ZP

Model A B C D Y Y B C D Flat A Model ZPT10D-B5-A10 10 12 15 24 6 Flat with ribs U C ZPT13 -B5-A10 U C ZPT16 -B5-A10 U C ZPT16D-B5-A10 ZPT10 -B5-A10 16 18 16 25 7 10 12 1.7 12 21 3 13 15 1.8 Dimensions by Stroke 16 18 12.5 21.5 3.5 1.2 10 16 G Model Dimensions by Stroke E F E F 10, 13 16 ZPTD10-B5-A10 35.5 23 71.5 36.5 72.5 G Model E F E F ZPTD20-B5-A10 45.5 109.5 46.5 110.5 51 U C ZPT 20-

Table of Contents

Non reversed output mode Normal mode NPN output 16-13-4 F Unit conversion URJ 16-13-5 F.S.

5-Port Solenoid Valve

E 16 D-sub connector (25 pins)*1*2 F 16 Spring type terminal block (32 pins)*1*2 Symbol Description P PNP N NPN tEX600 digital input/output unit EX600 DM E P Input/Output type Number of inputs/outputs and connector Connector Connecting Base Symbol Number of inputs Number of outputs Connector E 8 8 D-sub connector (25 pins)*1*2 F 8 8 Spring type terminal block (32 pins)*1*2 Symbol Description

LEC-OM02704CN

[1][F][F] 14.4.1 (DWELL) 0 16 0 0 0 16 1 10 (DWELL) 0 1 (f) [6][4][0][1][F][F] 14.4.1 0 16 0 0 0 16 1 10 0 1 14 44 14 (2) 11EEP-ROM RAMEEP-ROM10 (a) [C][0][0][1][F][F] 14.4.2 [C][0] [0][1][F][F] 16 0 11 22 33 44 55 66 1 STM STM 0 EEP-ROMRAM 1 RAM 1 RAM 1 1 EEP-ROM (b) [C][6][0][1][F][F] 14.4.2 [C][6] [0][1][F][F] 0 16 0 EEP-ROMRAM 1 RAM 1 RAM 1 1 EEP-ROM

Metal Seal/Rubber Seal Series VQ Body Ported

F kit (D-sub connector) T kit (Terminal block) P kit (Flat ribbon cable connector) S kit (Serial) kit U S F 15P U S P 26P U S A S U S P 20P U S P 16P U S P A B C 10P F 25P T2 T1 Type Note) Note) Note) Max. points 14 8 8 16 16 16 16 16 14 Note) Due to the limitation of internal wiring.

ZP

Model A B C D E Y Y B C D A E Flat Model ZPY10D--A10 10 12 15 25 41 6 Flat with ribs U C ZPY16D--A10 ZPY10 -A10 16 18 16 26 42 7 15 12 22 1.7 10 12 1.8 3 38 ZPY13 -A10 U C 13 Dimensions by Stroke ZPY16 -A10 U C 38.5 16 18 12.5 22.5 1.2 3.5 10 16 H Model Dimensions by Stroke F G F G 10, 13 16 ZPYD10--A10 52 23 86 53 87 H Model F G F G ZPYD20--A10 62 124 63 125 51 U C U C U C U C U C ZPYD30

AC Servo Motor Driver (CC-Link Type ）

Refer to section 16.1.2. 16 2 16.

AC Servo Motor Driver (CC-Link Type ）

Refer to section 16.1.2. 16 2 16.

Table of Contents

S + Stroke F CX ZZ + Stroke D-X H 20B E G Mounting nut Data NN NA F N CY3B15 (mm) B 35 36 46 60 70 NA 17 24 30 36 46 R 28 34 40 50 S 83 106 111 124 150 W 35 50 50 50 60 X 19 25 30 40 40 D 16.6 21.6 26.4 33.6 41.6 ZZ 103 132 137 156 182 E 3 2 2 2 3 N 11 18 18.5 20 26 F 10 13 13 16 16 MM M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 G 5.5 7.5 7.5 8 11 NN M10 x 1 M20 x 1.5 M26 x 1.5 M26 x 1.5 M32

High Purity Fluoropolymer

L H M W E Y N LQ2H2A-F LQ2H2B-F LQ2H2C-F LQ2H2D-F LQ2H2E-F LQ2H2F-F LQ2H3A-F LQ2H3B-F LQ2H3C-F LQ2H3D-F LQ2H4A-F LQ2H4B-F LQ2H4C-F LQ2H4D-F LQ2H5A-F LQ2H5B-F LQ2H5C-F LQ2H5D-F 1/4" 3/16" 1/8" 1/4" 3/16" 1/8" 3/8" 1/4" 3/8" 1/4" 1/2" 3/8" 1/2" 3/8" 3/4" 1/2" 3/4" 1/2" 1/8" 18.5 39.2 19.9 16 19 18 1/4" 21.5 44.2 43.7 46 45.5 52 51 57 56 63.5 64.5 65 66 1/4" 21.5 26.2 24 22 24 3/8" 25 3/8"

0.4

Note 2) L kit: Nil F P PC J T Nil S F kit P kit (26P) P kit (20P) J kit (20P) T kit L kit S kit q w Note) L kit: Nil e r y F SE kit SSQ2000 Description NKE Corp.: Fieldbus System (16 output points) NKE Corp.: Fieldbus H System (16 output points) Manifold SDF kit SDH kit SDJ1 kit SDJ2 kit SDQ kit SDR1 kit SDR2 kit SDV kit No.

Air Cylinder Series CM2

Elbow/Universal Type Air Flow/Effective Area Model AS121FM-M5 AS131FM-M5 AS221FM-01 AS231FM-01 AS221FM-02 AS231FM-02 6, 8 3.2, 4 8, 10 3.2, 4, 6 Metric size 6 4 Tubing O.D. 1/8", 5/32", 3/16" 1/4" 3/16", 1/4" 5/16" 1/4", 5/16" 3/8" 1/8", 5/32" Inch size 5/32" 3/16" 7 12 Air flow (l/min (ANR)) 38 Controlled flow 0.1 0.2 Effective area (mm2) 0.6 230 180 460 100 Flow rate (l/min (ANR)) 260 390

Base Mounted Metal Seal/Rubber Seal Series VQ

T kit (Terminal block) P kit (Flat ribbon cable connector) S kit (Serial transmission) Kit F kit (D-sub connector) F 25P U S P 26P U S F A 15P U S P C 20P U S P 16P U S B P A 10P U S S Type T1 T2 Max. points Note) 16 Note) 16 16 16 Note) 16 14 14 8 8 Note) Due to the limitation of internal wiring.

Fluoropolymer Fittings Hyper Fitting / Flare Type Series LQ3

Connection threads Rc/NPT 2 x B K E E F G L1 L1 L2 Y H M B Model L2 M N F LQ3B11-F LQ3B12-F LQ3B21-F LQ3B22-F LQ3B31-F LQ3B32-F LQ3B33-F LQ3B34-F LQ3B35-F LQ3B36-F LQ3B41-F LQ3B42-F LQ3B43-F LQ3B51-F LQ3B52-F LQ3B53-F LQ3B61-F LQ3B62-F LQ3B63-F 4 3 M 11 14 3.5 10 9 9.5 28.5 27.5 19.5 18.5 4.8 1/8" (E,E) (E,E) G H 20 18.5 1/8" 1/4" H L1,L1 L1,L1 6 16 20 4 17 16 12 34.5 33.5 6 22 21.5 10 8

Smooth Cylinder/Low Speed Cylinder

Width across flats B1 H1 AL K A N F N U CX C B S + Stroke H L Z + Stroke RR ZZ + Stroke (mm) Bore size (mm) A AL B B1 C CDH10 CX D E F G H1 J K KA L MM +0.058 0 0.1 0.3 10 15.0 30 27 60 22 44 16 32 10 15 8 M8 x 1.25 6 14 30 M14 x 1.5 40 +0.070 0 0.1 0.3 12 18.0 35 32 70 27 52 20 40 10 17 11 M8 x 1.25 7 18 35 M18 x 1.5 50 +0.070 0 0.1 0.3 16 25.0 35 32 85 27 64 20 40 10 17 11 M10 x 1.25 7

CA2

85 + 40 (n 4) 2 n = 4, 8, 12, 16 90 + 40 (n 4) 2 n = 4, 8, 12, 16 105 + 40 (n 4) 2 95 + 40 (n 4) 2 n = 4, 8, 12, 16 n n = 4, 8, 12, 16 2 (Different sides and same side) With 1 10 65 75 80 90 D-Y69/Y7PV D-Y7WV n 90 + 30 (n 4) 2 80 + 30 (n 4) 2 n = 4, 8, 12, 16 10 + 30 (n 2) 2 n = 2, 4, 6, 8 65 + 30 (n 4) 2 n = 4, 8, 12, 16 75 + 30 (n 4) 2 n = 4, 8, 12, 16 n = 4, 8, 12, 16 2 (Different

Table of Contents

Bore size (mm) 12 16 20 25 32 40 Distance between guide rods GP 50 65 80 90 110 130 GP > 0.5 Calculation of load ratio to the theoretical output of cylinder = f / F Horizontal mounting: f = x W Inclined mounting: f = x Wcos + Wsin (Refer to the figure on the right.)

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

Y N LQ2H2A-F LQ2H2B-F LQ2H2C-F LQ2H2D-F LQ2H2E-F LQ2H2F-F LQ2H3A-F LQ2H3B-F LQ2H3C-F LQ2H3D-F LQ2H4A-F LQ2H4B-F LQ2H4C-F LQ2H4D-F LQ2H5A-F LQ2H5B-F LQ2H5C-F LQ2H5D-F 1/4" 3/16" 1/8" 1/4" 3/16" 1/8" 3/8" 1/4" 3/8" 1/4" 1/2" 3/8" 1/2" 3/8" 3/4" 1/2" 3/4" 1/2" 1/8" 18.5 39.2 19.9 19 16 18 1/4" 21.5 44.2 43.7 46 45.5 52 51 57 56 63.5 64.5 65 66 1/4" 21.5 26.2 22 24 24 3/8" 25 3/8" 25 21 33.1

Air Cylinder Series CA2

H H + Stroke B C ZZ + 2 Stroke CJ2 CM2 e e e d d CG1 f 10.2 10.2 l l + Stroke f l f 10.2 h + l h + l + Stroke S + Stroke h + l MB ZZ + l + 2 Stroke ZZ + 2l + 2 Stroke (mm) MB1 Stroke range (mm) A Bore size (mm) 40 50 63 80 100 AL B B1 C D E F G H1 J K KA M MM N Without rod boot With rod boot CA2 Up to 500 20 to 500 30 27 60 22 44 16 32 10 15 8 M8 x 1.25 6 14 11 M14 x 1.5 27 Up to 600 20

5

ZZ + Stroke S + Stroke Dimensions (mm) Bore size (mm) A AL B B1 C D E F G H H1 J K KA MA MB MM N P S V ZZ 32 22 19.5 46 17 32.5 12 30 13 13 47 6 M6 x 1 6 10 16 4 M10 x 1.25 26.5 1/8 84 4 135 40 30 27 52 22 38 16 35 13 14 51 8 M6 x 1 6 14 16 4 M14 x 1.5 26.5 1/4 84 4 139 50 35 32 65 27 46.5 20 40 14 15.5 58 11 M8 x 1.25 7 18 16 4 M18 x 1.5 31 1/4 94 5 156 63 35 32 75 27 56.5 20 45 14 16.5