10

For Air Upstream pressure of valve P1 1.0 MPa 1.0 Downstream pressure of valve (P2) [MPa] 0.8 Subsonic 0.9 0.6 Critical pressure 0.7 0.8 Sonic 0.4 0.6 0.5 0.4 0.2 0.3 0.2 0.1 0 2 50 100 150 200 250 300 400 350 3 100 200 300 400 500 4 400 600 800 1,000 1,200 5 200 1,400 600 1,000 7 350 700 8 400 700 1,000 1,300 10 (Connection: 1/4) 500 700 10 (Connection: 3/8, 1/2) Flow rate Q [L/min (ANR

3

300 200 100 20 200 400 600 800 1000 25 200 400 600 800 1000 1200 1400 Flow rate Q [kg/h] ( ): Saturated steam holding heat (kcal/kg) ( ): Saturation temperature (C) For Water How to read the graph The pressure differential to generate a flow rate of 25 L/min water is as follows.

V100

Core wire crimping area Crimping area Core wire Molded coil Lead wire Cover Hook 4-15-18 19 Series VZ200/400 Precaution 2 Be sure to read before handling. For Safety Instructions and Solenoid Valve Precautions, refer to page 4-18-2. How to Use Plug Connector Caution Attaching and detaching lead wires with sockets 1.

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Smooth Cylinder 400 _ 800 '200 1600 Strni

7

For a 15 orifice (VXD242/Port size 1/2), P 0.16 MPa, for a 20 orifice (VXD252), P 0.055 MPa, for a 25 orifice (VXD262), P 0.032 MPa 1,000 Port size 2 50 Cv = 49 VX2 Port size 1 1/2 40 Cv = 31 500 400 Port size 1 1/4 35 Cv = 23 Port size 1 25 Cv = 12.5 VXK 300 Port size 3/4 20 Cv = 9.5 VXD VXD 200 VXZ Flow rate Q [L/min] Port size 1/2 15 Cv = 5.5 100 VXS Port size 3/8 15 Cv = 4.5 VXB 50

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0.019 0.077 0.173 0.307 0.483 0.81 IT,lmtig 400 0.017 0.068 0.154 0.273 0.427 0.72 35~ 0.Q15 0.060 0.135 0.239 0.374 I 0.63 " . > JOCt 0.013 0.051 0.115 0.205 0.320 0.54 , , I?a:20 . 25 I 932 >40 1>50 2T 3T 4T Response time (sec) Aclsorpti&." area (em:!)

LEC-OM02704CN

(2) 4[in](10.16[cm])100CFM(2.8m3/min) (3) SCCR(Short Circuit Current Rating) UL100kA (4) 15 [min] LECSC2-S5 LECSC2-S7 1 LECSC2-S8 LECSC1-S5 LECSC1-S7 2 A 12 (5) UL/C-UL (6) National Electrical Code , Canada Electrical Code LECSCLECSC40 A 13 1 111-17 1.1 12 1.1.1 CC-Link 12 1.1.2 13 1.1.3 14 1.2 16 1.3 18 1.4 1-10 1.5 1-12 1.6 1-13 1.6.1 1-13 1.7 1-14 1.8

Accuracy: Basic Type, Size: 40, Motor Type: S2 (100W Output, Incremental Encoder), Lead, mm: B (Size 40: 8mm, Size 63: 10mm, Size 100: 10mm), Stroke: 400mm

Accuracy: Basic Type, Size: 40, Motor Type: 100W Output, Incremental Encoder, Lead, mm: Size 40: 8mm, Size 63: 10mm, Size 100: 10mm, Stroke: 400mm, Motor Option: -, Cover: -, Cable Type: -, Cable Length: -, Driver Type: -, I/O Connector: -, Option: -

Accuracy: Basic Type, Size: 40, Motor Type: S2 (100W Output, Incremental Encoder), Lead, mm: B (Size 40: 8mm, Size 63: 10mm, Size 100: 10mm), Stroke: 400mm, Motor Option: None, Cover: w/o Cover, Cable Type: R (Robotic, Flexible), Cable Length: 5m, Driver Type: A2 (LECSA2-S, 200~230V Incremental, Pulse Input)

Accuracy: Basic Type, Size: 40, Motor Type: 100W Output, Incremental Encoder, Lead, mm: Size 40: 8mm, Size 63: 10mm, Size 100: 10mm, Stroke: 400mm, Motor Option: None, Cover: w/o Cover, Cable Type: Robotic, Flexible, Cable Length: 5m, Driver Type: LECSA2-S, 200~230V Incremental, Pulse Input, I/O Connector: -, Option: -

VT317

Connector for DIN Terminal Rated voltage Light/Surge voltage suppressor (D) With surge voltage suppressor (DS) Light/Surge voltage suppressor (DZ) 100 VAC 200 VAC 24 VDC GDM2A-S1 GDM2A-S2 GDM2A-S5 GDM2A-Z1 GDM2A-Z2 GDM2A-Z5 GDM2A For other rated voltages, please consult with SMC. 4-7-12 13 3 Port Direct Operated Poppet Solenoid Valve Rubber Seal Series VT317 Dimensions Conduit: VT317-C Grommet

Series: LEFS (Ball Screw Drive), Accuracy: Basic Type, Body Size: 40, Motor Type: F (High Performance, Step Motor 24 VDC), Lead: B (Size 16: 5mm, Size 25: 6mm, Size 32: 8mm, Size 40: 10mm), Stroke: 600mm, Motor Option: B (w/Lock), Auto Switch Mounting Bracket: None, Grease Application: with, Positioning Pin Hole: Housing B Bottom, Actuator Cable Type, Length: S5 (5m), Controller: C9H (JXC9H

Series: LEFS (Ball Screw Drive), Accuracy: Basic Type, Body Size: 40, Motor Type: F (High Performance, Step Motor 24 VDC), Lead: B (Size 16: 5mm, Size 25: 6mm, Size 32: 8mm, Size 40: 10mm), Stroke: 500mm, Motor Option: B (w/Lock), Auto Switch Mounting Bracket: None, Grease Application: with, Positioning Pin Hole: Housing B Bottom, Actuator Cable Type, Length: S5 (5m), Controller: C9H (JXC9H

Please contact us for the latest version.sales@ocaire.com, CYL, RND BODY, DBL ACTING, ACTUATOR, CG/CG3 ROUND BODY CYLINDER, S5, 100MM CG CLEAN-ROOM, .00000 lb

Please contact us for the latest version.sales@ocaire.com, CYL, GUIDE, CLEAN ROOM, ACTUATOR, MGF COMPACT GUIDE CYLINDER, S5, 100MM MGF CLEAN ROOM, 26.13022 lb, ModelBore size (mm)Standard stroke (mm) 305075100MGF1001007.08.29.611.0

Optional auto switches can be mounted on 4 faces of the body.Low profile, compact, guide table for clean room applications , Large diameter guide rod enables cylinder to handle eccentric loads applied from any direction within a 360 angle, Grade 2 particle generation, Auto switch capable, CYL, GUIDE, CLEAN ROOM, ACTUATOR, MGF COMPACT GUIDE CYLINDER, S5, 100MM MGF CLEAN ROOM, 23.14853

Please contact us for the latest version.sales@ocaire.com, CYL, COMPACT, CLEAN ROOM, ACTUATOR, CQ2 COMPACT CYLINDER, S5, 100MM CQ2 CLEAN-ROOM, 10.51203 lb

Please contact us for the latest version.sales@ocaire.com, CYL, COMPACT, CLEAN ROOM, ACTUATOR, CQ2 COMPACT CYLINDER, S5, 100MM CQ2 CLEAN-ROOM, 10.25149 lb

Please contact us for the latest version.sales@ocaire.com, CYL, COMPACT, CLEAN ROOD, ACTUATOR, CQ2 COMPACT CYLINDER, S5, 100MM CQ2 CLEAN-ROOM, 10.25149 lb