High Vacuum Angle Valve

w Standard XL XL Special Standard XLQ Special Standard Common XM XY Special XLD50-2-9-1A AS568-016V AS568-009V XLD63-2-9-1A XLD80-2-9-1A XLD100-2-9-1A Standard S valve seal assembly r XLD(V) DXLD40-2-9-1A AS568-016 XLD50-2-9-1A AS568-016 XLD63-2-9-1AXLD80-2-9-1A XLD160-2-9-1A AS568-020 AS568-009 XLD100-2-9-1A Special Note 1) In cases where the seal material is other than the standard (FKM

VFR

Material Description AXT632-3(M3 x 32) VFR3000-26-4 VFR31 VFR3000-26-4 VFR32 AXT632-3(M3 x 32) VFR3000-26-4 VFR33/34/35 NBR Hexagon socket head screw Gasket !1 AXT632-3(M3 x 32) Refer to How to Order Pilot Valve Assembly on page 3-5-30. Refer to How to Order Sub-plate Assembly on page 3-5-31. Steel !2 !

SZ3000

SZ3000-73-1A-L6 SZ3000-73-2A-L4 SZ3000-73-2A-L6 SZ3000-56-1A VVQ1000-51A-C6 VVQ1000-51A-C8 SZ3000-74-1A-L6 SZ3000-74-1A-L8 SZ3000-74-2A-L6 SZ3000-74-2A-L8 4(A), 2(B) port 1(P), 3(R) port Other Tube Brands Caution 1.

SZ3000

SZ3000-73-1A-L6 SZ3000-73-2A-L4 SZ3000-73-2A-L6 SZ3000-56-1A VVQ1000-51A-C6 VVQ1000-51A-C8 SZ3000-74-1A-L6 SZ3000-74-1A-L8 SZ3000-74-2A-L6 SZ3000-74-2A-L8 4(A), 2(B) port 1(P), 3(R) port Other Tube Brands Caution 1.

4 Port Solenoid Valve Common Specifications Series SJ2000/3000

Note SJ3160-5CUCO 2 sets SJ3000-76-1A SJ2000 SJ3000 With power supply terminal (for PC wiring) SJ3000-120-1A-C8 1 set SJ3000-76-2A-05 Note) When ordering with an intermediate connector block assembly installed in the manifold, please order using the manifold specification sheet.

VFS

Material Description NVF2000-48 VFS21 VFS22 AXT624-19-1 AXT624-20-2 AXT624-20-2 AXT624-20-2 AXT624-26 AXT624-26 AXT624-26 !2 Detent assembly AXT624-11A VFS23/24/25 Return spring Gasket !1 Steel Hexagon socket head screw Stainless steel !0 o NBR !

Vacuum System Peripherals:

26 e Valve Model SX340 is for internal pilot.

5 Port Solenoid Valve

pins, 20 pins MIL Standard MIL Standard MIL Standard 20 pins Page 15 Page 19 Page 23 Page 45 Page 49 Page 53 Page 57 Page 61 Page 65 Page 79 2 Series S0700 Options Slim Compact Plug-in Manifold Bar Base / Options Blanking plate SS0700-10A-3 Individual EXH spacer SS0700-R-3-Cl Individual SUP spacer SS0700-P-3-Cl Blanking plate with output SS0700-1C3-l Page 26 Page 26 Page 26 Page 26 Plug-in

Aluminum High Vacuum Angle Valve

AS568-016V XM XY AS568-009V XLD63-2-9-1A XLD80-2-9-1A XLD100-2-9-1A XLD160-2-9-1A Standard S valve seal assembly r XLD(V) XLD40-2-9-1A AS568-016 XLD50-2-9-1A AS568-016 XLD63-2-9-1AXLD80-2-9-1A AS568-009 XLD100-2-9-1A XLD160-2-9-1A Special DNote 3) In cases where the seal material is other than the standard (FKM: includes Compound no. 1349-80: made by Mitsubishi Cable Industries, Inc.),

SYJ300/500/700

Example 10-SS3YJ3-20-03 1 set (Manifold base) 10-SYJ312M-5LZ-M3 2 sets (Valve) SYJ300-10-1A 1 set (Blanking plate assembly) The asterisk denotes the symbol for assembly.

0.4

Note) Electric current should be 1A or less (including the mounted valves).

3 Port Solenoid Valve

/set Tension bolt (With hexagon nut) r Note) If a bracket is intended to be mounted, select q Connector block assembly, w SUP/EXH end block assembly 1A or 3A, and e End block assembly 1A with mounting nut (Metric size: M3). Connector Block Assembly Part No.

AC

AL Model Port size A B C D M N P R B B E F G H J K L M5 X 0.8 38.5 50 70.5 70.5 88 88 108 108 108 16 23 26 26 33 36 40 40 40 105 147.5 4.5 5.5 7 7 9 9 12 12 12 50 80 80 80 105 105 105 105 105 91 140 181 181 238 253 300 310 315 5 5 7 7 7 7 10 10 10 7.5 8.5 11 11 13 13 16 16 16 25.5 38 38 38 41 40.5 48 48 48 84.5 124.5 153 153 188 189.5 268 282 282 26 56.8 60.8 60.8 65.5 69.5 75.5 75.5 78 25

Series VQ Base Mounted Metal Seal/Rubber Seal

Note) Electric current should be 1A or less.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

Note Description No. 02 C8 C10 SY760-1 Valve Includes 3pcs. of bushing assembly (SY7000-70-1A) U side Ports P, R: With 12 One-touch fitting Includes 3pcs. of bushing assembly (SY7000-70-1A) SY7000-75-1A 2 Supply/Exhaust block assembly Common for U & D sides (bushing assembly: SY7000-70-1A not included) SY7000-56-1A 3 End block assembly SY7000-70-1A 4 Bushing assembly Refer to page 7.

VZ3000

DXT192-40-1A Interface regulator can be placed on top of the manifold base to reduce the pressure of each of the valves.

Manifold Specifications

DXT192-40-1A Interface regulator can be placed on top of the manifold base to reduce the pressure of each of the valves.

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

(Valve) SYJ300-10-1A .1 pc. (Blank plate ass'y) SS3YJ3-42R-03-C4 .1 pc. (Manifold base) SYJ314R-5G .2 pcs. (Valve) SYJ300-10-2A .1 pc.

0.55

How to Order Valve (With a gasket and two mounting screws) For low wattage specification, refer to How to Order Valve on page 26. VF 3 1 4 0 5 G 1 Made to Order Refer to page 14 for details. Combination with low wattage specification is not possible.

Compact Manifold Regulator Series ARM5

L dimension 21 273 22 285.5 23 298 24 310.5 25 323 26 335.5 27 348 28 360.5 29 373 30 385.5 No.