e

With guide l = C/H/HT Combining with another guide Note) Direct mount of load Note) Friction coefficient for combining with another guide is 0.1 or less. 1092 Model Selection Guide Tact Time Heavy load specifications (2.45 m/s2) Standard load specifications (4.90 m/s2) Medium load specifications (9.80 m/s2) Light load specifications (19.60 m/s2) 4.0 4.0 4.0 4.0 300 mm/s 300 mm/s 300 mm/s

AIR CYLINDER

Parts list * is different from standard type (C(D)S2) No.

48

T1 T2 T3 T4 L 0.5 V (T1 + T3) V T2 = L : Stroke [mm] (Operating condition) V : Speed [mm/s] (Operating condition) a1: Acceleration [mm/s2] (Operating condition) a2: Deceleration [mm/s2] (Operating condition) 500 0.5 300 (0.1 + 0.1) 300 T1 = V/a1 [s] T3 = V/a2 [s] = P T2: Constant speed time can be found from the following equation. = 1.57 [s] T4 = 0.3 [s] T2 = [s] L 0.5 V (T1

Basic type / Direct mount type Series CY3B/CY3R

Impact acceleration [m/s2] 5 0 50 100 150 200 250 300 Speed [mm/s] Relationship between speed and impact acceleration 120 in vacuum environments (1.3 x 104 Pa) low leakage, and low outgassing.

Support Guide/11-LEFG Series

When selecting the overhang, refer to "Calculation of Guide Load Factor" or the Electric Actuator Selection Software for confirmation, http://www.smcworld.com Dynamic Allowable Moment Acceleration/Deceleration 1000 mm/s2 3000 mm/s2 5000 mm/s2 Orientation Load overhanging direction m : Work load [kg] Me: Dynamic allowable moment [Nm] L : Overhang to the work load center of gravity [mm] Model

CATALOG

, 1000, 1200, 1400, 1600, 1800, 2000 32 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000, 1200, 1400, 1600, 1800, 2000 40 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000, 1200, 1400, 1600, 1800, 2000 O P T I O N S T R O K E A D J U S T M E N T U N I T Stroke Adjustment Unit 25 MY-A25L 32 MY-A32L 40 MY-A40L 25 MY-S25L MY-S25B 32 MY-S32L MY-S25B 40 MY-S40L MY-S32B M O R E H O W T O O R D

JXCx-OMU0026

630 550 500 420 330 250 230 180 0 Min. speed [mm/s] (Independent and interpolation) 10 5 20 12 6 Min. speed [mm/s] (Speed tuning control) 17 9 33 20 10 Model LEFS32 Lead symbol H A B Lead [mm] 24 16 8 Stroke (mm) 600 700 800 900 1000 800 900 1000 800 900 1000 Max. speed [mm/s] 1200 930 750 610 500 500 410 340 250 200 170 Min. speed [mm/s] (Independent and interpolation) 24 16 8 Min. speed

JXCx-OMT0002

630 550 500 420 330 250 230 180 Min. speed [mm/s] (Independent and interpolation) 10 5 20 12 6 Min. speed [mm/s] (Speed tuning control) 17 9 33 20 10 Model LEFS32 Lead symbol H A B Lead [mm] 24 16 8 Stroke (mm) 600 700 800 900 1000 800 900 1000 800 900 1000 Max. speed [mm/s] 1200 930 750 610 500 500 410 340 250 200 170 Min. speed [mm/s] (Independent and interpolation) 24 16 8 Min. speed

SFOD-OMT0010

630 550 500 420 330 250 230 180 Min. speed [mm/s] (Independent and 10 5 20 12 6 interpolation) Min. speed [mm/s] 17 9 33 20 10 (Speed tuning control) Model LEFS32 Lead symbol H A B Lead [mm] 24 16 8 Stroke [mm] 600 700 800 900 1000 800 900 1000 800 900 1000 Max. speed [mm/s] 1200 930 750 610 500 500 410 340 250 200 170 Min. speed [mm/s] (Independent and 24 16 8 interpolation) Min. speed

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

Bore size Series MB, CA2 Pressure 0.5 MPa Load factor 50% Stroke 500 mm Series CS1/CS2 Pressure 0.5 MPa Load factor 50% Cylinder stroke 1000 mm Average speed (mm/s) System 40 50 63 80 100 125 140 160 180 200 1000 Perpendicular, upward actuation Horizontal actuation 900 800 700 600 500 400 300 200 100 0 A 1000 900 800 700 600 500 400 300 200 100 0 B System Components It is when the cylinder

DOC1023125

to 900 24 to 610 16 to 410 8 to 200 4 to 100 30 to 930 20 to 620 10 to 280 5 to 140 Actuator specification 901 to 1000 24 to 500 16 to 340 8 to 170 4 to 85 30 to 780 20 to 520 10 to 250 5 to 125 1001 to 1100 30 to 660 20 to 440 10 to 220 5 to 110 1101 to 1200 30 to 570 20 to 380 10 to 190 5 to 95 Horizontal 10 Max. acceleration/deceleration [mm/s2] Vertical 5000 Positioning repeatability

VFS

Series CS1 Pressure 0.5 MPa Load factor 50% Cylinder stroke 1000 mm 50 63 80 100 125 140 160 180 200 250 300 Average speed (mm/s) System VK 1000 Perpendicular, upward actuation Horizontal actuation 900 800 700 600 500 400 300 200 100 VZ A VF VFR 0 1000 VP4 900 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area

DOC1023126

400 6 to 200 Stroke Speed [mm/s] 350 to 400 30 to 900 18 to 600 9 to 300 5 to 150 30 to 900 24 to 640 12 to 320 6 to 160 range 400 to 500 30 to 900 24 to 640 12 to 320 6 to 160 Actuator specification Max acceleration /deceleration [mm/s2] Horizontal 10 Vertical 5000 Pushing speed [mm/s2] Note5) 35 30 Positioning repeatability [mm] 0.05 Lost motion [mm] Note6) 0.1 or less Lead [mm] 20 12

AC Servo Motor Driver (Pulse input type/Positioning type ）

(STO switch) S2: Start switch (STO release switch) S3: On switch S4: Off switch KM1: Magnetic contactor K3: Safety relay EMG: Emergency stop switch CN3 EM1 or EM2 M Servo motor Note.

AC Servo Motor Driver (Network card type ）

itch (STO sw itch) S2: Start sw itch (STO release sw itch) S3: On sw itch S4: Off sw itch KM1: Magnetic contactor K3: Safety relay EMG: Emergency stop sw itch CN3 EM1 or EM2 M Servo motor Note.

SV

R1 R2 SG FG 24 V 0 V S1 S2 SG 24 V 0 V S1 S2 R1 R2 SG FG 24 V 0 V S1 S2 R1 R2 SG FG 24 V 0 V Ground either the reception side or the transmission side of the shielding wire shield.

Series SV

S1 S2 S1 S2 S1 S2 S1 Master unit V BDH SD FG SD FG SD FG SD FG CANL Twisted pair wire with shield FG BDL Class 3 ground Class 3 ground Class 3 ground Class 3 ground CANH V+ Connect the shielding wire to the SD terminal.

LEC-OM071xx

The station address is set using the rotary switches S1 and S2. (1) Settings of the Rotary Switches S1 and S2 Set the station address using the rotary switches S1 and S2. Station Address S1 S2 00H to 02H: Disabled (Do not use these addresses.) 0 0 to 2 03H (Factory setting) 0 3 04H 0 4 EFH E F F0H to FFH: Disabled (Do not use these addresses.)

1.1

SEMI S8 SEMI S8 is a guideline on ergonomics which is more detailed than the ergonomic requirements in Section 14 of SEMI S2. SEMI F47 SEMI F47 is a SEMI standard which stipulates guidelines regarding voltage sag immunity. Semiconductor manufacturers require this standard for temperature control equipment, just like SEMI S2.

Environment

]) 20 40 60 30 45 60 Horizontal (2000 [mm/s2]) 30 60 70 40 60 80 Work load [kg] Note 2) For LECPA (3000 [mm/s2]) 12 30 30 20 40 40 (2000 [mm/s2]) 18 50 50 30 60 60 Actuator specifications Vertical Note 15) (3000 [mm/s2]) 7 15 29 10 21 42 Pushing force [N] Note 3) Note 4) Note 5) 63 to 122 126 to 238 232 to 452 80 to 189 156 to 370 296 to 707 Speed [mm/s] Note 5) 18 to 400 9 to 200 5 to 100