LG1H

4 Section A-A u Parts list Material Note No. Description No.

High Vacuum Angle Valve

A XLFV: Air operated, With solenoid valve J N M Port 1(P) K L Port 3(R) Solenoid valve [mm] Model J K L M N XLFV-16-2 41 18.5 8.5 2.7 3 XLFV-25-2 45.5 22.5 8.5 2.7 3 XLFV-40-2 54.5 35 8.5 2.7 3 XLFV-50-2 71 35.5 12 4 2 XLFV-63-2 80.5 44 12 4 2 XLFV-80-2 90.5 60 12 4 2 13 Aluminum High Vacuum Angle Valve Double Acting, O-ring Seal RoHS XLG Series How to Order q w e r t y u XLG 2 M9N 16 A XLG

SX

When ozone enters or is generated in the air supply. 2 4 2 4 2 4 Applicable solenoid valves: Series SX3 0, SX5 0, SX7 0 3 5 7 20 40 X90 SX Model no. Entry is the same as standard products.

0.4

(B) 2 (A) 4 r r 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w e w q VQ1200 VQ1201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w VQ1301 VQ1401 VQ1300 VQ1400 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) VQ1500 VQ1501 r r (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

) .15 4.5.2 Motor-less operation in PC or PLCetc .18 4 1 4.

Valve Single Unit

C8 C8 1 4 1 4 Rc Rc C10 Note) The value is for manifold base with 5 stations and individually operated 2 position type.

Valve Single Unit

C8 C8 1 4 1 4 Rc Rc C10 Note) The value is for manifold base with 5 stations and individually operated 2 position type.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

1021-VQ2400 1021-VQ2301 1021-VQ2401 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r 1021-VQ2500 1021-VQ2501 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) Component Parts Component Parts No.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

1021-VQ2400 1021-VQ2301 1021-VQ2401 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r 1021-VQ2500 1021-VQ2501 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) Component Parts Component Parts No.

Table of Contents

P611070-4 P611090-4 P611060-4 P611080-4 P612010-4 P611010-4 P611070-4 P611090-4 P611060-4 P611080-4 P612010-4 Model CDRB2BWU10 CDRB2BWU15 CDRB2BWU20 CDRB2BWU30 MRQ DSingle/Double type 2 Switch Block Unit Part No. Series CRB2 20Auto switch unit comes with one right-hand and one left-hand switch blocks that are used for addition or when the switch block is damaged.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

P611070-4 P611090-4 P611060-4 P611080-4 P612010-4 P611010-4 P611070-4 P611090-4 P611060-4 P611080-4 P612010-4 Model CDRB2BWU10 CDRB2BWU15 CDRB2BWU20 CDRB2BWU30 MRQ DSingle/Double type 2 Switch Block Unit Part No. Series CRB2 20Auto switch unit comes with one right-hand and one left-hand switch blocks that are used for addition or when the switch block is damaged.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

P611070-4 P611090-4 P611060-4 P611080-4 P612010-4 P611010-4 P611070-4 P611090-4 P611060-4 P611080-4 P612010-4 Model CDRB2BWU10 CDRB2BWU15 CDRB2BWU20 CDRB2BWU30 MRQ DSingle/Double type 2 Switch Block Unit Part No. Series CRB2 20Auto switch unit comes with one right-hand and one left-hand switch blocks that are used for addition or when the switch block is damaged.

CRB2/CRBU2/CRB1

P611070-4 P611090-4 P611060-4 P611080-4 P612010-4 P611010-4 P611070-4 P611090-4 P611060-4 P611080-4 P612010-4 Model CDRB2BWU10 CDRB2BWU15 CDRB2BWU20 CDRB2BWU30 Single/Double type 2 Switch block unit part no. Series CRB2 Auto switch unit comes with one right-hand and one left-hand switch blocks that are used for addition or when the switch block is damaged.

45

exhaust center One-touch fitting for 4 C4 5 3 position pressure center One-touch fitting for 6 C6 SX3000 Mixed M One-touch fitting for 4 C4 SI Unit Part No.

45

exhaust center One-touch fitting for 4 C4 5 3 position pressure center One-touch fitting for 6 C6 SX3000 Mixed M One-touch fitting for 4 C4 SI Unit Part No.

Stability of suction position,

4 !3 !4 !0 !0 o i !1 o !1 i Component Parts r r No.

ITV

Cable connector (4-wire) Right angle type Cable connector (4-wire) Straight type 52 Mounting hole 4 x 7 40 (31) F.R.L.

Vacuum

-EC-M zx1-DR1-4 sra.3-4) NZXi071-EC-M zxl-DR16-4 NZZXl04-TB-A r:::r:l::t: l:l:l:lrrl:l:l:l :r:t:41:1it!

Vacuum

-EC-M zx1-DR1-4 sra.3-4) NZXi071-EC-M zxl-DR16-4 NZZXl04-TB-A r:::r:l::t: l:l:l:lrrl:l:l:l :r:t:41:1it!

Environment

position 2.6 LC3F2 D-M9NAV/D-M9PAV D-M9BAV 500(1000)(3000)(5000) Mounting screw M2.5 x 4 L Stainless steel Indicator light Slotted set screw (flat point) Indicator light Slotted set screw M2.5 x 4 L 8 2 8 3.2 4.6 2 4.6 2.6 SMC SMC 4 2.8 2.8 2.7 22 22 2.6 2.6 2.6 9.3 9.3 4 4 6 Most sensitive position 6 Most sensitive position 507 A