AC Servo Motor Driver (Pulse input type/Positioning type ）

OUTLINE DRAWINGS 91 to 9-5 9.1 Driver . 92 9.2 Connector. 95 10. CHARACTERISTICS 101 to 10-7 10.

ZP

O.D.Q I ZR 5 H R J Hexagon width across flats 10 Hexagon width across flats 2 F E ZM Hexagon width across flats 12 D C Applicable tubing O.D.Q ZH Y 2 R H A B Hexagon width across flats 12 Hexagon width across flats 3 ZU F E D C ZL 3 2 ZY Dimensions: 10 mm Stroke A B (mm) J H F D C E A B I Model ZQ ZPR10F10-0-A10 10 12 10 12.5 23.4 39.5 50.5 84.5 With a stroke of 10 mm ZPR13F10-0-A10 13 15

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Port size Nil 06 Without sub-plate 3 4 10 1 10 F Plug-in VFR6 5 0 0 D Non plug-in VFR6 10 1 1 1 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Symbol Thread type 2 position single Nil Rc Body option (B) (A) 4 2 G F 0 1 Standard Direct manual override N 1 NPT NPTF

Compact Hydraulic Cylinder

size (mm) Stroke range (mm) Effective thread length (mm) A B1 CD CX D E F GA1 GA2 GA3 GB1 GB2 GB3 H H1 I +0.109 0 +0.109 0 +0.109 0 +0.034 0.015 20 18 13 16 10 8 16 10 12 12 8 10 10 41 5 31 10 25 to 300 15.5 25 22 17 16 12 10 16 10 12 12 8 10 10 46 6 34 10 25 to 400 19.5 32 24 22 16 16 14 19 11 13 13 8 10 10 53 8 40 12 25 to 500 21 40 24 24 24 18 16 21 12 17 17 11 16 16 54 10 48 16 25 to

ZP

Model A B C D Y Y B C D Flat A Model ZPT10D-B5-A10 10 12 15 24 6 Flat with ribs U C ZPT13 -B5-A10 U C ZPT16 -B5-A10 U C ZPT16D-B5-A10 ZPT10 -B5-A10 16 18 16 25 7 10 12 1.7 12 21 3 13 15 1.8 Dimensions by Stroke 16 18 12.5 21.5 3.5 1.2 10 16 G Model Dimensions by Stroke E F E F 10, 13 16 ZPTD10-B5-A10 71.5 36.5 35.5 72.5 23 G Model E F E F ZPTD20-B5-A10 109.5 45.5 46.5 110.5 51 U C ZPT 20-

ZP

Model A B C D E Y Y B C D A E Flat Model ZPY10D--A10 10 12 15 25 41 6 Flat with ribs U C ZPY16D--A10 ZPY10 -A10 16 18 16 26 42 7 15 12 22 1.7 10 12 1.8 3 38 ZPY13 -A10 U C 13 Dimensions by Stroke ZPY16 -A10 U C 38.5 16 18 12.5 22.5 1.2 3.5 10 16 H Model Dimensions by Stroke F G F G 10, 13 16 ZPYD10--A10 52 23 86 53 87 H Model F G F G ZPYD20--A10 62 124 63 125 51 U C U C U C U C U C ZPYD30

Hydraulic

limit chart: Bore sizes 32 & 40 Symbol Mounting orientation Symbol Mounting orientation Symbol Mounting orientation Symbol Mounting orientation F F F F F F F F F F F Bore size 32 B-rod 2000 5 2 4 8 3 7 1 1000 6 500 Stroke (mm) 100 50 10 0.1 0.5 1 5 10 20 Load (kN) Bore size 40 B-rod C-rod 3 7 5 2 4 3 7 2000 4 8 1 5 8 6 2 1 1000 6 500 Stroke (mm) 100 50 0.5 1 5 10 20 0.5 1 5 10 20 Load (kN

High Purity Fluoropolymer

M M H W Y L E 1/8 LQ1H11-F LQ1H12-F LQ1H21-F LQ1H22-F LQ1H23-F LQ1H24-F LQ1H31-F LQ1H32-F LQ1H33-F LQ1H34-F LQ1H35-F LQ1H36-F LQ1H41-F LQ1H42-F LQ1H43-F LQ1H44-F LQ1H51-F LQ1H52-F LQ1H53-F LQ1H54-F LQ1H61-F LQ1H62-F LQ1H63-F LQ1H64-F 4 3 6 4 6 4 10 8 6 10 8 6 12 10 12 10 19 12 19 12 25 19 25 19 11.5 18.5 10 10 26.5 1/8" Class 1 Rc (NPT) Port size 18.5 35 1/8" 16.5 14 14 15 (L) 21.5 36.5

ZP

Model A B C D Y Y B C D Flat A Model ZPT10D-B5-A10 10 12 15 24 6 Flat with ribs U C ZPT13 -B5-A10 U C ZPT16 -B5-A10 U C ZPT16D-B5-A10 ZPT10 -B5-A10 16 18 16 25 7 10 12 1.7 12 21 3 13 15 1.8 Dimensions by Stroke 16 18 12.5 21.5 3.5 1.2 10 16 G Model Dimensions by Stroke E F E F 10, 13 16 ZPTD10-B5-A10 35.5 23 71.5 36.5 72.5 G Model E F E F ZPTD20-B5-A10 45.5 109.5 46.5 110.5 51 U C ZPT 20-

V

S V Q Z 1 0 0 0 / 2 0 0 0 / 3 0 0 0 F I T T I N G B L A N K P L U G DIMENSIONS FITTING BLANK PLUG KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 PART A L D APPLICABLE NUMBER FITTING SIZE D 16 KQP-23-X19 31.5 3.2 3.2 16 KQP-04-X19 32 6 4 18 KQP-06-X19 35 8 6 20.5 KQP-08-X19 39 10 8 COLOR: WHITE 22 KQP-10-X19 43 12 10 M A N I F O L D O P T I O N M A N I F O L D O P T I O N S E R I

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

M H L M E W Y 1/8 LQ1H11-F LQ1H12-F LQ1H21-F LQ1H22-F LQ1H23-F LQ1H24-F LQ1H31-F LQ1H32-F LQ1H33-F LQ1H34-F LQ1H35-F LQ1H36-F LQ1H41-F LQ1H42-F LQ1H43-F LQ1H44-F LQ1H51-F LQ1H52-F LQ1H53-F LQ1H54-F LQ1H61-F LQ1H62-F LQ1H63-F LQ1H64-F 4 3 6 4 6 4 10 8 6 10 8 6 12 10 12 10 19 12 19 12 25 19 25 19 11.5 18.5 10 10 26.5 1/8" Class 1 Rc (NPT) Port size VC 18.5 35 1/8" 16.5 14 15 14 L VDW 21.5

Air Cylinder Series CM2

FL F D CX MM AL H1 L NA I CI A CD H KA U B1 N P G K NN RR Bore size (mm) 1 8 0 0.033 20 13 8 M8 x 1.25 10 30 24 28 24 18 5 9 41 6 14 13 8 5 15 9 20 M20 x 1.5 15.5 10.5 1 8 1 8 0 0.033 25 13 10 10 30 30 30 22 6 9 45 8 14 17 8 5.5 15 9 26 M26 x 1.5 M10 x 1.25 19.5 10.5 33.5 0 0.033 32 13 12 10 30 30 22 6 9 45 10 14 17 15 8 5.5 9 26 M26 x 1.5 M10 x 1.25 19.5 10.5 37.5 34.5 1 4 0 0.039 40 16

Table of Contents

Types 10, 20 Types 10, 20 VVDW 0 2 C 1 01 2 VVDW 2 0 4A Series Series 1 2 10 20 1 2 10 20 Thread type VC Rc G NPT Nil F N Material VDW C S C37 SUS Type 30 VQ VVCW20-4A OUT port size Stations Symbol M5 01 Port size M5 1/8 (6A) For 2 stations For 3 stations 1 2 VX2 VX Type 10 is M5 only.

4/5 Port Solenoid Valve

fitting (A, B port) Applicable tubing O.D.: 6, 1/4" : 8, 5/16" (4.9) 36 (3.6) L plug connector (L) 10-SYJ7123-L-01 (-F) M plug connector (M) 10-SYJ7123-M-01 (-F) M8 connector (WO): 10-SYJ7123-WO-01 (-F) DIN Terminal (D): 10-SYJ7123-D-01 (-F) Applicable cable O.D. 3.5 to 7 Approx. 300 (Lead wire length) 65 31.5[38.5] 101 MAX.10 57.5 16.1 46.2 31.1 M8 x 1 36 (Lead wire length) 18.5 42.6[49.6

LJ1H

20 12 10 20 20 20 40 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 2 Horizontal 8 25 25 18 Standard motor 8 12 8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room

Air Cylinder

MB Bore size A B C D F GA H MM NA NDh8 NN WA WW S Z 10 15 15 17 4 8 7.5 28 M4 x 0.7 21 8 0 0.022 M8 x 1.0 14.4 45 66 122 16 15 18.3 20 5 8 7.5 28 M5 x 0.8 21 10 0 0.022 M10 x 1.0 14.4 45 67 123 MB1 CA2 CS1 Foot (L) CS2 Stroke CJ2ZWL 10 16 Z WA WA Mounting nut F F GA WW GA Piping port 2 x M5 x 0.8 NN MM Cover surface Rod end nut NN MM C D D B 0 0.3 LY LB LH LT B 0 0.3 LT LZ LX NA Y H X A

Stability of suction position,

Displacement NBR (N): Silicone rubber (S): Urethane rubber (U): FKM (F): Mark-free NBR (CL): ZP3E-32BM ZP3E-80BM 6 20 N, S, F S Displacement [mm] Displacement [mm] 16 4 12 N, U, F U 8 2 CL CL 4 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] ZP3E-100BM ZP3E-40BM 8 25 S N, S, F Displacement [mm] Displacement [mm] 20 6 U 15 N, U, F 4 10 CL

5-Port Solenoid Valve

SY7000222-1A [for 10 valves (30 pcs.)] SY5000222-1A [for 10 valves (20 pcs.)] SY7000221-1A [for 10 valves (30 pcs.)] SY3000222-1A [for 10 valves (20 pcs.)] SY5000221-1A [for 10 valves (20 pcs.)] SY300023-24A [for 10 valves (20 pcs.)]

LEC-OM02704CN

8C 8D 8E 1 8F ABS 90 91 14 13 14 (6) ([4][0]) [4][0] [0][1][F][F] (16)10 8 (7) ([5][0]) [5][0] [0][1][F][F] (16)10 8 (8) ([5][4]) [5][4] [0][1][F][F] (16)10 8 (9) ([5][8]) [5][8] [0][1][F][F] (16)10 8 (10)(DWELL)([6][0]) [6][0] [0][1][F][F] (DWELL) (16)10 8 (11)([6][4]) [6][4] [0][1][F][F] (16)10 8 (12)([1][F]) [1][F] [0][0] 4 (13) ([0][0]) [0][0] [1][2] 0() 0001JOG 0002 0003 0004

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Fixed 4% F .S.