VQC

Model A side B side JIS Symbol 4 (A) 2 (B) VQC1A01 VQC2A01 N.C. valve N.C. valve 5 (R1) 3 (R2) 1 (P) 4 (A) 2 (B) VQC1B01 VQC2B01 N.O. valve N.O. valve Exhaust center : VQC1A01 VQC2A01 Pressure center: VQC1B01 VQC2B01 5 (R1) 3 (R2) 1 (P) 4 (A) 2 (B) VQC1C01 VQC2C01 N.C. valve N.O. valve 5 (R1) 3 (R2) 1 (P) R1 A P B R2 2-2-7 8 Base Mounted: Variations F Kit P Kit T Kit L Kit M Kit S Kit Sonic

VQC

Single mounting screw, clamp construction Exhaust center : VQC1A01 VQC2A01 Pressure center: VQC1B01 VQC2B01 Replaceable One-touch fittings R1 A P B R2 Model A side B side JIS symbol 4 (A) 2 (B) VQC1A01 VQC2A01 N.C. valve N.C. valve Wiring 5 (R1) 3 (R2) 1 (P) 4 (A) 2 (B) VQC1B01 VQC2B01 N.O. valve N.O. valve 5 (R1) 3 (R2) 1 (P) 4 (A) 2 (B) VQC1C01 VQC2C01 N.C. valve N.O. valve 5 (R1) 3 (R2

Series SV

100 70% 50% 30% 10% 0 400 MB 40 300 Stroke mm AS2201F -02-08 AS2200-02 200 100 0 ANA1 -C10 T0806 400 MB 50 300 Stroke mm AS3201F -02-08 AS3000-02 200 100 0 400 MB 63 300 Stroke mm AS4000-03 200 100 0 Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800 900 1000 1100 1200 Speed at the end mm/s Applicable related components For details regarding different conditions,

SV

(mm) AS5000-02 AS420-02 AS4000-03 400 200 200 100 0 0 400 800 CS1 125 MB 100 600 300 Stroke (mm) AS5000-02 AS420-02 200 400 AS4000-04 200 100 0 0 Solenoid valve Silencer Tubing Speed controller Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800 900 1000 1100 1200 200 300 400 500 600 700 800 900 1000 1100 1200 Speed at the end (mm/s) Speed at the end (mm/s) Applicable

5 Port Solenoid Valve, Series VQC

Single mounting screw, clamp construction Exhaust center : VQC1A01 VQC2A01 Pressure center: VQC1B01 VQC2B01 Replaceable One-touch fittings R1 A P B R2 Model A side B side JIS symbol 4 (A) 2 (B) VQC1A01 VQC2A01 N.C. valve N.C. valve Wiring 5 (R1) 3 (R2) 1 (P) 4 (A) 2 (B) VQC1B01 VQC2B01 N.O. valve N.O. valve 5 (R1) 3 (R2) 1 (P) 4 (A) 2 (B) VQC1C01 VQC2C01 N.C. valve N.O. valve 5 (R1) 3 (R2

Table of Contents

200 300 300 0.4 MPa 0.4 MPa 0.4 MPa 0.4 MPa 150 150 0.3 MPa 0.3 MP 0.3 MPa 0.3 MPa 0.3 MP 0.3 MPa 200 200 0.3 MPa 0.3 MPa 0.3 MPa 0.3 MP 0.3 MPa 100 100 0.2 MPa 0.2 MP 0.2 MPa 0.2 MPa 0.2 MP 0.2 MPa 0.2 MPa 0.2 MPa 0.2 MP 0.2 MPa 0.2 MPa 100 100 50 50 0.1 MPa 0.1 MPa 0.1 MPa 0.1 MPa 0.1 MPa 0.1 MP 0.1 MPa 0.1 MPa 0.1 MP 0.1 MPa 50 100 150 200 0 0 50 100 150 200 0 40 80 120 160 200 0 40 80

Table of Contents

Model Model L D L D TCU0805-1-N-X6 TCU0425-1-N-X6 1 N x 8 31 3 to 90 L x 5.2 + 200 N x 4 18 1 3 to 90 L x 5.9 + 200 8 5 TCU0805-2-N-X6 TCU0425-2-N-X6 2 42 3 to 40 L x 3 + 200 N x 16 L x 4.4 + 200 N x 8 2 3 to 90 4 2.5 28 TCU1065-1-N-X6 TCU0425-3-N-X6 1 52 3 to 45 L x 5 + 200 N x 10 N x 12 3 3 to 63 L x 2.9 + 200 28 10 6.5 TCU1065-2-N-X6 TCU0604-1-N-X6 2 3 to 35 N x 20 52 L x 3 + 200 N x 6

VQ5000

Set pressure with a flat head screw driver. 42 Base Mounted Type Series VQ5000 Plug-in Unit Metal seal type Rubber seal type (A) 4 (B) 2 VQ5101 (A) 4 (B) 2 VQ5100 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5201 (A) 4 (B) 2 (A) 4 (B) 2 VQ5200 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5301 VQ5300 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5401 VQ5400 (A) 4 (B) 2 (A) 4

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

) 1 (P) 5 (R1) 3 (R2) VQ5201 (A) 4 (B) 2 (A) 4 (B) 2 VQ5200 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5301 VQ5300 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5401 VQ5400 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5501 VQ5500 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) Parts list Parts list Description Material Note No. 1 2 3

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

) 1 (P) 3 (R2) Nil R Metal seal (B) (A) Rubber seal 2 4 FPG 3 5 1 (R2) (R1)(P) Available for 7-6 and 7-8 only A02 VS7 1 Sub-plate Size 1 2 3 Specifications Size 1 Size 2 Piping specifications Weight (kg) Model Size 3 Piping direction Port size for 3(R2), 5(R1) Port size for 1(P), 2(B), 4(A) Port size VS7-1-A02 VS7-1-A03 VS7-1-B02 VS7-1-B03 VS7-2-A03 VS7-2-A04 VS7-2-A06 VS7-2-B03 VS7-2-B04

High Vacuum Angle Valve

Model XL-25-2 XL-40-2 XL-50-2 XL-63-2 XL-80-2 Rated voltage for heater 90 to 240 VAC Heater assembly quantity 1 1 1 1 H4 100C 100 V 200/40 200/50 400/100 600/150 Heater assembly quantity used Heater power W (Nominal value) Inrush/Power consumption (Option symbol, Operating voltage) 200 V 800/40 800/50 1600/100 2400/150 Heater assembly quantity 1 1 1 1 2 H5 120C 100 V 200/40 400/70 400/

C76

Built-in magnet CG1 Nil D None Built-in magnet MB Option Type MB1 A B Bottom side mounting Front side mounting R2 Stainless steel piston rod and rod end nut CA2 CS1 Stroke Mounting style Bore size C76 Symbol Standard stroke (mm) Bore size (mm) 32 40 Mounting Front nose Front nose in line port Max. stroke (mm) 200 200 10, 25, 40, 50, 80, 100, 125, 160, 200 F Y C85 C95 CP95 NCM NCA Example

C76

Bore size Stroke NCA Standard stroke (mm) Bore size (mm) 32 40 Max. stroke (mm) 200 250 32 40 10, 25, 40, 50, 80, 100, 125, 160, 200, 250 C76F40A C76F32A Flange, Foot (1 pc.) DFlange, Foot (2 pcs. with mounting nut 1 pc.)

Smooth Cylinder/Low Speed Cylinder

ND hole H10 Axis d9 MM NX2 H A L R2 U2 Z (Min.)

Series VQ Base Mounted Metal Seal/Rubber Seal

Lead wire color 24VDC 100, 110 200, 220 V AC V AC Black (Yellow) [Yellow] Lead wire color 24VDC 100, 110 200, 220 VAC VAC SOL.A SOL.A () () Black (Blue) [Red] Red (Blue) [Red] COM(+) COM(+) Red (Blue) [Red] SOL.B White (Gray) [Gray] () Single solenoid VQ0 double VQ1000 double solenoid Note: ( ) is for 100, 110VAC. [ ] is for 200, 220VAC Plug connector lead wire length Note) The length of

76

230 V (50 Hz) Three-phase 200 V (50 Hz) Three-phase 200/220 V (60 Hz) IDU37E R1 1/2 37 215.4 201.3 IDU55E 55 346.0 296.6 R2 IDU75E 75 441.4 388.4 Refer to the separate catalog.

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

Plug A Plug A B B Single Number of R1 P R1 P R2 R2 solenoids Plug A Plug A B B Double R1 P R1 P R2 R2 How to Use Plug Connector Insertion/Removal of Connector InsertionPush the connector straight on to the pins of the solenoid, making sure the lip of the lever securely "locks" into the groove of the solenoid cover.

High Vacuum Angle Valve, XL Series

Item XL -25 XL -40 XL -50 XL -63 XL -80 Rated heater voltage 90 to 125VAC 200/10 200/20 400/40 400/60 600/100 Heater power W (nominal value) In-rush/Normal (Option symbol) H1 80C (176F) 200/40 200/60 400/100 600/150 H2 100C (212F) 200/30 400/70 400/80 600/130 800/180 H3 120C (248F) Note) In-rush current will flow to the heater for approximately 30 seconds and will then subside.

XL

Item XL -25 XL -40 XL -50 XL -63 XL -80 Rated heater voltage 90 to 125VAC 200/10 200/20 400/40 400/60 600/100 Heater power W (nominal value) In-rush/Normal (Option symbol) H1 80C (176F) 200/40 200/60 400/100 600/150 H2 100C (212F) 200/30 400/70 400/80 600/130 800/180 H3 120C (248F) Note) In-rush current will flow to the heater for approximately 30 seconds and will then subside.

Shock Absorbers and Rate Controls

Compretied (lbr.) 0ttt.tftt(8) .24 0.28 l2-t30 50 0,000 2t5 0,5 0 I 0ffil.t 5tjl(B) 0.38 r 2. r30 l0 168,000 200 0.8 1.7 80 2 0tlt.25(B) 0.38 t2-130 50 178.000 200 0.8 1.7 8r 2 tR0EI[.25(B] .25 0.38 3 5 0 50 r78.000 200 0.8 1.7 100 2 0tfl.35(Bl .28 0.50 t2-r30 r50 300,000 450 1.0 2.2 t20 3 r.R0r .35(B) ,n 0.50 3-50 150 300.000 450 1.0 2.2 200 3 0 r . 5 ( B ) .44 0_50 t2-180 250 284.000 775