S2 S3 S0 S1 S2 S3 U0 U1 U2 U3 S0 S1 S2 S3 Without cable Without cable Without cable (2) Max. 16 stations (2) Max. 16 stations (2) With cable (1.5 m) With cable (3 m) With cable (5 m) With cable (1.5 m) With cable (3 m) With cable (5 m) With cable (1.5 m) With cable (3 m) With cable (5 m) Max. 16 stations Kit P Kit P Kit J Kit J Kit F Kit F L S The valve is equipped with an indicator light
S2 S1 S2 S1 S2 S1 Master unit V BDH SD FG SD FG SD FG SD FG CANL Twisted pair wire with shield FG BDL Class 3 ground Class 3 ground Class 3 ground Class 3 ground CANH V+ Connect the shielding wire to the SD terminal.
(Absolute encoder) Motor option AC servo motor S7 200 63 (Absolute encoder) Without lock Nil B With lock 1: For motor type S2 and S6, the compatible driver part number suffixes are S1 and S5 respectively.
8 9 A B C D E F 1 4.1 + *S2 S1 DC24V MADE IN JAPAN 2 3 4 (48.5) (50) 133 10.5 10.5 5.1 4.5 5 5 Models Output unit can be used for mixed connection with PCW series.
flow rate adjusting needle (PE port) Interface plate 63.5 18 4 15.5 2-3.3 Mounting hole M5 (or M6) (V port) Vacuum pad connection port M5 (or M6) (PV port) Air supply pressure port Bracket A (Standard accessory) Note) Dimensions : For mounting bracket A : For mounting spacer 1. 13-2-26 26 Vacuum Module: Ejector System Series ZX Adsorption confirmation switch (ZSP1) ZX1-K8-P Spacer 1: ZX1-S1
flow rate adjusting needle (PE port) Interface plate 63.5 18 4 15.5 2-3.3 Mounting hole M5 (or M6) (V port) Vacuum pad connection port M5 (or M6) (PV port) Air supply pressure port Bracket A (Standard accessory) Note) Dimensions : For mounting bracket A : For mounting spacer 1. 13-2-26 26 Vacuum Module: Ejector System Series ZX Adsorption confirmation switch (ZSP1) ZX1-K8-P Spacer 1: ZX1-S1
Pilot Nil Internal pilot R External pilot Voltage Safety limit switch/Wiring 5 24 VDC Nil G1/2 (Made by OMRON) M M12 connector (Made by OMRON) Electrical entry S1 M12 connector (Made by Rockwell Automation) D DIN terminal Y DIN (EN175301-803) terminal Refer to page 18 for details about type Y. With check valve (Only external pilot) Check valve Applicable tube O.D.
Kit/Electrical entry/Cable length F P Kit (Dsub connector) Kit (Flat cable connector) Connector location Top (vertical) Side (horizontal) Connector location Top (vertical) Side (horizontal) P .1.10-40 P .1.10-36 Without cable Without cable S0 S1 S2 S3 S0 S1 S2 S3 U0 U1 U2 U3 U0 U1 U2 U3 stations Max.16 (2) Max.16 (2) F kit P kit P kit F kit With cable (1.5m) With cable (3m) With cable (5m
Connector location Connector location P.1.10-124 P.1.10-128 P.1.10-132 Top (vertical) Side (honzontal) Top (vertical) Side (honzontal) Without cable With cable (1.5m) With cable (3m) With cable (5m) Without cable Without cable F F S0 S1 S2 S3 P P S0 S1 S2 S3 S0 S1 S2 S3 U0 U1 U2 U3 U0 U1 U2 U3 U0 U1 U2 U3 0 1 2 3 (2) (2) (2) G 2 to 16 stations With cable (1.5m) With cable (3m) With cable
New Products Guide 2 Air Preparation Equipment, Modular F. R. L., Air Tanks Fittings and Tubing Flow Control Equipment, Exhaust Filters Switches/Sensors Process Valves High Vacuum Equipment Temperature Control Equipment Pneumatic Instrumentation Process Gas Equipment Equipment CAT.E00-7A INDEX New Products Guide 2 Air Preparation Equipment/ Modular F. R. L./Air Tanks Refrigerated Air Dryer
U S1 [mm] Size S1 T2 U 25 47 91 1 32 61 117 1 63 84 142 4 T2 T2 Note) When the motor is mounted on the left or right side in parallel, the groove for auto switch on the side to which the motor is mounted is hidden. 12 Series LEY Dimensions: In-line Motor Encoder Z-phase detecting position F1 Note 1) Rod operating range (Stroke + G mm) Z D T EV M J U 4 x O1 thread depth R M K Note 2) V W
1 I/O cable length [m]*3 Compatible driver Power supply voltage [V] Size 25 32 40 Nil Without driver A1 LECSA1-S100 to 120 A2 LECSA2-S200 to 230 B1 LECSB1-S100 to 120 B2 LECSB2-S200 to 230 C1 LECSC1-S100 to 120 C2 LECSC2-S200 to 230 S1 LECSS1-S100 to 120 S2 LECSS2-S200 to 230 *3 When Without driver is selected for driver type, only Nil: Without cable can be selected.
(Error number 5) 4 points preset input type Brown Blue S1 White Vs Black S2 Vs: Power supply 24 VDC (Negative common) One of the preset pressures P1 through P4 is selected by the ON/OFF combination of S1 and S2. S1 OFF ON OFF ON S2 OFF OFF ON ON Preset pressure P01 P02 P03 P04 For safety reasons, it is recommended that one of the preset pressures be set to 0 MPa.
A Controller type Motor type Power supply voltage Symbol Type AC servo motor (S2) Capacity Encoder LECSA1-S1 LECSA1-S3 LECSA2-S1 LECSA2-S3 LECSA2-S4 LECSB1-S5 LECSB1-S7 LECSB2-S5 LECSB2-S7 LECSB2-S8 AC servo motor (S2) 100 to 120 VAC 50/60 Hz S1 S3 S4 S5 S7 S8 100 W B Pulse input type (For absolute encoder) AC servo motor (S3) Pulse input type (For incremental encoder) Incremental AC servo
A Controller type Motor type Power supply voltage Symbol Type AC servo motor (S2) Capacity Encoder LECSA1-S1 LECSA1-S3 LECSA2-S1 LECSA2-S3 LECSA2-S4 LECSB1-S5 LECSB1-S7 LECSB2-S5 LECSB2-S7 LECSB2-S8 AC servo motor (S2) 100 to 120 VAC 50/60 Hz S1 S3 S4 S5 S7 S8 100 W B Pulse input type (For absolute encoder) AC servo motor (S3) Pulse input type (For incremental encoder) Incremental AC servo
A Controller type Motor type Power supply voltage Symbol Type AC servo motor (S2) Capacity Encoder LECSA1-S1 LECSA1-S3 LECSA2-S1 LECSA2-S3 LECSA2-S4 LECSB1-S5 LECSB1-S7 LECSB2-S5 LECSB2-S7 LECSB2-S8 AC servo motor (S2) 100 to 120 VAC 50/60 Hz S1 S3 S4 S5 S7 S8 100 W B Pulse input type (For absolute encoder) AC servo motor (S3) Pulse input type (For incremental encoder) Incremental AC servo
Controller type Motor type Power supply voltage S1 S3 S5 S7 LECSA1-S1 LECSA1-S3 LECSA2-S1 LECSA2-S3 LECSB1-S5 LECSB1-S7 LECSB2-S5 LECSB2-S7 AC servo motor (S2) 100 W 200 W 100 W 200 W AC servo motor (S2) 100 to 120 VAC Pulse input type Incremental B Pulse input type 50/60 Hz AC servo motor (S3) AC servo motor (S3) (For absolute encoder) (For incremental AC servo motor (S6) AC servo motor
Controller type Motor type Power supply voltage S1 S3 S5 S7 LECSA1-S1 LECSA1-S3 LECSA2-S1 LECSA2-S3 LECSB1-S5 LECSB1-S7 LECSB2-S5 LECSB2-S7 AC servo motor (S2) 100 W 200 W 100 W 200 W AC servo motor (S2) 100 to 120 VAC Pulse input type Incremental B Pulse input type 50/60 Hz AC servo motor (S3) AC servo motor (S3) (For absolute encoder) (For incremental AC servo motor (S6) AC servo motor
Controller type Motor type Power supply voltage S1 S3 S5 S7 LECSA1-S1 LECSA1-S3 LECSA2-S1 LECSA2-S3 LECSB1-S5 LECSB1-S7 LECSB2-S5 LECSB2-S7 AC servo motor (S2) 100 W 200 W 100 W 200 W AC servo motor (S2) 100 to 120 VAC Pulse input type Incremental B Pulse input type 50/60 Hz AC servo motor (S3) AC servo motor (S3) (For absolute encoder) (For incremental AC servo motor (S6) AC servo motor
Nil FKM 1349-80*1 N1 EPDM 2101-80*1 P1 Barrel Perfluoro 70W Q1 Kalrez 4079 R1 Chemraz SS592 R2 SS630 R3 SSE38 S1 VMQ 1232-70*1 T1 FKM for Plasma 3310-75*1 *1 Values at normal temperature, excluding gas permeation *2 Refer to Construction on page 5 for changed part. Number corresponds with the parts number on the construction drawing.