Vacuum

Y, Z directions 3limes each 12.6FS or lesis at 25'C 01: Rl/8. [.r5 x 0 8, Tl: NPT1/8, M5 x 0 8.

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N lszo-oH /Pressure Center 5 GJ1.81(300) H:23.62(600) Leading wire length Manual ovorrido o (PE Port) w/filter ' r ' r ' 1 ' I : : : ' ' M type plug connector/Nv4t320-OM/Closd Center tMzi!

Vacuum

Y, Z directions 3limes each 12.6FS or lesis at 25'C 01: Rl/8. [.r5 x 0 8, Tl: NPT1/8, M5 x 0 8.

Accuracy: Basic Type, Size: 63, Motor Type: S3 (200W Output, Incremental Encoder), Lead, mm: B (Size 40: 8mm, Size 63: 10mm, Size 100: 10mm), Stroke: 300mm, Motor Option: None, Cover: w/o Cover, Cable Type: R (Robotic, Flexible), Cable Length: 2m, Driver Type: A1 (LECSA1-S, 100~120V, Incremental, Pulse Input)

Accuracy: Basic Type, Size: 63, Motor Type: S3 (200W Output, Incremental Encoder), Lead, mm: B (Size 40: 8mm, Size 63: 10mm, Size 100: 10mm), Stroke: 300mm, Motor Option: None, Cover: w/o Cover, Cable Type: R (Robotic, Flexible), Cable Length: 2m, Driver Type: A1 (LECSA1-S, 100~120V, Incremental, Pulse Input), I/O Connector: H (Connector)

Accuracy: Basic Type, Size: 63, Motor Type: S3 (200W Output, Incremental Encoder), Lead, mm: B (Size 40: 8mm, Size 63: 10mm, Size 100: 10mm), Stroke: 300mm, Motor Option: None, Cover: w/o Cover, Cable Type: S (Standard), Cable Length: 2m, Driver Type: A1 (LECSA1-S, 100~120V, Incremental, Pulse Input)

Accuracy: Basic Type, Size: 63, Motor Type: S3 (200W Output, Incremental Encoder), Lead, mm: B (Size 40: 8mm, Size 63: 10mm, Size 100: 10mm), Stroke: 300mm, Motor Option: None, Cover: w/o Cover, Cable Type: R (Robotic, Flexible), Cable Length: A (10m), Driver Type: A2 (LECSA2-S, 200~230V Incremental, Pulse Input), I/O Connector: H (Connector)

Accuracy: Basic Type, Size: 63, Motor Type: S3 (200W Output, Incremental Encoder), Lead, mm: B (Size 40: 8mm, Size 63: 10mm, Size 100: 10mm), Stroke: 300mm, Motor Option: None, Cover: w/o Cover, Cable Type: S (Standard), Cable Length: 5m, Driver Type: A1 (LECSA1-S, 100~120V, Incremental, Pulse Input), I/O Connector: 1 (1.5m)

Accuracy: Basic Type, Size: 63, Motor Type: S3 (200W Output, Incremental Encoder), Lead, mm: B (Size 40: 8mm, Size 63: 10mm, Size 100: 10mm), Stroke: 300mm, Motor Option: None, Cover: w/o Cover, Cable Type: S (Standard), Cable Length: 5m, Driver Type: A2 (LECSA2-S, 200~230V Incremental, Pulse Input), I/O Connector: 1 (1.5m)

Accuracy: Basic Type, Size: 63, Motor Type: S3 (200W Output, Incremental Encoder), Lead, mm: B (Size 40: 8mm, Size 63: 10mm, Size 100: 10mm), Stroke: 300mm, Motor Option: None, Cover: w/o Cover, Cable Type: S (Standard), Cable Length: A (10m), Driver Type: A1 (LECSA1-S, 100~120V, Incremental, Pulse Input), I/O Connector: 1 (1.5m)

Accuracy: Basic Type, Size: 63, Motor Type: S3 (200W Output, Incremental Encoder), Lead, mm: B (Size 40: 8mm, Size 63: 10mm, Size 100: 10mm), Stroke: 300mm, Motor Option: None, Cover: w/o Cover, Cable Type: R (Robotic, Flexible), Cable Length: 2m, Driver Type: A1 (LECSA1-S, 100~120V, Incremental, Pulse Input), I/O Connector: 1 (1.5m)

Accuracy: Basic Type, Size: 63, Motor Type: 200W Output, Incremental Encoder, Lead, mm: Size 40: 8mm, Size 63: 10mm, Size 100: 10mm, Stroke: 300mm, Motor Option: None, Cover: w/o Cover, Cable Type: Robotic, Flexible, Cable Length: 2m, Driver Type: LECSA1-S, 100~120V, Incremental, Pulse Input, I/O Connector: -, Option: -

Accuracy: Basic Type, Size: 63, Motor Type: 200W Output, Incremental Encoder, Lead, mm: Size 40: 8mm, Size 63: 10mm, Size 100: 10mm, Stroke: 300mm, Motor Option: None, Cover: w/o Cover, Cable Type: Robotic, Flexible, Cable Length: 2m, Driver Type: LECSA1-S, 100~120V, Incremental, Pulse Input, I/O Connector: Connector, Option: -

Accuracy: Basic Type, Size: 63, Motor Type: 200W Output, Incremental Encoder, Lead, mm: Size 40: 8mm, Size 63: 10mm, Size 100: 10mm, Stroke: 300mm, Motor Option: None, Cover: w/o Cover, Cable Type: Standard, Cable Length: 2m, Driver Type: LECSA1-S, 100~120V, Incremental, Pulse Input, I/O Connector: -, Option: -

Accuracy: Basic Type, Size: 63, Motor Type: 200W Output, Incremental Encoder, Lead, mm: Size 40: 8mm, Size 63: 10mm, Size 100: 10mm, Stroke: 300mm, Motor Option: None, Cover: w/o Cover, Cable Type: Robotic, Flexible, Cable Length: 10m, Driver Type: LECSA2-S, 200~230V Incremental, Pulse Input, I/O Connector: Connector, Option: -

Accuracy: Basic Type, Size: 63, Motor Type: 200W Output, Incremental Encoder, Lead, mm: Size 40: 8mm, Size 63: 10mm, Size 100: 10mm, Stroke: 300mm, Motor Option: None, Cover: w/o Cover, Cable Type: Standard, Cable Length: 5m, Driver Type: LECSA1-S, 100~120V, Incremental, Pulse Input, I/O Connector: 1.5m, Option: -

Accuracy: Basic Type, Size: 63, Motor Type: 200W Output, Incremental Encoder, Lead, mm: Size 40: 8mm, Size 63: 10mm, Size 100: 10mm, Stroke: 300mm, Motor Option: None, Cover: w/o Cover, Cable Type: Standard, Cable Length: 5m, Driver Type: LECSA2-S, 200~230V Incremental, Pulse Input, I/O Connector: 1.5m, Option: -

Accuracy: Basic Type, Size: 63, Motor Type: 200W Output, Incremental Encoder, Lead, mm: Size 40: 8mm, Size 63: 10mm, Size 100: 10mm, Stroke: 300mm, Motor Option: None, Cover: w/o Cover, Cable Type: Standard, Cable Length: 10m, Driver Type: LECSA1-S, 100~120V, Incremental, Pulse Input, I/O Connector: 1.5m, Option: -

Accuracy: Basic Type, Size: 63, Motor Type: 200W Output, Incremental Encoder, Lead, mm: Size 40: 8mm, Size 63: 10mm, Size 100: 10mm, Stroke: 300mm, Motor Option: None, Cover: w/o Cover, Cable Type: Robotic, Flexible, Cable Length: 2m, Driver Type: LECSA1-S, 100~120V, Incremental, Pulse Input, I/O Connector: 1.5m, Option: -

Fluoropolymer Piping Equipment

-R5 LQ3T21-R6 LQ3T31-R1 LQ3T31-R2 LQ3T31-R5 LQ3T31-R6 LQ3T32-R1 LQ3T32-R5 LQ3T41-R1 LQ3T41-R5 LQ3T51-R1 LQ3T51-R5 LQ3T61-R1 LQ3T61-R5 4 x 3 1/4" x 5/32" 2 1 TL TIL TLM TILM 6 x 4 2 3/8" x 1/4" 3 TD TID 1/4" x 5/32" TH TIH 10 x 8 3 1/2" x 3/8" 4 8 x 6 12 x 10 4 3/8" x 1/4" 19 x 16 5 25 x 22 6 3/4" x 5/8" Note) For details of the applicable tubing sizes, refer to page 945. 5 1/2" x 3/8" 3/8