Vacuum Module Series ZX

) M3 Note) Dimensions : For mounting bracket A : For mounting spacer 1. 892 Ejector System Series ZX Vacuum Module: Adsorption confirmation switch (ZSP1) ZX1-J2-P Spacer 1 (ZX1-S1) (For side mounting) Spacer 1: ZX1-S1 ZA 41 1 2 x R1.8 ZX 51 ZR A: Release flow rate adjusting needle with lock nut Adjusting needle (Mounting hole) ZM 2 x R1.8 (Mounting hole) 1 10 3.6 (Mounting hole) 17.6 ZMA

Metal Seal/Rubber Seal Series VQ Body Ported

Note 3) Note 4) Kit/Electrical entry/Cable length F P kit (D-sub connector) kit (Flat ribbon cable connector) 25P Note 1) 26P Note 1) 25P Note 1) 26P Note 1) Top entry Side entry Top entry Side entry Connector entry direction Top entry Side entry U0 U1 U2 U3 Connector entry direction Top entry Side entry U0 U1 U2 U3 P. 2-4-38 P. 2-4-42 S0 S1 S2 S3 S0 S1 S2 S3 Without cable With cable (1.5

1

X416 1 2 1 1 1 1 1 Stroke adjusting unit Combination description Holder mounting bracket MY2H X168 Bore size Stroke Auto switch Suffix X417 1 1 1 1 2 1 1 L, H, LS, HS Nil W Z L H LZ HZ Nil W L H With X416 (1 pc.) on only one side With X416 (2 pcs.) (With each 1pc. for both sides) With X416 on one side, X417 on the other side (1 pc.)

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

CDRBU2W10, 15-S CDRBU2W20, 30-S CRB2 CRBU2 CRB1 2 x S2 2 x S1 2 x S1 MSU 2 x S2 CRJ Rotary actuator CRA1 CRQ2 2 x S1 2 x S1 2 x S1 2 x S1 Rotary actuator MSQ (34.5: Connector type) MSZ A port B port CRQ2X MSQX 2 x R A port B port 2 x R MRQ 1 Auto switch Auto switch 2 5 20.5 (26.5: Connector type) 1.

Electric Actuator

51 56.5 M8 x 1.25 31 22 18.5 40 10 60 118 1 56.4 68.4 95.4 34 13 101 to 500 178.5 160 Motor left side parallel type/LEY L 16 25 32 Motor right side parallel type/LEY R 16 25 32 U S1 U S1 T2 T2 (mm) S1 T2 U Size 16 25 32 35.5 67 0.5 47 91 1 61 117 1 Note) When the motor is mounted on the left or right side in parallel, the auto switch groove on the side to which the motor is mounted is

LEC-OM071xx

1 1 Outline 1.

SV

TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE1 US C R C US US C R R R R R R R US C US C US C US C US C US C SERIAL NO.

Base Mounted Metal Seal/Rubber Seal Series VQ

P (1) U S P kit J kit F kit w AXT100-1-J 20 (1) U S U S VQZ AXT100-1-F (1) e Note 1) Top (vertical) entry connector for FU, PU and JU while side (horizontal) entry connector for FS, JS and PS.

Electric Actuator

2 (ISO14644-1)!

Step Motor Controller

1 to !4.

CRBU

Applicable Auto Switch/Refer to page 11-1-1 for further information on auto switches.

Series SV

TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE1 US C R C US US C R R R R R R R US C US C US C US C US C US C SERIAL NO.

Table of Contents

8") N3 (5/32") N7 (1/4") N7 (1/4") VQD P. 2-4-18 P. 2-4-20 Built-in silencer Built-in silencer C C3 (3.2) C4 (4) M5 (M5 thread) C6 (6) kit N1 (1/8") N3 (5/32") N7 (1/4") P. 2-4-50 P. 2-4-54 Built-in silencer Built-in silencer C C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) kit C6 (6) N1 (1/8") N3 (5/32") N7 (1/4") N7 (1/4") P. 2-4-50 P. 2-4-54 Built-in

Electric Actuator

26 (14) 1 Battery included.

PC Wiring System Series PCW

1 2 3 4 CN7 1 2 3 4 CN8 1 2 3 4 CN9 1 2 3 4 CNA 1 2 3 4 CNB 1 2 3 4 CNC 1 2 3 4 CND 1 2 3 4 CNE 4 3 2 1 24 VDC 2 *S2 (S2) 3 0 VDC CNF 4 S1 OUTPUT Output connector 3 Series PCW-EC PC Wiring System e-con Type Circuit Diagram PCW-EC16ZBM00 PCW-EC16ZBM01 [Applicable PLC example: Mitsubishi Electric Corporation A1SX41, A1SY42] 0 1 2 3 4 5 6 7 8 9 A B C D E F 8 6 4 2 40 38 36 34 32 30 28 26 24

Table of Contents

1 8 M5 x 0.8 M6 x 1 M8 x 1.25 Rc M6 x 1 M8 x 1 M6 x 1 M8 x 1 4 6 8 10 13 16 M4 x 0.7 M5 x 0.8 M5 x 0.8 M6 x 1 1 8 M6 x 1 M8 x 1.25 Rc 1 8 13-11-2 3 Series ZPT Vacuum Pad: Vertical Vacuum Entry without Buffer How to Order Vacuum entry port Pad dia.

ZX

PS PV PD EXH PS PV 1(PV)(PS PD) M-3P PD Plug PE P3200152-12 (M2.5 x 28) PS Manifold base PV Philips screw Plug M-5P Table (1) Single unit In the case of manifold Quantity 2 1 1 1 1 Part no.

3 Port Solenoid Valve/

Throttle Main valve Valve 1 Valve 2 Soft start-up valve: ON Valve 1, Valve 2: ON P2 1/2P1 Soft start-up valve Start supplying flow adjusted air with the throt tle by energizing valve 1 and valve 2. 1(P) 2(A) VP544-X555 P1 Soft start-up valve : OFF Valve 1, Valve 2: ON Soft start-up valve 0 Time 1 3(R) 3(R) Safety Standard ISO13849-1 Certied 3 Port Solenoid Valve/Residual Pressure Release

2

Connection thread Metric 2, 3.2, 4, 6, 8 M3 x 0.5, M5 x 0.8, M6 x 1.0 Metric 3.2, 4, 6, 8, 10, 12, 16 M5 x 0.8 R, Rc, G1/8, 1/4, 3/8, 1/2 10, 12, 16 R, Rc1/8, 1/4, 3/8, 1/2 Inch 1/8", 5/32", 1/4", 5/16" 3/8", 1/2" 10-32UNF NPT1/8, 1/4, 3/8, 1/2 1/8", 5/32", 3/16", 1/4" 10-32UNF 5/16", 3/8", 1/2" NPT1/16, 1/8, 1/4, 3/8, 1/2 Inch 1/8", 3/16", 1/4" 5/16", 3/8", 1/2" M5 x 0.8 R, Rc1/8, 1/4, 3

Series VQ Base Mounted Metal Seal/Rubber Seal

(1) [EX124-SCS2](2) EX120-SMJ1(-XP)(1) [EX124-SMJ1](2) AXT100-1-P (4) U S w e r U S U S VZ AXT100-1-F (4) U S AXT100-1-GU20 Note 1) Suffix XP for dust-proof SI unit.