3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000 VQZ3000 0.9 1.2 Bore size (mm) Cv Cylinder speed (mm/s) Series CJ2 Series CM2 Series CA1 Base mounted (With sub-plate) 6 10 16 20 25 32 40 40 50 63 80 100 150 300 V V VQZ1000 Body width 10 450 0.35 V V V 600 750 150 300 VQZ2000 Body width 15 0.7 450 V V V V V 600 750 150 300 VQZ3000 Body width 18 1.2 450 V V V V V 600 750 Cylinder speed marked with V can be controlled by speed controller.
Possible to use in vacuum to 100 kPa Applicable Tubing Tubing material FEP, PFA, Nylon, Soft nylon, Polyurethane Tubing O.D. 4, 6, 8, 10, 12, 16 Specifications Fluid Air, Water 1 Operating pressure range 2 100 kPa to 1 MPa Proof pressure (at 23C) 3 MPa Ambient and fluid temperature 5 to 60C, Water: 0 to 40C (No freezing) Thread Mounting section JIS B 0203 (Taper thread for piping) JIS B 0205
or less 4 x R3 or less 67 or more Panel thickness 1 to 5 mm Note) This is the minimum value for the piping method 01 or N01.
VQZ3000 VFS VS 0.7 0.9 VS7 Bore size (mm) Cylinder speed (mm/s) Base mounted (With sub-plate) Cv Series CJ2 Series CM2 Series CA1 6 10 16 20 25 32 40 40 50 63 80 100 150 300 VQZ1000 Body width 10 450 0.3 V V V 600 750 150 300 VQZ2000 Body width 15 0.6 450 V 600 V V 750 150 300 VQZ3000 Body width 18 0.9 450 V V V V V 600 750 Cylinder speed marked with can be controlled by speed controller
SET POS. 6 6 4-R3 6 6 PAX 4-R3 4-R3 (Max. 91) 325 PB (Max. 91) 191 87 60 87 60 112 112 17-5-55 14 Series LVD Fitting Assembly Procedure Assemble fittings following the procedure shown below.
SET POS. 6 6 4-R3 6 6 4-R3 4-R3 (Max. 91) 325 (Max. 91) 191 87 60 87 60 112 112 17-5-84 Fitting Assembly Procedure Assemble fittings following the procedure shown below.
Series: LEFS, Accuracy: Basic Type, Size: 16, Motor Mounting Position: In-line, Motor Type: E (Battery-less absolute, 24VDC, Step), Lead: A (Size 16: 10mm, Size 25: 12mm, Size 32: 16mm, Size 40: 20mm), Stroke: 100mm
Series: LEFS, Accuracy: Basic Type, Size: 16, Motor Mounting Position: In-line, Motor Type: Battery-less absolute, 24VDC, Step, Lead: Size 16: 10mm, Size 25: 12mm, Size 32: 16mm, Size 40: 20mm, Stroke: 100mm, Motor Option: -, Auto Switch Compatibility: -, Grease Application: -, Positioning Pin Hole: -, Actuator Cable Type, Length: -, Controller: -, Mounting: -, I/O Cable: -, Communication
P port(Supply port)Supply pressure fitting (0.55 to 0.8 MPa) R1,R2,R3(*1) ports(Exhaust port)Silencer *1 A small amount of air in the cover tube is exhausted from R3 port. *2 Ports FA and FB are plugged before shipment.
[degree] speed [r/min] [ms] [ms] 1 120.000 1000 100 150 100 1 05 2 -320 .000 500 150 100 200 1 10 3 -230.000 3000 200 300 150 3 15 4 70.000 1500 300 100 Disabled 0 (Note) 20 Note.
100 Gripping point L (mm) Gripping point L (mm) Misc.
kPa 100 kPa 100 kPa IO-Link compatible/ L type 0 0 0 0 100 kPa 101 kPa 100 kPa 100 kPa 100 kPa 101 kPa 100 kPa 100 kPa 100 kPa 500 kPa 500 kPa 1.5 MPa 500 kPa 500 kPa 2 MPa 4 MPa 2 outputs (NPN/PNP)/IO-Link4 2 outputs (NPN/PNP) Analog (Voltage/Current)5 Analog (Voltage/Current) IP65 IP65 M5 female thread, R1/8, NPT1/8 R1/41, NPT1/41, G1/41, Rc1/8, URJ1/42, TSJ1/43 Copy function5, Auto-shift
] 9 212 [100] Size 2 Size 2 12 212 [100] 12 212 [100] Size 3 Size 3 15 212 [100] 15 212 [100] Note 1) Apparent power: The value at ambient temperature of 68F (20C) and when the rated voltage is applied.
kPa 0 100 kPa 500 kPa 1 MPa 100 kPa 0 100 kPa 500 kPa 1 MPa 2 MPa 5 MPa 101 kPa 101 kPa Withstand pressure 500 kPa Withstand pressure 500 kPa 0 0 100 kPa 100 kPa 100 kPa 100 kPa Withstand pressure 500 kPa Withstand pressure 500 kPa 100 kPa 100 kPa Withstand pressure 2 MPa 1 MPa 1 MPa Withstand pressure 1.5 MPa 100 kPa Withstand pressure 4 MPa 2 MPa 2 outputs (NPN/PNP) 2 outputs (NPN/PNP)
*Power supply 100 V type: 35C Power supply 200/230 V type: 40C 2.
pressure: 0.5 MPa Inlet pressure: 0.5 MPa 100 200 3 400 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) 6 Effective area (mm2) Effective area (mm2) Effective area (mm2) 06, 08 08, 10 1.0 300 06 04 2 4 50 100 200 0.5 1 2 100 0.0 0 0 0 0 0 0 5 10 0 5 10 0 5 10 Number of needle rotations (turns) Number of needle rotations (turns) Number of needle rotations (turns) ASG520F
Gripping point L mm Gripping point L mm MRHQ25 MRHQ25 120 100 Pressure 0.2MPa 100 Pressure 0.2MPa 80 Overhang H mm Overhang H mm 80 60 0.3MPa 0.5MPa 0.6MPa 0.7MPa 60 0.7MPa 0.4MPa 0.3MPa 0.4MPa 40 0.5MPa 40 0.6MPa 20 20 0 20 40 60 80 100 0 20 40 60 80 100 120 Gripping point L mm Gripping point L mm 12-11-7 8 Series MRHQ Effective Gripping Force Expressing the effective gripping force Graph
Gripping point L mm Gripping point L mm MRHQ25 MRHQ25 120 100 Pressure 0.2MPa 100 Note: 1in = 25.4mm 1MPa = 145psi 80 Pressure 0.2MPa 80 Overhang H mm Overhang H mm 60 0.3MPa 0.5MPa 0.6MPa 0.7MPa 60 0.7MPa 0.4MPa 0.3MPa 0.4MPa 40 0.5MPa 40 0.6MPa 20 20 0 20 40 60 80 100 0 20 40 60 80 100 120 Gripping point L mm Gripping point L mm 4 Rotary Gripper Series MRHQ Effective Gripping Force Effective
pressure: 0.5 MPa Inlet pressure: 0.5 MPa 100 200 3 400 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) 6 Effective area (mm2) Effective area (mm2) Effective area (mm2) 06, 08 08, 10 1.0 300 06 04 2 4 50 100 200 0.5 1 2 100 0.0 0 0 0 0 0 0 5 10 0 5 10 0 5 10 Number of needle rotations (turns) Number of needle rotations (turns) Number of needle rotations (turns) ASG520F
Order separately with part number, AS-T-1. 100 200 205 300 400 M5 standard 1/8 standard 1/4 standard 3/8 standard Made to Order (Refer to page 608 for details.) Applicable tubing O.D.