ZX

Electrical entry Nil L Grommet (0.6 m) (5) Digital vacuum switch unit Grommet (3 m) C Connector (0.6 m) CL Connector (3 m) CN Without connector L L plug connector Voltage 21 C 0X ZSE3 D 1 3 100 VAC 50/60 Hz 110 VAC 50/60 Hz 5 24 VDC 6 12 VDC V 6 VDC S 5 VDC R 3 VDC Applicable to plug connector. (Connector assembly with rectifier is attached.)

2

Metal parts material Metric size Inch size Applicable tubing material Seal method Port size Body size 1/8" 5/32" 1/4" 5/16" 3/8" 1/2" 16 12 10 8 6 4 3.2 2 3 Gasket seal M5 x 0.8 1 3 10-32UNF 3 1/8 2 3 3 1/4 Sealant 2 R 1/4 NPT 3 Brass/ Nylon (Series T, TIA) 3/8 Steel wire 3 Stainless 1/2 4 steel Soft nylon (Series TS, TISA) 3 1/8 2 3 Polyurethane (Series T, TIUB) 1/4 Face seal 1/4 G 1 3

Electric Actuator/Slider Type

3 !

Series VQ Base Mounted Metal Seal/Rubber Seal

() 7B 3 rows 9 to 12 stations (+) () 8A Sequence 3.

Series VQ Metal Seal/Rubber Seal Body Ported

Note) Note) Example) Lead wire length 1000mm Example) Lead wire length 1000mm ..3 pcs. 3 pcs. 3 pcs 3 pcs VQ11405LOC6 AXT66114A10 VQ1140N5LOC6 AXT66114AN10 Connector ass'y No. (DC) Connector ass'y No. Double No. Socket only (3 pcs.) 300mm 600mm 1000mm 2000mm 3000mm Lead wire length Single/3 position No.

Environment

2 Controller/Driver mounting Nil Without cable (Without communication plug connector)*3 1 1.5 3 3*2 5 5*2 S Straight type communication plug connector*3 T T-branch type communication plug connector*3 Nil Screw mounting D DIN rail mounting* 11LEJS * DIN rail is not included.

ITV

15 VDC Vin: Input signal 0 to 5 VDC 0 to 10 VDC 4 IN 1 1 2 4 16 points preset input type 4 points preset input type 2 3 S1 Brown Brown 3 Power supply connector Communication connector S2 Blue White 3 OUT S3 S1 White Blue Vs Vs 1 5 2 4 S4 S2 Black Black CC-Link Gray 3 5 1 4 Vs : Power supply 24 VDC 12 to 15 VDC (Negative common) 4 3 2 Vs : Power supply 24 VDC (No polarity) 2 1 One of the preset

Step Motor Controller

B-1 A-1 B-2 A-2 B-3 A-3 Circuit Cable color Brown Red Orange Yellow Green Blue A A B B COM-A/COM COM-B/ 2 1 6 5 3 4 Cable color Connector D terminal no.

Programless Controller Series LECP1

B-1 A-1 B-2 A-2 B-3 A-3 Circuit Cable color Brown Red Orange Yellow Green Blue 2 1 6 5 3 4 A A B B COM-A/COM COM-B/ Cable color Connector D terminal no.

Title not found

B-1 A-1 B-2 A-2 B-3 A-3 Circuit Cable color Brown Red Orange Yellow Green Blue A A B B COM-A/COM COM-B/ 2 1 6 5 3 4 Cable color Connector D terminal no.

Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Mounting Series Guide type Motor type Model Page orientation Ground ball screw Rolled ball screw 6 10 6 10 LTF6 Page 60 to Horizontal 10 20 10 20 LTF8 Page 68 to Frame-type

3 q !4 !2 !8 !7 !2 y o !1 !6 !5 u Parts list No. Description No.

LJ1H

3 !8 !6!7 i q A A !1 !2 u @1 Section AA Parts list Material Note No. Description No.

High Vacuum Angle Valve

A XLAV: Air operated, With solenoid valve J N M Port 1(P) K L Port 3(R) Solenoid valve [mm] Model J K L M N XLAV-16-2 41 18.5 8.5 2.7 3 XLAV-25-2 45.5 22.5 8.5 2.7 3 XLAV-40-2 54.5 35 8.5 2.7 3 XLAV-50-2 61 39.5 8.5 2.7 3 XLAV-63-2 80.5 44 12 4 2 XLAV-80-2 90.5 60 12 4 2 6 Aluminum High Vacuum Angle Valve Double Acting, Bellows Seal RoHS XLC Series How to Order q w e r t y u XLC 2 M9N 16

LG1H

3 e w t !3 A A !0 !2 !7 !6 o !5 !1 i !4 Section A-A u Parts list Material Note No. Description No.

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

1 3.

0.4

(R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w e w q VQ1200 VQ1201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w VQ1301 VQ1401 VQ1300 VQ1400 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) VQ1500 VQ1501 r r (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w VQ1A01

SX

unit) Slave unit (S1 unit) Slave unit Master station (S1 unit) FG SG B A FG SG B A FG SG B A SG B A 24 V 0 V Power supply FG Transmission line Twisted pair wire with shielding Master unit SI unit SI unit Terminal resistor Terminal resistor FG DG DB DA FG DG DB DA DG DB DA SLD FG b) 3-wire type Twisted pair wire with shielding Type 3 ground Type 3 ground Type 3 ground Type 3 ground Power

Table of Contents

C1 = C (mm) (mm) D1 D2 L1 max L2 max X Y Size Size D1 = 10 10 3 to 3.9 3 to 3.9 X 1 Y 1 2 to 14 2 to 14 15 15 C1 3 to 4.9 3 to 4.9 X 1.5 Y 1.5 3 to 18 3 to 18 Y = L2 = C2 20 20 3 to 5.9 3 to 5.9 X 1.5 Y 1.5 3 to 20 3 to 20 D2 = X = C2 = C 30 30 3 to 7.9 3 to 7.9 X 2 Y 2 3 to 22 6 to 22 L1 = 40 40 3 to 9.9 5 to 9.9 X 3 Y 4.5 4 to 30 6 to 30 Symbol: A45 The long shaft can be further

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

C1 = C (mm) (mm) D1 D2 L1 max L2 max X Y Size Size D1 = 10 10 3 to 3.9 3 to 3.9 X 1 Y 1 2 to 14 2 to 14 15 15 C1 3 to 4.9 3 to 4.9 X 1.5 Y 1.5 3 to 18 3 to 18 Y = L2 = C2 20 20 3 to 5.9 3 to 5.9 X 1.5 Y 1.5 3 to 20 3 to 20 D2 = X = C2 = C 30 30 3 to 7.9 3 to 7.9 X 2 Y 2 3 to 22 6 to 22 L1 = 40 40 3 to 9.9 5 to 9.9 X 3 Y 4.5 4 to 30 6 to 30 Symbol: A45 The long shaft can be further

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

C1 = C (mm) (mm) D1 D2 L1 max L2 max X Y Size Size D1 = 10 10 3 to 3.9 3 to 3.9 X 1 Y 1 2 to 14 2 to 14 15 15 C1 3 to 4.9 3 to 4.9 X 1.5 Y 1.5 3 to 18 3 to 18 Y = L2 = C2 20 20 3 to 5.9 3 to 5.9 X 1.5 Y 1.5 3 to 20 3 to 20 D2 = X = C2 = C 30 30 3 to 7.9 3 to 7.9 X 2 Y 2 3 to 22 6 to 22 L1 = 40 40 3 to 9.9 5 to 9.9 X 3 Y 4.5 4 to 30 6 to 30 Symbol: A45 The long shaft can be further