Function: 1 (Normally Closed), Piping: 2 (Body Ported), Body Option: R (External Pilot), Specifications: Standard, Voltage: 5 (24VDC), Lead Wire: L (L Plug Connector w/Lead Wire 0.3m), Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: E (Push-turn Locking Manual Override), Port Size: M5 (Body Ported M5X0.8)

Type of Actuation: 1 (2 Position Single), Manifold Type: 60 (Body Ported Plug-in Cassette), Pilot: Internal Pilot, Specifications: Standard, Voltage: 5 (24VDC), Electrical Entry: L (L Plug Connector w/Lead Wire 0.3m), Lead Wire Length: None, Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: E (Push-turn Locking Manual Override), A, B Port Size: M5 (Body Ported M5X0.8)

Type of Actuation: 2 (2 Position Double), Manifold Type: 20 (Body Ported Plug-in Integrated), Pilot: Internal Pilot, Specifications: Standard, Voltage: 5 (24VDC), Electrical Entry: L (L Plug Connector w/Lead Wire 0.3m), Lead Wire Length: None, Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: E (Push-turn Locking Manual Override), A, B Port Size: M5 (Body Ported M5X0.8)

Type of Actuation: 2 (2 Position Double), Manifold Type: 60 (Body Ported Plug-in Cassette), Pilot: Internal Pilot, Specifications: Standard, Voltage: 5 (24VDC), Electrical Entry: L (L Plug Connector w/Lead Wire 0.3m), Lead Wire Length: None, Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: E (Push-turn Locking Manual Override), A, B Port Size: M5 (Body Ported M5X0.8)

Type of Actuation: 3 (3 Position Closed Center), Manifold Type: 20 (Body Ported Plug-in Integrated), Pilot: Internal Pilot, Specifications: Standard, Voltage: 5 (24VDC), Electrical Entry: L (L Plug Connector w/Lead Wire 0.3m), Lead Wire Length: None, Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: E (Push-turn Locking Manual Override), A, B Port Size: M5 (Body Ported M5X0.8

Type of Actuation: 3 (3 Position Closed Center), Manifold Type: 60 (Body Ported Plug-in Cassette), Pilot: Internal Pilot, Specifications: Standard, Voltage: 5 (24VDC), Electrical Entry: L (L Plug Connector w/Lead Wire 0.3m), Lead Wire Length: None, Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: E (Push-turn Locking Manual Override), A, B Port Size: M5 (Body Ported M5X0.8

Type of Actuation: 4 (3 Position Exhaust Center), Manifold Type: 20 (Body Ported Plug-in Integrated), Pilot: Internal Pilot, Specifications: Standard, Voltage: 5 (24VDC), Electrical Entry: L (L Plug Connector w/Lead Wire 0.3m), Lead Wire Length: None, Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: E (Push-turn Locking Manual Override), A, B Port Size: M5 (Body Ported M5X0.8

Type of Actuation: 4 (3 Position Exhaust Center), Manifold Type: 60 (Body Ported Plug-in Cassette), Pilot: Internal Pilot, Specifications: Standard, Voltage: 5 (24VDC), Electrical Entry: L (L Plug Connector w/Lead Wire 0.3m), Lead Wire Length: None, Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: E (Push-turn Locking Manual Override), A, B Port Size: M5 (Body Ported M5X0.8

Type of Actuation: 1 (2 Position Single), Manifold Type: 20 (Body Ported Plug-in Integrated), Pilot: Internal Pilot, Specifications: Standard, Voltage: 5 (24VDC), Electrical Entry: L (L Plug Connector w/Lead Wire 0.3m), Lead Wire Length: None, Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: E (Push-turn Locking Manual Override), A, B Port Size: M5 (Body Ported M5X0.8)

Function: 1 (Normally Closed), Piping: 4 (Base Mounted), Body Option: Individual EXH, Specifications: Standard, Rated Voltage: 5 (24VDC), Lead Wire: L (L Plug Connector w/Lead Wire 0.3m), Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: E (Manually Operated), Port Size: M5 (Base Mounted M5X0.8)

Function: 1 (Normally Closed), Piping: 4 (Base Mounted), Body Option: R (External Pilot), Specifications: T (Power Saver), Rated Voltage: 5 (24VDC), Lead Wire: L (L Plug Connector w/Lead Wire 0.3m), Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: E (Manually Operated), Port Size: M5 (Base Mounted M5X0.8)

Function: 1 (Normally Closed), Piping: 4 (Base Mounted), Body Option: M (Common EXH), Specifications: Standard, Rated Voltage: 5 (24VDC), Lead Wire: L (L Plug Connector w/Lead Wire 0.3m), Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: E (Manually Operated), Port Size: M5 (Base Mounted M5X0.8)

V100

9 : With light/surge voltage suppressor 3(R) 1(P) 3.5 DIN terminal (D, Y) M5 x 0.8 108.5 (PE port) Applicable cable O.D.

Space Saving Vacuum Ejector/Vacuum Pump System Series ZQ

M5 Note 4) (68.4) 57.3 PE Vacuum (V) port (M5) Note 4) 20.3 29.4 P V 9.7 Exhaust part 17.7 22.8 0.8 87.2 Note 1) 10 Circuit diagram 5 6 E F Note 1) The above dimensions are for ZQ1 1U-K2 L-F .

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

Note 2) ( ): denotes without sub-plate. 60 Base Mounted 10-SY3000/5000/7000/9000 Dimensions: Series 10-SY3000 [ ]: AC 2 position single Grommet (G), (H): 10-SY3140(R)-01 G H (A, B port) 1/8 14.5 13.5 38.1 17 19 17 19 Manual override (For mounting) 2 x 3.2 5 35 3 22 A B + B A X PE P EB EA (External pilot port) M5 x 0.8 M5 x 0.8 2 (Pilot EXH port) 44.7 66.9 [69.1]

Large Size Vacuum Module: Series ZR

) port M5 Ejector unit (600) 80 Release pressure supply (PD) port M5 EXH PE PE PD PD A 81.5 80.8 PD PD PS PS 56.5 PV PV 52 50 PD PS 42 35.5 31.5 33 28 16.5 13.5 17 PV PV PV 12 Common exhaust (EXH) port 1/2 (Rc, NPTF, G) Common release pressure supply (PD) port 2 x M5 Pilot pressure supply (PS) port M5 3 1.5 1 Common pilot supply (PS) port 2 x M5 4.5 2.5 Air pressure supply (PV) port Rc 1/

0.55

Grommet (G) Grommet (G) (H) DC without light/ surge voltage suppressor L2 L1 6.5 (Distance between ports) 28 20.5 (17) 13 72.2 53.2 53.2 50.5 (Distance between ports) PE PE PE PE R P R R R 204.7 202.3 185.7 183.3 55 71 79 P 1.3 27.5 91.7 92.9 (27.3) 3/8 [1(P), 5(R), 3(R) port] M5 x 0.8 4 x 7 (For mounting) 1.2 (PE port) (Pitch) P = 33 74.8 (Lead wire length) 30 G: Approx. 300 H: Approx. 600

Table of Contents

1 Hexagon socket head screw Steel M5 x 50 M5 x 50 M5 x 50 !2 Detent assembly AXT510-9 Refer to How to Order Pilot Valve Assembly on page 3-8-86. Pilot valve assembly !

Series: JSY1 (1000 Series), Actuation: 2 (2-position, Double), Manifold Type: 20 (Body Ported), Power Saving Circuit: T (w/Power Saving Circuit), Electrical Entry: L (L Plug Connector w/Lead Wire, 300mm), Cable Length: None, Light/Surge Voltage Suppressor: Z (with Light/Surge Voltage Suppressor), Manual Override: Non-locking Push Type, Port Size, Thread Piping: M5 (M5 x 0.8), PE Plate: PE

Series: JSY1 (1000 Series), Actuation: 2 (2-position, Double), Manifold Type: 20 (Body Ported), Power Saving Circuit: T (w/Power Saving Circuit), Electrical Entry: M (M Plug Connector w/Lead Wire, 300mm), Cable Length: None, Light/Surge Voltage Suppressor: Z (with Light/Surge Voltage Suppressor), Manual Override: Non-locking Push Type, Port Size, Thread Piping: M5 (M5 x 0.8), PE Plate: PE