Micro Mechanical Valve Series VM1000

Red VM131-01-35RA VM151-01-35RA VM131U-01-35RA VM151U-01-35RA VM133-M5-35RA VM153-M5-35RA Black VM131-01-35BA VM151-01-35BA VM131U-01-35BA VM151U-01-35BA VM133-M5-35BA VM153-M5-35BA Green VM131-01-35GA VM151-01-35GA VM131U-01-35GA VM151U-01-35GA VM133-M5-35GA VM153-M5-35GA Yellow VM131-01-35YA VM151-01-35YA VM131U-01-35YA VM151U-01-35YA VM133-M5-35YA VM153-M5-35YA Note 1) It is possible

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

Grommet terminal: Double VFS2210-E-01 02 Closed center VFS2310-E-01 02 Exhaust center VFS2410-E-01 02 Pressure center VFS2510-E-01 02 DIN terminal: Double VFS2210-D Y-01 02 Closed center VFS2310-D Y-01 02 Exhaust center VFS2410-D Y-01 02 Pressure center VFS2510-D Y-01 02 With light/surge voltage suppressor 151 (3 position: 159) Lead wire O.D.

0.55

M-type plug connector (M) DIN terminal (D) (Y) Conduit terminal (T) 103.5 84.5 84.5 PE PE PE PE PE PE 198.2 220.8 Max. 10 216 Max. 10 179.2 201.8 197 (Indicator light) 89.6 100.9 98.5 Pg9 Pg9 Approx. 300 (Lead wire length) 89 112.2 [102.2] 109 Applicable cable O.D. 4.5 to 7 118 122.2 [112.2] Applicable cable O.D. 4.5 to 7 [ ]: Without indicator light Unless otherwise indicated, dimensions

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

(For mounting) 2 x 3.2 35 3 Manual override 3 22 A B + + B A PE X P EB EA 42.7 10.2 32.4 [34.6] 97.3 [101.7] G: Approx. 300 H: Approx. 600 M5 x 0.8 (External pilot port) M5 x 0.8 (Pilot EXH port) (Lead wire length) 53.5 [60.5] 50 7.5 16.5 24.5 11 11 20.5 41 (P, EA, EB port) 1/8 L plug connector (L): 10-SY3 40(R)-L-01 3 4 5 M plug connector (M): 10-SY3 40(R)-M-01

VFS

02 Pressure center VFS2510-E-01 02 DIN terminal: Double VFS2210-D Y-01 02 Closed center VFS2310-D Y-01 02 Exhaust center VFS2410-D Y-01 02 Pressure center VFS2510-D Y-01 02 EVS VFN With light/surge voltage suppressor Lead wire O.D.

5 Port Solenoid Valve Series SV1000/2000/3000/4000

-06 AS2200-01 70% 100 50 10% 30% 50% 0 CM2 25 200 150 AS2201F -01-06 AS2200-01 100 50 0 SV100 ANA1 -C08 T0604 CM2 32 200 150 AS2201F -01-06 AS2200-01 100 50 0 200 CM2 40 150 AS2201F -02-06 AS2200-02 100 50 0 Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800 900 1000 1100 1200 Speed at the end (mm/s) Applicable related components For details regarding different conditions

2

Model Section Type Round type Standard G27-10-R1 G36-10-01 G46-10-01 0.02 to 0.2 MPa setting G27-10-R1 G36-4-01 G46-4-01 Round type (with color zone) Standard G36-10-01-L G46-10-01-L 0.02 to 0.2 MPa setting G36-4-01-L G46-4-01-L Square embedded type Note 2) Standard GC3-10AS [GC3P-010AS (Pressure gauge cover only)] 0.02 to 0.2 MPa setting GC3-4AS [GC3P-010AS (Pressure gauge cover only

5 Port Solenoid Valve Series VQZ1000/2000/3000

Model VQZ1000 VQZ2000 VQZ3000 AN110-01 AN110-01 AN200-02 AN200-02 AN110-01 For a silencer to be mounted in a single valve unit, refer to page 978.

SY

Grommet (G), (H): SY3240(R)-01 Scale: 35% G H With interface regulator 141 15 68.5 [75] 65.6 68 32.5 24.5 With plug (12.5) (37) 41 L type plug connector (L): SY3240(R)-L-01 M type plug connector (M): SY3240(R)-M-01 Grommet .

Series SY 5 Port Rubber Seal Solenoid Valve High Capacity & Simple Choices

(M): SY3140(R)-M-01-Q VQ5 VQZ VQD VFS VS VS7 VQ7 1.2-33 Base Mounted Type Series SY3000 Dimensions Note)< >: Values with surge voltage suppressor 2 position double Grommet (G), (H): SY3240(R)-01-Q Scale: 35% G H With interface regulator 141 15 68.5 65.6 68 32.5 24.5 With plug (12.5) (37) 41 L type plug connector (L): SY3240(R)-L-01-Q M type plug connector (M): SY3240(R)-M-01-Q 1.2-34 Base

VQZ1000/2000/3000

AN110-01 AN200-02 AN200-02 AN110-01 For a silencer to be mounted in a single valve unit, refer to page 2-7-5.

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

41.5 2-5.5 mounting hole 44 41.5 M12 connector M12 connector 85.5 85.5 72.5 PE port PE port 10.5 PE port PE port 29 29 14 10.5 14 SMC SMC 1/8, 1/4-2 port 3, 5 port 21 21 21 21 1/8, 1/4-2 port 3, 5 port 1/8, 1/4 1 port 1/8, 1/4 1 port 3-11-15 16 Series EVS1-01/1-02 Dimensions EVS1-02-FG-S-M0 102 68 21.5 (14 port) 21.5 (12 port) 8.5 (2 port) 8.5 (4 port) 14 4 2 12 12 34 25 18 14 5 1 3 Indicator

Series SV

-01-06 AS2200-01 100 50 0 ANA1 -C08 T0604 200 CM2 32 150 Stroke mm AS2201F -01-06 AS2200-01 100 50 0 200 CM2 40 150 Stroke mm AS2201F -02-06 AS2200-02 100 50 0 Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800 900 1000 1100 1200 Speed at the end mm/s Applicable related components For details regarding different conditions, make determinations after using the SMC

VZ5000

-D-01 C6: MAX. 6 C8: MAX. 6.5 MAX. 10 2-One-touch fitting (A, B port) Applicable tubing model C6: T0604 C8: T0806 Applicable cable O.D. 3.5 to 7 3-3-57 Series VZ5000 2 Position Double VZ5220 Grommet (G), (H) VZ5220-01 G H Manual override (Non-locking) (Mounting hole for manifold) (Lead wire length) G: 300 mm H: 600 mm (Mounting hole) (PE port) (Piping port) L plug connector (L) VZ5220-L-01

5 Port Solenoid Valve

C4: 4 (SMC) N3: 5/32" (SMC) One-touch fitting [PE: Pilot EXH port] Applicable tube O.D.

0.4

C4: 4 (SMC) N3: 5/32" (SMC) One-touch fitting [PE: Pilot EXH port] Applicable tube O.D.

Filter Regulator

: 8 Semi-standard: 8J Piping port Piping port thread ty pe (9) Part No. thread ty pe (9) Part No.

VZ3000

G H (Mounting hole) Manual override (Non-locking) (Mounting hole pitch) (Mounting hole pitch) (Lead wire length) G: 300 mm H: 600 mm (Piping port) (PE port) (Lead wire length) L plug connector (L) VZ3140-L-01 M plug connector (M) VZ3140-M-01 300 (Lead wire length) 300 : With light/surge voltage suppressor DIN terminal (D) VZ3140-D-01 Built-in speed controllers VZ3150Applicable cable O.D.

LEC-OM02704CN

PD09PD11(MBR) 4 39 4 4.12 (PE)( ) (PE) (di/dtdv/dt) EMCEMC(IB()67303) NFB MC CN2 L1 () L2 L3 L11 U U L21 V V M W W CN3 PE PE (PE) PE .

Mist Separator Regulator

AWM20-D AWM30-D AWM40-D (1) Bracket assembly Note 1) AW23P-270AS AR33P-270AS AR43P-270AS (2) Set nut AR23P-260S AR33P-260S AR43P-260S G36-10-01 Rc G46-10-01 Pressure gauge Note 2) G36-10-N01 G46-10-N01 NPT (Round type) G36-P10-N01-X30 Z : Both in MPa and psi G46-P10-N01-X30 (3) G36-10-01 G G46-10-01 G36-10-01-L Rc G46-10-01-L Pressure gauge Note 2) G36-10-N01-L NPT G46-10-N01-L (Round type