Metal Seal/Rubber Seal Series VQ Body Ported

235.5 225 235.5 237.5 248 250 260.5 262.5 273 L3 L4 100 110.5 2-4-40 Body Ported Series VQ0/1000/2000 Plug Lead Unit: Flip Type VQ2000 55.5 (L plug connector) AC, Latching Manual override 50.5 (L plug connector) VQC L4 L3 49 (L plug connector) 5.2 AC, Latching L2 L1 52.5 SQ 44 (L plug connector) 48 Indicator light DIN rail clamp screw 5.5 31 VQ0 12 D-sub connector mounting screw VQ4 VQ5 R5

VQZ1000/2000/3000

5 (R)-M57 (Lead wire length) Cross section 0.23 mm2 Cover diameter 1.5 300 58.5 <63.5> 73.5 137.5 Indicator light 62 160 < >: AC 2-7-44 Base Mounted 45 45 Series VQZ1000/2000/3000 Plug Lead Unit: Single Unit VQZ3000 2 position single Grommet (G): VQZ3150 1(R)-G-02 03 300 (Lead wire length) 95 58 28 10.5 10.5 (For Rc 3/8) (For Rc 3/8) 9 9 24.5 mounting hole (For Rc 1/4) (For Rc 1/4) 5 R5

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

plug connector (M): VQZ2 5 (R)lMl 0 1 01 02 57 Indicator light Cover diameter 1.5 Cross section 0.23mm2 (Lead wire) 73.5 135.5<137.5> 300 61.5<62.5> 160 58.5<63.5> < >: AC 1.12-42 VQZ1000/2000/3000 Base Mounted VQZ3000 2 position single 0 1 02 03 Grommet(G): VQZ315 (R)lGl 300 95 58 28 (Lead wire length) 10.5 10.5 24.5Mounting holes (Rc(PT)3/8) (Rc(PT)3/8) 9 9 (Rc(PT)1/4) (Rc(PT)1/4) 5 R5

Series: LEKFS, Size: 40, Motor Mounting Position: In-line, Motor Type: E (Battery-less absolute, 24VDC, Step), Lead: B (Size 16: 5mm, Size 25: 6mm, Size 32: 8mm, Size 40: 10mm), Stroke: 300

Series: LEKFS, Size: 40, Motor Mounting Position: In-line, Motor Type: Battery-less absolute, 24VDC, Step, Lead: Size 16: 5mm, Size 25: 6mm, Size 32: 8mm, Size 40: 10mm, Stroke: 300, Motor Option: -, Seal Band Stopper: -, Actuator Cable Type, Length: -, Controller: -, Controller Mounting: -, Communication Plug Connector, I/O Cable: -

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New Products Guide 2 Air Preparation Equipment, Modular F. R. L., Air Tanks Fittings and Tubing Flow Control Equipment, Exhaust Filters Switches/Sensors Process Valves High Vacuum Equipment Temperature Control Equipment Pneumatic Instrumentation Process Gas Equipment Equipment CAT.E00-7A INDEX New Products Guide 2 Air Preparation Equipment/ Modular F. R. L./Air Tanks Refrigerated Air Dryer

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U side 7 6 5 4 3 2 D side Stations 1 Cable 6 to 12 G1/2 G1/2 (44) R3 R4 T E D R1, R6 R5 R2 F F n x 1/8,1/4 OUT port (For common SUP type) IN port (For individual SUP type) (mm) n (stations) Size Dimensions 2 3 4 5 6 7 8 9 10 86 100 90 108 103 121 L1 L2 L1 L2 L1 L2 122 136 126 144 144 162 158 172 162 180 185 203 194 208 198 216 226 244 230 244 234 252 267 285 266 280 270

For post-stoppage positioning and locking

green when turned ON Connector size M12 x 1 0 0.5 0.4 0.3 0.2 0.1 1 Supply pressure [MPa] 2 4 3 Connector pin arrangement Type Connector pins and arrangement 1 2 3 4 E2E-X7D1-M1J-T10.3M OUT ( ) OUT () 1 Pallet Lock Cylinder W-R1/W-R3 Series Dimensions W-R1-S2Position of fulcrum 2 x 18.5 Proximity switch mounting bracket 68 Proximity switch (Option) 117 15 15 26 26 2 x Rc3/8 36.5 6.5 R5

BALL SCREW DRIVE SLIDER ACTUATOR, ELECTRIC ACTUATOR, A06, 6.83000 lb

Series: LEKFS, Size: 40, Motor Mounting Position: In-line, Motor Type: E (Battery-less absolute, 24VDC, Step), Lead: B (Size 16: 5mm, Size 25: 6mm, Size 32: 8mm, Size 40: 10mm), Stroke: 350, Motor Option: B (with Lock), Seal Band Stopper: Standard, Actuator Cable Type, Length: R3 (3), Controller: CE1 (JXCE1, EtherCAT®, Direct Input Type), Controller Mounting: 8 (DIN Rail Mounting)

Series: LEKFS, Size: 40, Motor Mounting Position: In-line, Motor Type: E (Battery-less absolute, 24VDC, Step), Lead: B (Size 16: 5mm, Size 25: 6mm, Size 32: 8mm, Size 40: 10mm), Stroke: 150, Motor Option: B (with Lock), Seal Band Stopper: Standard, Actuator Cable Type, Length: R5 (5), Controller: C91 (JXC91, EtherNet/IPâ„¢ Direct Input Type), Controller Mounting: 7 (Screw Mounting)

Series: LEKFS, Size: 40, Motor Mounting Position: In-line, Motor Type: E (Battery-less absolute, 24VDC, Step), Lead: B (Size 16: 5mm, Size 25: 6mm, Size 32: 8mm, Size 40: 10mm), Stroke: 150, Motor Option: B (with Lock), Seal Band Stopper: Standard, Actuator Cable Type, Length: R5 (5), Controller: CE1 (JXCE1, EtherCAT®, Direct Input Type), Controller Mounting: 7 (Screw Mounting)

Series: LEKFS, Size: 40, Motor Mounting Position: In-line, Motor Type: E (Battery-less absolute, 24VDC, Step), Lead: B (Size 16: 5mm, Size 25: 6mm, Size 32: 8mm, Size 40: 10mm), Stroke: 300, Motor Option: w/o Option, Seal Band Stopper: Standard, Actuator Cable Type, Length: R5 (5), Controller: C91 (JXC91, EtherNet/IPâ„¢ Direct Input Type), Controller Mounting: 8 (DIN Rail Mounting)

Series: LEKFS, Size: 40, Motor Mounting Position: In-line, Motor Type: E (Battery-less absolute, 24VDC, Step), Lead: B (Size 16: 5mm, Size 25: 6mm, Size 32: 8mm, Size 40: 10mm), Stroke: 600, Motor Option: w/o Option, Seal Band Stopper: Standard, Actuator Cable Type, Length: R5 (5), Controller: C91 (JXC91, EtherNet/IPâ„¢ Direct Input Type), Controller Mounting: 8 (DIN Rail Mounting)

Series: LEKFS, Size: 40, Motor Mounting Position: In-line, Motor Type: E (Battery-less absolute, 24VDC, Step), Lead: B (Size 16: 5mm, Size 25: 6mm, Size 32: 8mm, Size 40: 10mm), Stroke: 600, Motor Option: B (with Lock), Seal Band Stopper: Standard, Actuator Cable Type, Length: R5 (5), Controller: CP1 (JXCP1, PROFINET, Direct Input Type), Controller Mounting: 8 (DIN Rail Mounting)

Series: LEKFS, Size: 40, Motor Mounting Position: In-line, Motor Type: E (Battery-less absolute, 24VDC, Step), Lead: B (Size 16: 5mm, Size 25: 6mm, Size 32: 8mm, Size 40: 10mm), Stroke: 600, Motor Option: B (with Lock), Seal Band Stopper: Standard, Actuator Cable Type, Length: R5 (5), Controller: C61 (JXC61, Parallel I/O), Controller Mounting: 8 (DIN Rail Mounting), Communication Plug Connector

Series: LEKFS, Size: 40, Motor Mounting Position: In-line, Motor Type: E (Battery-less absolute, 24VDC, Step), Lead: B (Size 16: 5mm, Size 25: 6mm, Size 32: 8mm, Size 40: 10mm), Stroke: 300, Motor Option: w/o Option, Seal Band Stopper: Standard, Actuator Cable Type, Length: R5 (5), Controller: C91 (JXC91, EtherNet/IPâ„¢ Direct Input Type), Controller Mounting: 7 (Screw Mounting)

Series: LEKFS, Size: 40, Motor Mounting Position: In-line, Motor Type: E (Battery-less absolute, 24VDC, Step), Lead: B (Size 16: 5mm, Size 25: 6mm, Size 32: 8mm, Size 40: 10mm), Stroke: 200, Motor Option: B (with Lock), Seal Band Stopper: Standard, Actuator Cable Type, Length: R1 (1.5), Controller: C91 (JXC91, EtherNet/IPâ„¢ Direct Input Type), Controller Mounting: 8 (DIN Rail Mounting)

Series: LEKFS, Size: 40, Motor Mounting Position: In-line, Motor Type: E (Battery-less absolute, 24VDC, Step), Lead: B (Size 16: 5mm, Size 25: 6mm, Size 32: 8mm, Size 40: 10mm), Stroke: 700, Motor Option: w/o Option, Seal Band Stopper: Standard, Actuator Cable Type, Length: R5 (5), Controller: CP1 (JXCP1, PROFINET, Direct Input Type), Controller Mounting: 8 (DIN Rail Mounting)

Series: LEKFS, Size: 40, Motor Mounting Position: In-line, Motor Type: Battery-less absolute, 24VDC, Step, Lead: Size 16: 5mm, Size 25: 6mm, Size 32: 8mm, Size 40: 10mm, Stroke: 300, Motor Option: w/o Option, Seal Band Stopper: Standard, Actuator Cable Type, Length: 5, Controller: JXC91, EtherNet/IPâ„¢ Direct Input Type, Controller Mounting: DIN Rail Mounting, Communication Plug Connector