1

KBL3-R2S KBL3-R3S KBL3-R4S KBL4-R3S KBL4-R4S R1 2 R3 8 R1 2 R3 8 R1 4 R3 8 R1 4 Model T Connection thread KBB1-M5 KBB2-M6 KBB3-R1 KBB4-R2 Rc1 4 Rc1 8 M6 x 1 M5 x 0.8 Model T Connection thread KBS1-R1 KBS2-R2 KBS3-R3 KBS4-R4 Rc 1 2 Rc 3 8 Rc 1 4 Rc 1 8 15-2-110 Combination Examples KBV2-06 Component module 3 Other Pipng Material: KBN, KBD, KBR (P . 15-3-116) KBV2-06 3 KBH2-R2S 1 KBP2 1

High Purity Fluoropolymer

1 1 2 2 2 2 3 3 3 3 3 3 4 4 4 4 5 5 5 5 6 6 6 6 Class 1 2 1 2 3 4 1 2 3 4 5 6 1 2 3 4 1 2 3 4 1 2 3 4 1/8" x 0.086" 1/4" x 5/32" 3/16" x 0.127" 1/8" x 0.086" 1/4" x 5/32" 3/16" x 0.127" 1/8" x 0.086" 3/8" x 1/4" 1/4" x 5/32" 3/8" x 1/4" 1/4" x 5/32" 1/2" x 3/8" 3/8" x 1/4" 1/2" x 3/8" 3/8" x 1/4" 3/4" x 5/8" 1/2" x 3/8" 3/4" x 5/8" 1/2" x 3/8" 1" x 7/8" 3/4" x 5/8" 1" x 7/8" 3/4" x 5/8"

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

4" x 5/8" 1/2" x 3/8" 3/4" x 5/8" 1/2" x 3/8" No. 2 2 2 2 3 3 3 3 3 3 4 4 4 4 5 5 5 5 No. 2 2 2 2 2 2 3 3 3 3 4 4 4 4 5 5 5 5 Tubing O.D.

Vacuum Module Series ZX

(VJA314) ZX1-VJA3 4 1 2 Z L 4 2 5 ZX1-VJ3 1 ZX1-VJ114K1, J1 AMV Manual override Type of actuation ZX1-VJ3 4 1 2 2 K3, J2 AEP N.C. (Normally closed) N.O.

Prevents Micro-Bubbles

Symbol 00 06 07 08 10 11 10 11 12 13 12 13 19 12 13 19 Tubing size Plug Tubing size Plug Body class Body class Symbol 2 3 4 5 Body class 2 3 4 5 2 to 5 2 to 5 LVC 6 1/4" 6 1/4" LVA 2 2 8 8 10 3/8" 10 3/8" Base type LVH A Stacking type 10 3/8" 10 3/8" Manifold stations LVD 3 3 12 1/2" 12 1/2" 02 2 stations LVQ 12 1/2" 12 1/2" 05 5 stations 4 4 LQ 19, 3/4" 19, 3/4" 12 1/2" 12 1/2" LVN 5

IDX-OM-W016

/ Installation 2 1 Transportation . 2 1 2 2 Installation . 2 2 2 2 1 Location . 2 2 2 2 2 Anchorage . 2 2 2 2 3 Air piping . 2 2 2 2 4 Drain Tube . 2 3 2 2 5 Electric Wiring . 2 4 2 3 Cautions for Reinstallation . 2 5 Chapter 3 Operation / Shutdown 3 1 Check points before operation . 3 1 3 2 Operation . 3 1 3 3 Shutdown . 3 2 3 4 Cautions about restart . 3 2 3 5 Check points before restart

Large Size Vacuum Module: Series ZR

X, Y, Z directions, for 2 hours each 2% F.S.

IDX-OM-M051

and function of parts . 1 4 Chapter 2 Transportation and installation 2 1 Transportation . 2 1 2 2 Installation . 2 2 2 2 1 Environment . 2 2 2 2 2 Fixing of product . 2 3 2 2 3 Pneumatic piping . 2 4 2 2 4 How to connect the facility water piping . 2 4 2 2 5 Draining piping . 2 5 2 2 6 Draining piping for condensed water . 2 6 2 2 7 Electric wiring . 2 7 2 3 Prevention of the facility water

K35-OMW0030

. 18 4-2.

S Couplers Series KK/KKH/KK13

Series KK13 Series KK13 Series KK13 Manufactured by RECTUS AG 163 Variations Variations Series KK Series KK 165 to 173 Male thread type Port size Series M5 R1/8 R1/4 R3/8 R1/2 R3/4 KK2 KK3 KK4 KK6 Female thread type Port size M5 Series Rc1/8 Rc1/4 Rc3/8 Rc1/2 KK2 KK3 KK4 KK6 Nut fitting type (for fiber reinforced urethane hose) Applicable hose I.D.

IDX-OM-Z004

. i-8 1 1.1 . 1-1 1.2 . 1-2 1.2.1 C . 1-2 1.2.2 G . 1-2 1.2.3 K . 1-2 1.2.4 P . 1-2 1.2.5 R . 1-2 1.2.6 V . 1-2 1.2.7 . 1-2 1.2.7 . 1-2 1.3. . 1-3 2.1 . 2-1 2.2 . 2-2 2.2.1 . 2-2 2.2.2 . 2-3 2.2.3 . 2-4 2.2.4 . 2-4 2.2.5 . 2-5 2.2.6 . 2-6 1 IDX-OM-Z004 2.2.7 . 2-7 2.3 . 2-9 2.3.1 . 2-9 2.4 . 2-9 3 / 3.1 . 3-1 3.2 . 3-1 3.3 . 3-2 3.4 . 3-2 3.5 . 3-2 3.6 . 3-3

LVQ

T) View Z Dimensions (N.O valve, double acting valve) (mm) A B C D M N T U V Model LVQ2 -S-2 LVQ3 -S-2 LVQ4 -S-2 LVQ5 -S-2 LVQ6 -S-2 2 1 25.5 46 31.5 58 7 15 35.3 10.6 7 2 1 23.5 47 29.5 59 7 15 36.9 16.5 10 2 1 23.5 47 29.5 59 7 20 37.9 22 2 1 17 35 70 41 82 7 20 64 25 2 1 35 70 41 82 7 20 66 32 17-5-72 11 Space Saving/Space Saving Connection Series LVQ How to Order VC LVQ 2 0 S 07 S VDW

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Load Black Blue Relay Black Blue Load Switch 1 Switch 1 Switch 1 Load Relay contact Brown Black Blue Brown Black Blue Brown Black Blue Switch 2 Relay Switch 2 Switch 2 Indication lights up when both switches are ON. 2-wire (2 pcs.)

2-Color Display Digital Pressure Switch Series ZSE80(F)/ISE80(H)

7.2 7.5 22 39.7 With bracket (Bottom ported) 50 40 30 4 x 4.5 49 43 20 30 20 10 60.5 3.5 2 47 25.2 35.5 16.3 40.3 1.5 738 Series ZSE80/ISE80 2-Color Display Digital Pressure Switch For General Fluids Dimensions Panel mount (Rear ported) 56.1 40 25.2 7.5 51.2 ZSE ISE ZSP PS ISA PSE IS 38.6 ISG Panel-cut dimensions ZSM 360.3 36 x n pcs. + 4 x (n pcs. 1) 36 360.3 4 x R3 or less 4 x R3 or less

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

2) Isopropyl alcohol Hydrochloric acid Ozone (dry) Hydrogen peroxide Concentration 5% or less, 50C or less Note 1, 2) Ethyl acetate Note 1, 2) Butyl acetate Note 2) Nitric acid (except fuming nitric acid) Concentration 10% or less DI water Sodium hydroxide Concentration 50% or less Nitrogen gas Super pure water Note 1, 2) Toluene Hydrofluoric acid Note 2) Sulfuric acid (except fuming sulfuric

XM, XY

9-1A AS568-016V XLD50-2-9-1A AS568-016V XLD63-2-9-1A XLD80-2-9-1A Standard AS568-009V S Valve seal assembly r XGT XLD80-2-9-1A XMD XYD XLD40-2-9-1A AS568-016 XLD50-2-9-1A AS568-016 XLD63-2-9-1A AS568-009 Special CYV Note 1) List the optional seal material symbol (refer to Table 1 below) after the model number, except for the standard seal material (FKM: compound no. 1349-80, produced by Mitsubishi

K35-OMX0029

Refer to the Air servo cylinder operation manual (K35-OMW0030) for further details. 2 Contents Front cover.1 Contents . 3 Safety Instructions . 4 1. Installation / Piping / Wiring . 13 1-1. Installation . 13 1-2 Piping . 14 1-3. Wiring . 15 2. Movement Setting . 17 2-1. Piston Rod Movement Direction (DIP Switch No. 1) . 18 2-2. Bore size (DIP Switch No.2 to No.4) . 18 2-3.

Series KC Self-seal Fittings

(mm) Effective orifice(mm 2) Weight (g) Part No.

KB

KBS1-R1 KBS2-R2 KBS3-R3 KBS4-R4 Rc(PT)1 2 Rc(PT)3 8 Rc(PT)1 4 Rc(PT)1 8 2.1-73 Combination Examples KBV2-06 3 Other piping material: KBN, KBD, KBR (P.2.1-79) Component module KBV2-063 KBH2-R2S1 KBP2 1 KB 2 D 1 KB 1 N KBP2 Style Body size Style KBH2-R2S KBV2-M5 Body size Body size Component module KBV2-M53 KBH2-R2S1 KBP2 1 Different diameter elbow female connector module: KBD Nipple: KBN KBP2

Vacuum

OO 3.24 5 . 1 2 8.01 Techn Vacuum System Specification (continued) 2.