 U3 0 1 2 3 (2) (2) (2) G 2 to 16 stations With cable (1.5m) With cable (3m) With cable

Series VQ Metal Seal/Rubber Seal Body Ported

Coil voltage VQ0 VQ1000 VQ2000 1 2 3 4 5 2 position single 1 3 5 6 100V AC (50/60Hz) Note 2) 2 position double (latching) 110V AC (50/60Hz) 24V DC 12V DC (1) (2) 3 position closed center (1) (2) 3 position exhaust center Electrical entry (2) 3 position pressure center LO MO L plug connector without connector Note 1) Two stations required. Note 2) L plug connector is used for AC.

Environment

2 !

High Vacuum Angle Valve

None XLF16-30-1-2 XLF25-30-1-2 XLF40-30-1-2 XLF50-30-1-2 XLF63-30-1-2 XLF80-30-1-2 Yes XLF16A-30-1-2 XLF25A-30-1-2 XLF40A-30-1-2 XLF50A-30-1-2 XLF63A-30-1-2 XLF80A-30-1-2 XLF High temperature None XLF16-30-1H-2 XLF25-30-1H-2 XLF40-30-1H-2 XLF50-30-1H-2 XLF63-30-1H-2 XLF80-30-1H-2 Yes XLF16A-30-1H-2 XLF25A-30-1H-2 XLF40A-30-1H-2 XLF50A-30-1H-2 XLF63A-30-1H-2 XLF80A-30-1H-2 XLFV General use

Step Motor Controller

B-1 A-1 B-2 A-2 B-3 A-3 Circuit Cable color Brown Red Orange Yellow Green Blue A A B B COM-A/COM COM-B/ 2 1 6 5 3 4 Cable color Connector D terminal no.

ITV

15 VDC Vin: Input signal 0 to 5 VDC 0 to 10 VDC 4 IN 1 1 2 4 16 points preset input type 4 points preset input type 2 3 S1 Brown Brown 3 Power supply connector Communication connector S2 Blue White 3 OUT S3 S1 White Blue Vs Vs 1 5 2 4 S4 S2 Black Black CC-Link Gray 3 5 1 4 Vs : Power supply 24 VDC 12 to 15 VDC (Negative common) 4 3 2 Vs : Power supply 24 VDC (No polarity) 2 1 One of the preset

Title not found

B-1 A-1 B-2 A-2 B-3 A-3 Circuit Cable color Brown Red Orange Yellow Green Blue A A B B COM-A/COM COM-B/ 2 1 6 5 3 4 Cable color Connector D terminal no.

Programless Controller Series LECP1

B-1 A-1 B-2 A-2 B-3 A-3 Circuit Cable color Brown Red Orange Yellow Green Blue 2 1 6 5 3 4 A A B B COM-A/COM COM-B/ Cable color Connector D terminal no.

Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Mounting Series Guide type Motor type Model Page orientation Ground ball screw Rolled ball screw 6 10 6 10 LTF6 Page 60 to Horizontal 10 20 10 20 LTF8 Page 68 to Frame-type

2 !8 !7 !2 y o !1 !6 !5 u Parts list No. Description No.

LJ1H

supply 24 VDC Note 2) .

LG1H

supply 24 VDC Note 2) .

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

Note 2.