AC Servo Motor Driver (Network card type ）

13 1 13.

Air Cylinder Series MB

thread 10.2 10.2 MB 10.2 A K f N N f K A l + Stroke 10.2 l h + Stroke ZZ + 2 Stroke S + Stroke h MB1 CA2 Without Air Cushion CS1 Stroke range Width across flats Bore (mm) Eff. thread length S ZZ A C B D Ee11 F G H1 H MA MB J K MM N P V W S ZZ CS2 32 40 50 63 80 100 to 1000 125 6 8 11 11 13 16 16 32.5 38 46.5 56.5 72 89 12 16 20 20 25 30 30 35 40 45 45 55 13 13 14 14 20 20 47 51 58 58 72

Made to Order

size (mm) B C FK FY NA NB Y KI 6 10 16 20 25 32 13 15 20 26 32 40 22 24 32 40 50 62 11 12 13 16 20 24 20.5 22 28 33 43.5 51.5 M3 x 0.5 M3 x 0.5 M4 x 0.7 M4 x 0.7 M5 x 0.8 M5 x 0.8 6 7 6 8 10 12 14 15 18 20 28 32 10.5 11.5 15.5 19.5 24.5 30.5 (mm) F H Z Z Z Double acting Single acting (Spring return) Single acting (Spring extend) Action Without switch With switch Without switch With switch

0.4

Note 2) L kit: Nil F P PC J Nil S F kit P kit (26P) P kit (20P) J kit (20P) L kit S kit q w Note) L kit: Nil F e r kit SE SSQ1000 No.

0.4

Linearity (77F) 0.15% F .S. Repeatability (77F) 0.6% F .S. 0.5% F .S.

CM2

x 1.5 21.5 42.5 M32 x 2 188 1/4 In the case of with rod boot, refer to basic style on page 6-4-31 and f dimension on page 6-4-13.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

For Safety Instructions and Actuator Precautions, refer to pages 7-13-3 to 7-13-6.

ZX

-2-44 44 Vacuum Module: Vacuum Pump System Series ZX Suction Filter Unit: ZX1-F Refer to page 13-2-12 for details.

CV/MVGQ

ZZ + Stroke In the case of 20 to 32 Eh8 B1 FT FX FY FZ H H1 A AL B B2 C2 D F FD H2 HX Bore size (mm) 20 25 32 40 Stroke range 75 41 34 7 4 60 Up to 300 18 15.5 13 26 30 8 13 5 8 65.3 20 0 0.033 60 75 45 Up to 300 22 19.5 40 17 32 37 10 13 7 4 6 8 70.5 26 0 0.033 45 19.5 40 13 7 4 60 75 Up to 300 22 17 32 37 12 6 8 76.5 26 0 0.033 5 66 36 82 50 24 21 52 14 16 7 84.5 Up to 300 22 41 47.3

CV/MVGQ

247 280 292 f 11.2 11.2 11.2 12.5 14.0 h 59 66 66 80 81 27 30 31 37 40 13 13 16 16 17 84 90 98 116 126 8 0 0 0 0 27 27 34 44 43 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 The minimum stroke of the one with rod boot is 20 mm or more.

4/5 Port Solenoid Valve

O.D.: 4, 5/32" : 6, 1/4" (2.3) L plug connector (L): SYJ5120-L-M5(-F) M plug connector (M): SYJ5120-M-M5(-F) DIN terminal (D): SYJ5120-D-M5(-F) M8 connector (WO): SYJ5120-WO-M5(-F) Approx. 300 (Lead wire length) Applicable cable O.D. 3.5 to 7 82.1 Max. 10 60.9 28.1 [35.1] 53.4 12.7 42.1 32.6 M8 x 1 15.1 39.2 [46.2] Approx. 300 (Lead wire length) Pg7 73 [75.2] (2.3) 63.2 [65.4] 83 72.1 3

Vacuum Pad

ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3-T (10/13/16) UM:-A5 ZP3-T (10/13/16) B:-A5 ZP3-T (10/13/16) UM:-B5 ZP3-T (10/13/16) B:-B5 ZP3-T (10/13/16) UM:-A12-@ ZP3-T (10/13/16) B:-A12-@ ZP3-T (10/13/16) UM:-A12-04 ZP3-T (10/13/16) B:-A12-04 ZP3-T (10/13/16

Vacuum Pad

ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3-T (10/13/16) UM:-A5 ZP3-T (10/13/16) B:-A5 ZP3-T (10/13/16) UM:-B5 ZP3-T (10/13/16) B:-B5 ZP3-T (10/13/16) UM:-A12-@ ZP3-T (10/13/16) B:-A12-@ ZP3-T (10/13/16) UM:-A12-04 ZP3-T (10/13/16) B:-A12-04 ZP3-T (10/13/16

Vacuum Pad

ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3-T (10/13/16) UM:-A5 ZP3-T (10/13/16) B:-A5 ZP3-T (10/13/16) UM:-B5 ZP3-T (10/13/16) B:-B5 ZP3-T (10/13/16) UM:-A12-@ ZP3-T (10/13/16) B:-A12-@ ZP3-T (10/13/16) UM:-A12-04 ZP3-T (10/13/16) B:-A12-04 ZP3-T (10/13/16

Air Cylinder NCA1 Series

1/2 1 1/2 3 1/2 3 1/2 12 3 2 1/4-12 3 1/2 3.75 1/2 1 1/2 3 1/2 3 1/2 14 2 1/2 1 7/8-12 3 3.125 1/2 1 1/2 3 13/16 3 13/16 14 3 2 1/4-12 3 1/2 3.75 1/2 1 1/2 3 13/16 3 13/16 14 3 1/2 2 1/2-12 3 1/2 4.25 1/2 1 1/2 3 13/16 3 13/16 BORE E EE(NPT) F G J K ND NT TN ADD STROKE LB P SN 8 8 1/2 3/4 3/4 2 1 1/2 9/16 1 1/8 3/4-10 4 1/2 5 7/8 3 1/4 3 1/4 10 10 5/8 1 3/4 2 1/4 2 11/16 1 1/2 1-8 5 1/2

NCA1

1/2 1 1/2 3 1/2 3 1/2 12 3 2 1/4-12 3 1/2 3.75 1/2 1 1/2 3 1/2 3 1/2 14 2 1/2 1 7/8-12 3 3.125 1/2 1 1/2 3 13/16 3 13/16 14 3 2 1/4-12 3 1/2 3.75 1/2 1 1/2 3 13/16 3 13/16 14 3 1/2 2 1/2-12 3 1/2 4.25 1/2 1 1/2 3 13/16 3 13/16 BORE E EE(NPT) F G J K ND NT TN ADD STROKE LB P SN 8 8 1/2 3/4 3/4 2 1 1/2 9/16 1 1/8 3/4-10 4 1/2 5 7/8 3 1/4 3 1/4 10 10 5/8 1 3/4 2 1/4 2 11/16 1 1/2 1-8 5 1/2

JXCx-OMT0023

d) Incremental move command (200 10STM m) b) Incremental move command (100 10STM m) Forward rotation 0r/min Servo motor speed 1100 1200 1300 1000 1500 1700 a) c) e) f) 13 44 13.

Table of Contents

D 11 13 E 25 30 F 32 40 G 36 46 H 12 15 N 45 49 [ ]: Individual pressure type J 7 9 K 6.5 8.5 M 54 58 17-3-100 5 The VX series will be revised shortly.

Base Mounted Metal Seal/Rubber Seal Series VQ

AXT661-14A-F AXT661-14AN-F AXT661-13A-F AXT661-13AN-F Positive common Single VQ0 (2-wire) Negative common Positive common Double (latching) (3-wire) Negative common Note) Lead wire length: 300 mm The part numbers above are applicable to 2 to 10 stations. 11 to 16 stations: AXT661A(N)-F-425. 13 14 F kit D-sub connector (25 P) P kit Flat ribbon cable connector (26 P) T kit Terminal block (16

CL

CAD CLM2F Bore size Stroke Boss cut (mm) BP Bore Stroke range BN 80 90 90 BQ BZ E FZ 75 75 75 82 D 8 10 12 14 B 34 40 40 52 FD 7 7 7 7 GA GC 8 9 9 8 AL 15.5 19.5 19.5 21 C1 30 37 37 47.3 F 13 13 13 16 GB 8 8 8 11 A 18 22 22 24 FX 60 60 60 66 GK 3.5 4 4 4 B1 13 17 17 22 FT 4 4 4 5 BC 38 45 45 52 GD 55 FY 36 B2 26 32 32 41 20 25 32 40 0 1/8 1/8 1/8 1/8 1/8 1/8 1/8 1/8 to 400 to 450 to 450