LEC-OM07605CN

0 50 15 0 250 350 40 0 300 0 50 150 250 350 350 (1,2 [%]) (1,2 [%]) b a 1. ()30r/min100% 2. 300%350%LE-T10.1 10 3 10. 10.2 (1) 10.1 10.1 1 (1) (2) [W] 2] [m [kVA] LECSS2-T5 LE-T50.3 25 15 0.5 LE-T60.3 25 15 0.5 LECSS2-T7 LE-T70.5 25 15 0.5 LECSS2-T8 LE-T80.9 35 15 0.7 LECSS2-T9 LE-T91.3 50 15 1.0 1. . 2

Vacuum System Peripherals:

Metal Seal, Rubber Seal 3 port solenoid valve Series VQZ200/300 Piping specifications Solenoid valve Port size Effective area (mm2) (Cv) Flow characteristics C (dm3/(sbar)) VQZ215 VQZ235 VQZ225 VQZ245 VQZ315 VQZ335 VQZ325 VQZ345 1.7 2.3 1.7 2.5 3.0 4.5 2.9 4.4 VQZ 200 1 8 1 4 , Base mounted (With sub-plate) VQZ 300 , 1 4 3 8 Base mounted 3 port solenoid valve Series VK Compact size: Width

Programless Controller Series LECP1

A Controller type Motor type Power supply voltage Symbol Type AC servo motor (S2) Capacity Encoder LECSA1-S1 LECSA1-S3 LECSA2-S1 LECSA2-S3 LECSA2-S4 LECSB1-S5 LECSB1-S7 LECSB2-S5 LECSB2-S7 LECSB2-S8 AC servo motor (S2) 100 to 120 VAC 50/60 Hz S1 S3 S4 S5 S7 S8 100 W B Pulse input type (For absolute encoder) AC servo motor (S3) Pulse input type (For incremental encoder) Incremental AC servo

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A Controller type Motor type Power supply voltage Symbol Type AC servo motor (S2) Capacity Encoder LECSA1-S1 LECSA1-S3 LECSA2-S1 LECSA2-S3 LECSA2-S4 LECSB1-S5 LECSB1-S7 LECSB2-S5 LECSB2-S7 LECSB2-S8 AC servo motor (S2) 100 to 120 VAC 50/60 Hz S1 S3 S4 S5 S7 S8 100 W B Pulse input type (For absolute encoder) AC servo motor (S3) Pulse input type (For incremental encoder) Incremental AC servo

Step Motor Controller

A Controller type Motor type Power supply voltage Symbol Type AC servo motor (S2) Capacity Encoder LECSA1-S1 LECSA1-S3 LECSA2-S1 LECSA2-S3 LECSA2-S4 LECSB1-S5 LECSB1-S7 LECSB2-S5 LECSB2-S7 LECSB2-S8 AC servo motor (S2) 100 to 120 VAC 50/60 Hz S1 S3 S4 S5 S7 S8 100 W B Pulse input type (For absolute encoder) AC servo motor (S3) Pulse input type (For incremental encoder) Incremental AC servo

VQ4000

EX300-TMB1For models of Mitsubishi Electric Corporation EX300-TTA1For OMRON EX300-TFU1For Fuji Electric EX300-T001General purpose T units have 32 control points per unit No. of output points, 16 points Master station PLC made by Mitsubishi Electric Corporation Series MELSEC-A AJ71PT32-S3, AJ71T32-S3 A1SJ71PT32-S3 Max. 64 stations, connected to remote I/O stations (Max. 512 points).

VQ5000

Master station PLC made by Mitsubishi Electric Corporation Series MELSEC-A AJ71PT32-S3, AJ71T32-S3 A1SJ71PT32-S3 Max. 64 stations, connected to remote I/O stations (Max. 512 points). No. of output points, 16 points. No. of sta. occupied, 2 stations T unit Can be connected with PLC I/O card for serial transmission.

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

Terminal name Details 1 L+ +24 V 2 NC N/A 3 L 0 V 4 C/Q IO-Link signal 145 DIN rail mounting adapter LEC-3-D0 * With 2 mounting screws Conversion cable P5062-5 (Cable length: 300 mm) This should be used when a DIN rail mounting adapter is mounted onto a screw mounting type controller afterwards. 300 DIN rail AXT100-DR* For , enter a number from the No. line in the table on page 603-8.

AC Servo Motor Driver (MECHATROLINK-III type)

Station Address S1 S2 00H to 02H: Disabled 0 0 to 2 (Do not use these addresses.) 03H (Factory setting) 0 3 04H 0 4 EFH E F F0H to FFH: Disabled F 0 to F (Do not use these addresses.) (2) Settings of the DIP Switch S3 The following table shows the settings of the DIP switch (S3). Switch No.

ITV

0 50 100 150 200 250 300 Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Supply pressure (MPa) Series ITV205 Linearity Hysteresis Repeatability 1.0 0.9 1.0 0.5 Output deviation factor (%F.S.)

LEF-OM007xx

*Refer to the table of Applicable stroke 6mm 6mm 8mm 8mm 10mm 10mm B B Cable type *Applicable stroke Standard produced upon receipt of order Without cable Nil Without cable Nil 100 100 200 200 300 300 400 400 500 500 600 600 700 700 800 800 900 900 1000 1000 Robotic type cable R Robotic type cable R 11-LEFS25 11-LEFS25 Standard cable S Standard cable S 11-LEFS32 11-LEFS32 Motor cable

Information

LECSA1: Single phase 100 to 120 VAC, 50/60 Hz LECSA2: Single phase 200 to 230 VAC, 50/60 Hz Main circuit power supply L2 L2 P Terminal to connect regeneration option LECSAm-S1: No need for connection LECSAm-S3, S4: Connected at time of shipping. If regeneration option is required for Model Selection, connect to this terminal.

ISA2

P1 Sensor S1 S3 S2 S4 P2 S1, S2: Fix orifice S3: Variable orifice (adjusted by setting dial) S4: Detection nozzle 16-8-6 7 Series ISA2 Air Catch Sensor Internal Circuit and Wiring Circuit and Wiring for 2 Port Solenoid Valve NPN open collector output DC (+) Without indicator light DC circuit Without display light AC Circuit OUT Main circuit of switch Main circuit of switch Load 1 DC (+) 1

0.01

EXH port P1 SUP port Sensor S1 S3 S2 S4 P2 Detection port S1, S2: Fix orifice S3: Variable orifice (adjusted by setting dial) S4: Detection nozzle 868 A Air Catch Sensor Series ISA2 Wiring Individual wiring Centralized wiring Terminal block 1: Brown 2: NC 3 0 1 2 3 4 Brown Blue Black DC (+) NC DC () OUT ZSE30 ISE30 OUT 1 OUT 2 OUT 3 OUT 4 OUT 5 6 9 3: Blue DC () NC DC (+) OUT 6 ZSE40 ISE40

Table of Contents

200 100 1500 1000 500 400 300 200 100 1500 1000 500 400 300 200 100 MY3B max.

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

(Lead wire length) Approx. 300 33.1 48.5[55.5] Refer to page 563 for dimensions with connector cable.

Magnetically Coupled Rodless Cylinder

50 mm 50, 63 63 mm Standard Stroke Bore size (mm) Standard stroke (mm) Maximum available stroke (mm) 300 6 50, 100, 150, 200 500 10 15 20 50, 100, 150, 200, 250, 300 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 1000 1500 100, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 25 3000 32 40 3000 100, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 50 5000 63 Note 1)

5-Port Solenoid Valve

0.45 MPa 300 300 0.3 MPa 0.3 MPa 0.15 MPa 0.15 MPa 200 200 100 100 0 0 0 1 2 3 4 5 6 0 1 2 3 4 5 6 Number of restrictor rotations Number of restrictor rotations SY3A3R-C6 SY5A3R-C6 500 500 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] 0.6 MPa 0.6 MPa 400 400 0.45 MPa 0.45 MPa 0.3 MPa 0.3 MPa 300 300 0.15 MPa 0.15 MPa 200 200 100 100 0 0 0 1 2 3 4 5 6 0 1 2 3 4 5 6 Number of restrictor

LEJ-OM004xx

D. *2 (4) S troke [mm] Standard Produced upon receipt of order 300 200 400 500 600 700 800 900 1000 1200 1500 Str o k e (m m ) Ty pe LEJS40 LEJS63 *2Strok es other than standard and produced up o n receipt o f order are available as special orders, so plea s e contact with our com pany . (9) Driver type *4 (7) Cable type *4 *5 *6 Com patible driv er P owe r supply v oltage [V ] Without

Electric Actuator/High Rigidity Slider Type Ball Screw Drive Series LEJS AC Servo Motor ( 100/200 W )

Electric Actuator/High Rigidity Slider Type Ball Screw Drive Series LEJS AC Servo Motor (100/200 W) RoHS How to Order LEJS 40 500 A S2 Motor type 1 Size Lead [mm] 40 63 A B LEJS40 16 8 LEJS63 20 10 Symbol Symbol Type Actuator size Output [W] AC servo motor (Incremental encoder) AC servo motor (Incremental encoder) Compatible drivers 2 S2 LECSA;-S1 100 40 Stroke [mm] 3 S3 LECSA;-S3 200