Vacuum Module Series ZX

Release valve Release valve Pilot pressure EXH port (PE) M3 Manual override Release flow rate adjusting needle Interface plate Pilot pressure EXH port (PE) M3 70 Release flow rate adjusting needle Interface plate A 83.9 35.4 A 35.4 Pilot pressure SUP port (PS) M3 (Mounting hole) 2 x 3 1 Pilot pressure SUP port (PS) M3 5.4 1 (Mounting hole) 2 x 3 5.4 Vacuum pressure SUP port (PV) M5 (or M6

2

Corrected air flow capacity = Air flow rate (Correction factor A x B x C x D) 4 Corrected air flow capacity = 0.3 m3/min (0.82 x 0.96 x 1 x 0.88) = 0.43 m3/min Corrected air flow capacity = 0.4 m3/min (0.95 x 0.93 x 1 x 0.88) = 0.51 m3/min 5 Select the model.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

port) VFR (PE port) Applicable cable O.D. 2.3 to 2.8 (PE port) (Lead wire length) (PE port) Applicable cable O.D.

Table of Contents

max (from 3 of graph MY2H/M3) = 60 (Nm) MX M3 = m3 x g x X = 7.525 x 9.8 x 140.1 x 10-3 = 10.33 (Nm) m3 M3 MTS Load factor 3 = M3/M3 max = 10.33/60 = 0.17 MY 5.

Series SV

(With 2 input blocks) With external pilot specification 46.5 (Pitch) M12 M3 16.5 18.3 13.5 P = 10.5 14.1 8.4 8.6 9.5 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 17.7 24.6 23 59.5 3 3 PWR 3 3 42.7 3 5 E 5 3 E 5 3 E 3 5 E PWR 43 56.5 2 2 2 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 1 P 1 P 1 P 1 P One-touch fitting [1(P), 3/5(E) port] Applicable tubing O.D.: 8 N9 1 1 1 1 BUS 0 BUS 0 0 0 PE PE X

Vacuum Unit

PE EXH Common Port open to atmosphere *1 PS 4 5/32" PD *2 M3 M3 : Not applicable 1 Air is also exhausted from the pilot valve when the valve type is R. Piping for PE port is available as an option (M3). (Refer to pages 15 and 16.) MExhaust Noise 2 A model with PD port is available as an option. (Refer to pages 9, 10, and 15.)

ZR

x 0.35 x 19 M3 x 0.35 x 23 M3 x 0.35 x 24 M3 x 0.35 x 28 M3 x 0.35 x 68 M3 x 0.35 x 72 M3 x 0.35 x 73 M3 x 0.35 x 77 y u Components Ejector unit + Vacuum switch/Filter unit i o For nozzle size 10, 13, 15 M3 x 0.35 x 84 4 [For ZSE4 spec.]

5 Port Solenoid Valve Series SV1000/2000/3000/4000

C4: 4 (SMC) N3: 5/32" (SMC) One-touch fitting [PE: Pilot EXH port] Applicable tube O.D.

Table of Contents

VFS VS4 Series VFR2000 VQ7 Pilot valve assembly Tightening Torque for Mounting Bolt EVS Thread M3 (2 pcs.) M3 (3 pcs.) M3 (3 pcs.) M4 (4 pcs.)

Series SY 5 Port Rubber Seal Solenoid Valve High Capacity & Simple Choices

x 48.5 (Flat nickel plated) Mounting screw tightening torques ARBY5000 SX5000-57-5 M2: 0.15Nm M3: 0.6Nm ARBY7000 New!

SY

SY3000 SY3000-23-4 (M2 x 21) M3 x 26 (Flat nickel plated) M4 x 31 (Flat nickel plated) SY3000-11-24 SY5000 SY5000-11-10 SY7000 SY7000-11-9 Note 2) For SY9000, the SUP port is only available on the end plate side. SY9000-18-2 (M3 x 42) SY9000 SY9000-11-1 Plug (white) Insert into unused cylinder ports and SUP/EXH ports. The minimum order quantity is 10 pieces. Order in multiples of 10.

4 Port Solenoid Valve Common Specifications Series SJ2000/3000

(There is a piping of X, PE port in the both sides.)

Mechanically Jointed Rodless Cylinder Series MY1

of graph MY1H/M3) = 38.7 (Nm) MY1B M3 = m3 x g x X = 6.525 x 9.8 x 138.5 x 103 = 8.86 (Nm) m3 M3 MY1M Load factor 3 = M3/M3 max = 8.86/38.7 = 0.23 MY1C 5.

5 Port Solenoid Valve

C4: 4 (SMC) N3: 5/32" (SMC) One-touch fitting [PE: Pilot EXH port] Applicable tube O.D.

MY1

= 38.7 (Nm) M3 = m3 x g x X = 6.525 x 9.8 x 138.5 x 103 = 8.86 (Nm) MTS m3 M3 Load factor 3 = M3/M3max = 8.86/38.7 = 0.23 MY 5.

Space Saving Vacuum Ejector/Vacuum Pump System Series ZQ

P EXH V V V V PE ZQ1 1U-K1 5 6 E F F K E F F KType J1 ZQ1 1U-J1 (With L-type plug connector) Bracket A (Standard) Suction filter Vacuum pressure switch Supply valve 62.8 Pilot pressure exhaust (PE) port M3, Atmospheric release Note 4) 2 x 3.2 through (Body mounting hole) Air pressure supply (P) port M5 Note 4) 69.4 76.3 (63.1) (63.1) Vacuum (V) port (M5) Note 4) SMC PE 20.3 29.4 3 20.2 P

ZX

1(PV)(PS PD) PD PE PS Table (2) PV Part no.

Electric Actuator

For grounding actuator, connect the copper wire of the actuator to the drivers protective earth (PE) terminal and connect the copper wire of the driver to the earth via the control panels protective earth (PE) terminal. Do not connect them directly to the control panels protective earth (PE) terminal. Control panel Driver PE terminal Actuator 2.

MY1

max. m1 max. m3 max. 2.

VZ5000

Round head combination screw Round head combination screw ( ) M3 x 47 With spring washer ( ) M3 x 31 With spring washer Adapter plate assembly DXT201-3-1A Round head combination screw ( ) M3 x 31 With spring washer Gasket Individual EXH spacer Applicable base VV5Z5-20 VV5Z5-21 VV5Z5-21P (EXH port) 2-Rc 1/8 Gasket Gasket Round head combination screw Applicable base VV5Z5-20 VV5Z5-21 ( ) M3