Large Size Vacuum Module: Series ZR

Symbol ZR1-R1 -R2 -R3 -R4 -R5 -R6 -R7 -R8 BM1 ZR1 R1 R2 R3 R4 R5 R6 R7 R8 R9 R10 R11 R12 R13 R14 R15 R16 PV PV PV PV PV PV PV PV PE PE Refer to Example 1).

Prevents Micro-Bubbles

8, 3/16, 1/4 LVC3 8 6, 8, 10 1/4, 3/8 LVC4 10 10, 12 3/8, 1/2 LVC5 16 12, 19 1/2, 3/4 LVC6 22 19, 25 3/4, 1 Model Orifice diameter Metric Tubing O.D.

LVQ

Size 1 2 1 2 3 1 2 1 2 A B C A B A B A B 2 2 3 3 3 4 4 5 5 2 2 2 3 3 4 4 5 5 1/4" x 5/32" 3/16" x 1/8" 1/8" x 0.086" 3/8" x 1/4" 1/4" x 5/32" 1/2" x 3/8" 3/8" x 1/4" 3/4" x 5/8" 1/2" x 3/8" 6 x 4 4 x 3 10 x 8 8 x 6 6 x 4 12 x 10 10 x 8 19 x 16 12 x 10 SMC SMC P U Panel mount union Union SMC SMC With reducer Basic size Note) Select the fittings of the same size as the one at the valve side

IDX-OM-W016

. 3 2 3 6 Precautions for long-term non-operation . 3 2 Chapter 4 Checks and Maintenance 4 1 Daily Check Points . 4 1 4 2 Periodical maintenance . 4 1 4 2 1 Cleaning of ventilation grille (suction grille) . 4 1 4 2 2 Service parts . 4 1 4 2 3 Cleaning of Auto Drain Strainer . 4 1 Chapter 5 Troubleshooting . 5 1 IDFA Series Table of Contents 1 IDX-OM-W016 Air dryer Table of Contents Chapter

K35-OMW0030

Air Circuit Fail-safe port (Head side air supply) (*1) Fail-safe port (Rod side air supply) (*1) EA EB FA FB Air cylinder U G Fail-safe port (For connection to a fail-safe circuit) (*1) Shutoff valve Shutoff valve FU Pilot valve Air supply port P Air exhaust port R3 Air exhaust port R2 Air exhaust port R1 *1) IN-777 series can be operated with a fail-safe mode.

IDX-OM-M051

1 2 1 Anti-corrosive treated copper tube (option C) . 1 2 1 2 2 With Chinese labels and a Chinese operation manual (option G) . 1 2 1 2 3 Medium pressure type (option K) . 1 2 1 2 4 Metal name plate (option P) . 1 2 1 2 5 Ground fault circuit interrupter (option R) . 1 2 1 2 6 Timer type solenoid valve with auto drain (option V) . 1 2 1 2 7 Facility water piping direction . 1 3 1 3 Name

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

PAX PB Tubing size Symbol 03 04 03 04 05 06 07 06 08 10 07 11 10 12 11 13 12 13 19 Body class Tubing O.D. 1/8", 3 4 1/8" 4 3/16" 6 1/4" 6 8 10 1/4" 3/8" 10 12 3/8" 1/2" 12 1/2" 3/4", 19 Body class 1 Symbol 1 2 3 4 5 Body class 1 2 3 4 5 Type of part Symbol U B N Type of part Nut & Insert bushing Insert bushing Nut 2 3 4 5 17-5-53 12 Series LVD Special Tools How to order fitting jigs LQ G

IDX-OM-Z004

. i-8 1 1.1 . 1-1 1.2 . 1-2 1.2.1 C . 1-2 1.2.2 G . 1-2 1.2.3 K . 1-2 1.2.4 P . 1-2 1.2.5 R . 1-2 1.2.6 V . 1-2 1.2.7 . 1-2 1.2.7 . 1-2 1.3. . 1-3 2.1 . 2-1 2.2 . 2-2 2.2.1 . 2-2 2.2.2 . 2-3 2.2.3 . 2-4 2.2.4 . 2-4 2.2.5 . 2-5 2.2.6 . 2-6 1 IDX-OM-Z004 2.2.7 . 2-7 2.3 . 2-9 2.3.1 . 2-9 2.4 . 2-9 3 / 3.1 . 3-1 3.2 . 3-1 3.3 . 3-2 3.4 . 3-2 3.5 . 3-2 3.6 . 3-3

XM, XY

Bonnet assembly Handle assembly Bonnet & Handle assembly/Construction part number: 1 Model Valve size Temperature specifications Indicator 16 25 40 50 63 80 XLA16-30-1 XLA25-30-1 XLA40-30-1 XLA50-30-1 XLA63-30-1 XLA80-30-1 General use XMA XYA XLA16A-30-1 XLA25A-30-1 XLA40A-30-1 XLA50A-30-1 XLA63A-30-1 XLA80A-30-1 XLA16-30-1H XLA25-30-1H XLA40-30-1H XLA50-30-1H XLA63-30-1H XLA80-30-1H High

2-Color Display Digital Pressure Switch Series ZSE80(F)/ISE80(H)

36 360.3 4 x R3 or less 4 x R3 or less 67 or more 739 Series ZSE80/ISE80 Dimensions Panel mount (Bottom ported) 50 40 24.2 7.5 51.2 71.1 38.6 Panel-cut dimensions 360.3 36 x n pcs. + 4 x (n pcs. 1) 360.3 36 4 x R3 or less 4 x R3 or less 740 Series ZSE80/ISE80 2-Color Display Digital Pressure Switch For General Fluids F in brackets stand for the function codes.

Series KC Self-seal Fittings

Rc(PT) 1 8 KBS1-R1 KBS2-R2 KBS3-R3 KBS4-R4 Rc(PT) 1 2 Rc(PT) 1 8 M6 1 M5 0.8 Rc(PT) 1 4 Rc(PT) 3 8 80 Series KB Piping Module Combination Examples 3 Other piping material: KBN, KBD, KBR (Page 86) KBV2-06 KB 2 D 1 KB 1 N Component module KBV2-06 3 KBH2-R2S 1 KBP2 1 Body size Type Type KBP2 Body size Body size Nipple: KBN Different diameter elbow female connector module: KBD KBH2-R2S KBV2-

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

10-8 Kalrez 1.3 x 10-10 (FKM) Q1 R1 R2 R3 S1 T1 4079 SS592 SS630 SSE38 1232-70 Note 1) Values at ambient temperatures, excluding gas permeation.

KB

KBS1-R1 KBS2-R2 KBS3-R3 KBS4-R4 Rc(PT)1 2 Rc(PT)3 8 Rc(PT)1 4 Rc(PT)1 8 2.1-73 Combination Examples KBV2-06 3 Other piping material: KBN, KBD, KBR (P.2.1-79) Component module KBV2-063 KBH2-R2S1 KBP2 1 KB 2 D 1 KB 1 N KBP2 Style Body size Style KBH2-R2S KBV2-M5 Body size Body size Component module KBV2-M53 KBH2-R2S1 KBP2 1 Different diameter elbow female connector module: KBD Nipple: KBN KBP2

K35-OMX0029

Pipe Cover tube 13 1-2 Piping Mount applicable fittings and silencers to the correct port(s) of the air servo cylinder as specified below. P port(Supply port)Supply pressure fitting (0.55 to 0.8 MPa) R1,R2,R3(*1) ports(Exhaust port)Silencer *1 A small amount of air in the cover tube is exhausted from R3 port. *2 Ports FA and FB are plugged before shipment.

Vacuum

20 30 46 80 91 9.9 zPlouo souo 7 u02 2 1.2 12 0.8 u04 4 4.4 1 . 6 7 12 0.8 u06 7 2.5 7 12 0.8 u08 I 7 12 1 u10 1 0 12 1 2 3 u13 1 3 1 5 4 1 3 7.7 1 2 u16 1 6 1 8 1 3 8.2 '12.5 3.5 u20 20 1 5 14 4 u25 1 5 1 4 4 u32 32 4 1 5 1 0 14.5 4 5 u40 40 43 7 1 8 18.5 I u50 50 53 7 1 8 19.5 7.5 D l 0 1 0 1 2 10.7 D16 1 8 11.7 7 D25 2A 4 15.5 20 1 0 D40 40 43 7 1 8 24.2 29 126 Uacuum Pad/Gomp serles zPR

Vacuum

20 30 46 80 91 9.9 zPlouo souo 7 u02 2 1.2 12 0.8 u04 4 4.4 1 . 6 7 12 0.8 u06 7 2.5 7 12 0.8 u08 I 7 12 1 u10 1 0 12 1 2 3 u13 1 3 1 5 4 1 3 7.7 1 2 u16 1 6 1 8 1 3 8.2 '12.5 3.5 u20 20 1 5 14 4 u25 1 5 1 4 4 u32 32 4 1 5 1 0 14.5 4 5 u40 40 43 7 1 8 18.5 I u50 50 53 7 1 8 19.5 7.5 D l 0 1 0 1 2 10.7 D16 1 8 11.7 7 D25 2A 4 15.5 20 1 0 D40 40 43 7 1 8 24.2 29 126 Uacuum Pad/Gom serles zPR

One-touch Fittings

[mm] Connection thread Rc Model T (M) Weight [g] X (X) Y Nylon Urethane hole M 7 mm or less H1 H2 T Oval type Round type 4 1/8 KQ2E04-01G1 M12 x 1 14 14 24.4 10 7.7 10 13 13.3 5.6 4 3 21.2 1/4 KQ2E04-02G1 M12 x 1 17 14 29 14.6 7.7 10 13 13.3 5.6 4 3 30.9 4, 6 8 to 16 6 1/8 KQ2E06-01G1 M14 x 1 17 17 23.6 9.2 9.7 12 15 13.3 13.1 10.4 4.5 28.9 1/4 KQ2E06-02G1 M14 x 1 17 17 28.4 14 9.7 12 15

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

Body (1) (1) With (1) With (w/o light) Base mounted 5 Note 1) Applicable to VQZ2000 and 3000.

Industrial Filters

560 935 1290 100 150 40 (1 1/2B) 50 (2B) 65 (2 1/2B) 40 (1 1/2B) 25 (1B) 620 9 750 20 175 73 445 318.5 240 560 1195 1550 100 150 40 (1 1/2B) 50 (2B) 65 (2 1/2B) 40 (1 1/2B) 25 (1B) 620 9 1000 20 200 92 445 318.5 240 560 1460 1815 100 150 65 (2 1/2B) 80 (3B) 100 (4B) 40 (1 1/2B) 40 (1 1/2B) 720 18 500 24 260 103 560 400 270 710 1045 1445 100 150 65 (2 1/2B) 80 (3B) 100 (4B) 40 (1 1/2B) 40

OMR0032

Open collector input Turn ON No. 1 and No. 4, and (b) 5 VDC+/5% R1 = 220 turn OFF the others. Turn ON No. 3 and No. 6, and (c) Differential input R3 = 120 turn OFF the others. ON ON ON 1 2 3 4 5 6 1 2 3 4 5 6 1 2 3 4 5 6 (a) Open collector input (24 V) (b) Open collector input (5 V) (c) Differential input 36 - (4) Pulse input circuit example i.