SZ3000

Supply/exhaust block assembly (6): SZ3000-50-1A-C6 External pilot block assembly (6): SZ3000-54-1A-C6 External pilot block assembly (4): SZ3000-54-1A-C4 [Note] SUP blocking disk: SZ3000-114-4A EXH blocking disk: SZ3000-114-4A (2pcs.

SZ3000

VVQ1000-50A-C6 SZ3000-73-1A-L4 SZ3000-73-1A-L6 SZ3000-73-2A-L4 SZ3000-73-2A-L6 SZ3000-56-1A VVQ1000-51A-C6 VVQ1000-51A-C8 SZ3000-74-1A-L6 SZ3000-74-1A-L8 SZ3000-74-2A-L6 SZ3000-74-2A-L8 4(A), 2(B) port 1(P), 3(R) port Other Tube Brands Caution 1.

Aluminum High Vacuum Angle Valve

AS568-016V XM XY AS568-009V XLD63-2-9-1A XLD80-2-9-1A XLD100-2-9-1A XLD160-2-9-1A Standard S valve seal assembly r XLD(V) XLD40-2-9-1A AS568-016 XLD50-2-9-1A AS568-016 XLD63-2-9-1AXLD80-2-9-1A AS568-009 XLD100-2-9-1A XLD160-2-9-1A Special DNote 3) In cases where the seal material is other than the standard (FKM: includes Compound no. 1349-80: made by Mitsubishi Cable Industries, Inc.),

Modular F.R.L. Units

-A C4LL-38-A * Bowl seal is included for the AL20-A to AL60-A.

modular-press-e

C3SL-36W w C1SL-2 C2SL-2 C3SL-2 C4SL-2 e C1SL-2 C2SL-2 C3SL-2 Metal t C1SL-23 C2SL-23 C3SL-23 C4SL-23 C1SL-23 C2SL-23 C3SL-23 IN OUT C3LL-8 C4LL-8 C3LL-8 Metal bowl with level gauge r i C3LL-38 C4LL-38 C3LL-38 121538-1A 121538-1A 121538-1A-S1 [IS400-1 (Float switch only)] 121538-1A-S2 [IS400-2 (Float switch only)] 1000 cm3 tank 121538-1A-S1 IS400-1 Metal bowl with level gauge 121538-1A-S2

Modular F.R.L. Pressure Control Equipment

C3SL-36W w C1SL-2 C2SL-2 C3SL-2 C4SL-2 e C1SL-2 C2SL-2 C3SL-2 Metal t C1SL-23 C2SL-23 C3SL-23 C4SL-23 C1SL-23 C2SL-23 C3SL-23 IN OUT C3LL-8 C4LL-8 C3LL-8 Metal bowl with level gauge r i C3LL-38 C4LL-38 C3LL-38 121538-1A 121538-1A 121538-1A-S1 [IS400-1 (Float switch only)] 121538-1A-S2 [IS400-2 (Float switch only)] 1000 cm3 tank 121538-1A-S1 IS400-1 Metal bowl with level gauge 121538-1A-S2

7.5

C4 SJ3l60-C4 SJ2l60-C4 4 onetouch fitting 4 onetouch fitting 3 position 4 position 3 position 4 position 77 48 73 61 69 44 39 42 2 position 2 position C6 SJ3l60-C6 SJ2l60-M3 6 onetouch fitting M3 x 0.5 3 position 4 position 3 position 4 position 73 69 57 65 69 46 42 Note) Please contact SMC for the weight of elbow fittings. 2 position SJ3l60-M5 M5 x 0.8 3 position 4 position 65 Note) Please

3 Port Air Operated Valve Series SYJA300

C4 Type SS3YJ3-S42-M5 Type SS3YJ3-S42-C4 M5 x 0.8 C4 SYJ34 1/8 Body ported for external pilot Type SS3YJ3-20R 0.9 SYJ32R 1/8 M3 x 0.5 Type SS3YJ3-42R-M5 Type SS3YJ3-42R-C4 Type SS3YJ3-S42R-M5 Type SS3YJ3-S42R-C4 0.17 0.36 0.30 0.17 0.31 0.33 0.32 0.35 0.075 0.086 0.079 0.082 0.32 0.33 0.33 0.35 0.11 0.20 0.35 0.26 0.072 0.082 0.086 0.086 M5 x 0.8 C4 SYJ34R 1/8 Base mounted for external

Series VQ Base Mounted Metal Seal/Rubber Seal

(Appropriate tightening torque is 1.2 to 1.6Nm) Caution Enclosure IP65 Manifold block assembly VQ1000 VVQ1000-1A-2-C3 VVQ1000-1A-2-C4 VVQ1000-1A-2-C6 VVQ1000-1A-2-M5 Port size Wires, cables, connectors, etc. used for models conforming to IP65 should also have enclosures equivalent to or of stricter rating than IP65.

0.4

Note) Electric current should be 1A or less (including the mounted valves).

VQC

A 1A () (+) SOL. B 1B () (+) Station 1 1A COM 2A 3A 4A 5A 6A 7A 8A 9A 10A 1B 2B 3B 4B 5B 6B 7B 8B 9B 10B 1B 1A 2B 2A 3B 3A 4B 4A 5B 5A 6B 6A 7B 7A 8B 8A 9B 9A SOL. A 2A () (+) SOL. B 2B () (+) Station 2 SOL. A 3A () (+) 1.

5 Port Solenoid Valve, Series VQC

A 1A () (+) SOL. B 1B () (+) Station 1 1A COM 2A 3A 4A 5A 6A 7A 8A 9A 10A 1B 2B 3B 4B 5B 6B 7B 8B 9B 10B 1B 1A 2B 2A 3B 3A 4B 4A 5B 5A 6B 6A 7B 7A 8B 8A 9B 9A SOL. A 2A () (+) SOL. B 2B () (+) Station 2 SOL. A 3A () (+) 1.

SZ3000

VVQ1000-50A-C6 SZ3000-73-1A-L4 SZ3000-73-1A-L6 SZ3000-73-2A-L4 SZ3000-73-2A-L6 SZ3000-56-1A VVQ1000-51A-C6 VVQ1000-51A-C8 SZ3000-74-1A-L6 SZ3000-74-1A-L8 SZ3000-74-2A-L6 SZ3000-74-2A-L8 4(A), 2(B) port 1(P), 3(R) port Other Tube Brands Caution 1.

VCC

Symbol Description Surface treatment Note Material A VCC12(D)-00 For VVCC12-1A-02FC4 C6 PPS resin C4 C6 VVCC12-1A-02F Pilot port C4: 4 piping C6: 6 piping Manifold block assembly for 2 port valve Manifold block q Hard anodized containing PTFE For VVCC12-1G-02FC4 C6 Aluminum C O-ring Special FKM w C4 C6 VVCC12-1G-02F Pilot port C4: 4 piping C6: 6 piping Manifold block assembly for gate

5 Port Solenoid Valve Series VQZ1000/2000/3000

Entry is the same as standard products. 966 Series VQZ Replacement Parts Base Mounted One-touch Fitting Assembly (for Cylinder port) Fitting size C3 C4 C6 C8 C10 Model VQZ1000 VVQ1000-50A-C3 VVQ1000-50A-C4 VVQ1000-50A-C6 VQZ2000 VVQ1000-51A-C4 VVQ1000-51A-C6 VVQ1000-51A-C8 VQZ3000 VVQ2000-51A-C6 VVQ2000-51A-C8 VVQ2000-51A-C10 Note) Purchasing order is available in units of 10 pieces

Valve for Water and Chemical Base Fluids (2/3 Port Air Operated Valve)

Symbol Description Surface treatment Note Material A VCC12(D)-00 For VVCC12-1A-02FC4 C6 PPS resin C4 C6 VVCC12-1A-02F Pilot port C4: 4 piping C6: 6 piping Manifold block assembly for 2 port valve Manifold block q Hard anodized containing PTFE For VVCC12-1G-02FC4 C6 Aluminum C O-ring Special FKM w C4 C6 VVCC12-1G-02F Pilot port C4: 4 piping C6: 6 piping Manifold block assembly for gate

4/5 Port Air Operated Valve Series SYJA3000

Type 20 (5 Port/Body ported) How to Order Applicable solenoid valve M5 C4 C6 M5 C4 C6 SS5YJ520 05 SYJ520-A, B port M5 x 0.8 SYJ523-Applicable blanking plate assembly SYJ5000-21-1A Applicable individual EXH spacer assembly SYJ5000-17-1A P, R port thread type Number of stations -+ -+ P port 1/8 02 2 stations R R P Nil 00F 00N 00T Rc G NPT NPTF : : 20 20 stations R port 1/8 SV SZ Type 40 (5

Proposals for Energy Saving

Series VP342 VP542 VP742 VP300-27-1A VP500-27-1A VP700-27-1A Bracket (screws included) JIS symbols External Pilot Type (Optional) Type N.C. N.O. Body ported Use the external pilot type for the following cases. Standard Vacuum or low pressure of 0.2MPa or less Base mounted Consult SMC for holding vacuum.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

PUSH 01 C4 C6 C8 SY560-1 Valve Includes 3pcs. of bushing assembly (SY5000-52-1A) U side Ports P, R: With 10 One-touch fitting Includes 3pcs. of bushing assembly (SY5000-52-1A) 2 SY5000-55-1A Supply/Exhaust block assembly 3 SY5000-56-1A End block assembly For D side (bushing assembly: SY5000-52-1A not included) 4 SY5000-56-1B End block assembly For U side (bushing assembly: SY5000-52-1A not

5 Port Solenoid Valve SY Series

fitting for 12 One-touch fitting for N9 One-touch fitting for One-touch fitting for One-touch fitting for SY7000 SY7000 3 8" C10 C8 C10 C12 N11 N9 N11 5 16" SY9000 3 8" SY9000 6 Body Ported Dimensions: Series SY3000 [ ]: AC 2 position single Grommet (G), (H): SY3120(-F2) G H C4, N3 C6, N7 Foot bracket SY3120-F1 G H C4, N3 C6, N7 9.5 (For mounting bracket) 2-M3 x 0.5 depth 3.5 38 31