Vacuum Unit

PE EXH Common Port open to atmosphere *1 PS 4 5/32" PD *2 M3 M3 : Not applicable 1 Air is also exhausted from the pilot valve when the valve type is R. Piping for PE port is available as an option (M3). (Refer to pages 15 and 16.) MExhaust Noise 2 A model with PD port is available as an option. (Refer to pages 9, 10, and 15.)

ZR

x 0.35 x 19 M3 x 0.35 x 23 M3 x 0.35 x 24 M3 x 0.35 x 28 M3 x 0.35 x 68 M3 x 0.35 x 72 M3 x 0.35 x 73 M3 x 0.35 x 77 y u Components Ejector unit + Vacuum switch/Filter unit i o For nozzle size 10, 13, 15 M3 x 0.35 x 84 4 [For ZSE4 spec.]

Table of Contents

VFS VS4 Series VFR2000 VQ7 Pilot valve assembly Tightening Torque for Mounting Bolt EVS Thread M3 (2 pcs.) M3 (3 pcs.) M3 (3 pcs.) M4 (4 pcs.)

SY

SY3000 SY3000-23-4 (M2 x 21) M3 x 26 (Flat nickel plated) M4 x 31 (Flat nickel plated) SY3000-11-24 SY5000 SY5000-11-10 SY7000 SY7000-11-9 Note 2) For SY9000, the SUP port is only available on the end plate side. SY9000-18-2 (M3 x 42) SY9000 SY9000-11-1 Plug (white) Insert into unused cylinder ports and SUP/EXH ports. The minimum order quantity is 10 pieces. Order in multiples of 10.

MY1

= 38.7 (Nm) M3 = m3 x g x X = 6.525 x 9.8 x 138.5 x 103 = 8.86 (Nm) MTS m3 M3 Load factor 3 = M3/M3max = 8.86/38.7 = 0.23 MY 5.

ZX

1(PV)(PS PD) PD PE PS Table (2) PV Part no.

MY1

max. m1 max. m3 max. 2.

Compact 5-Port Solenoid Valve

Loosen the 4 mounting screws (M3) to remove the terminal block cover. Terminal block cover Mounting screw (M3) Gasket 1A 2A 3A 4A 5A 6 Drip proof plug (SY30M-133-1) is mounted Push button Pitch 3.5 mm Tightening torque: 0.8 Nm 1B 2B 3 Spring type terminal block Conduit port 2 x M20 x 1.5 Step 3. Mount the terminal block cover.

MY2

x 10-3 = 2.81 (Nm) Load factor 2 = M2/M2 max = 2.81/50 = 0.06 m3 M2 9 Model Selection Series MY2 Calculation of Guide Load Factors X M3: Moment M3 max (from 3 of graph MY2H/M3) = 60 (Nm) M3 = m3 x g x X = 7.525 x 9.8 x 140.1 x 10-3 = 10.33 (Nm) m3 M3 Load factor 3 = M3/M3 max = 10.33/60 = 0.17 5 Calculation of load factor for dynamic moment Z Equivalent load FE at impact 1.4 100 1.4 100

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

max (from 3 of graph MY2H/M3) = 60 (Nm) MX M3 = m3 x g x X = 7.525 x 9.8 x 140.1 x 10-3 = 10.33 (Nm) m3 M3 MTS Load factor 3 = M3/M3 max = 10.33/60 = 0.17 MY 5.

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

X EA P EB PE X EA P EB PE X EA P EB PE X 137.8 125.2 100.6 159.6 147 111.5 127 [131.4] 123 110.4 93.2 120 [124.4] 139.6 [144] 157.8 145.2 Note) Refer to page 176 for dimensions of connector types. 3 77 67 14 269.5 259.5 15 287 277 16 304.5 294.5 13 252 242 20 stations 374.5 364.5 4 94.5 84.5 5 112 102 6 129.5 119.5 7 147 137 8 164.5 154.5 9 182 172 10 199.5 189.5 11 217 207 12 234.5 224.5

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

C4: 4 (SMC) N3: 5/32" (SMC) One-touch fitting [PE: Pilot EXH port] Applicable tubing O.D.

VFR

VFS VS4 Series VFR2000 VQ7 Pilot valve assembly Tightening Torque for Mounting Bolt EVS Thread M3 (2 pcs.) M3 (3 pcs.) M3 (3 pcs.) M4 (4 pcs.)

Electric Actuators

head screw (included) M3 x 6l Binding band (included) 34 Holding plate (included) 4-M6 x 1 C section 30 D When using a PE terminal, use accessories included as shown above.

LX

head screw (included) M3 x 6l Binding band (included) 34 Holding plate (included) 4-M6 x 1 C section 30 D When using a PE terminal, use accessories included as shown above.

48

How to Order Needle Valve/Flow Rate Characteristics 0 2 F A 1 AS 1 M3 X790 06 AS1201F-M350 45 40 35 30 25 20 15 10 5 0 0.5 0 1 1.5 2 2.5 3 3.5 4 4.5 5 6 7 8 Inlet pressure: 0.5 MPa Port size Push-lock type Body size Flow rate [L/min (ANR)] 1 M3 x 0.5 M3 M3 x 0.5 Applicable tubing O.D.

Silencers/Exhaust Cleaner Series AN
/Series AMC 1

) Sound absorbing material (PE sintered body) Case (PE) Rod (C3604) Note 1) About the display of products material PP: Polypropylene PE: Polyethylene C3604: Copper alloy Note 2) Recommended flow rate is the flow at 0.5 MPa in the inlet pressure. 5-10-6 7 Silencer High Noise Reduction Type Series AN02 How to Order Over 35 dB (A) noise reduction Case adopts UL94-V0 grade Flame resistant material

VFS

1 Hexagon socket head screw Steel M3 x 32 M3 x 32 M3 x 32 !2 Detent assembly VFS3000-9A Refer to How to Order Pilot Valve Assembly on page 3-8-54. Pilot valve assembly !

SV

BUS 4632 SY 4632 4632 PE PE X X One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 3.2, 1/8" 4, 5/32" 6, 1/4" One-touch fitting [PE: Pilot EXH port] Applicable tubing O.D.: 4 5/32" 4-M8 One-touch fitting [X: External pilot port] Applicable tubing O.D.: 4 5/32" SYJ SX Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-

IDX-OM-W011

1 3 IDX-OM-W011 1 IDF4E11E-10AC100V IN OUT AC100V IDF4E11E-20AC200V L N PE M3 1.25-3 6.5mm 1-1 IDF Series 1 4 IDX-OM-W011 1 IDF15E1 () 1-1 IDF Series 1 5 IDX-OM-W011 1 IDF15E1-10 (AC100V ) AC100V () IDF15E1-20 (AC200V ) L N PE M3 6.5mm 2 1.25mm 1-1 IDF Series 1 6 IDX-OM-W011 2 2 1 IDF4E 15E1 46kg 2 2 2 2 2 1 2000 240 600mm 050 600mm 600mm 600mm 600mm 2-1 IDF Series