Table of Contents

ZP20U 23 4 9.5 U25 ZP25U 28 4 9.5 U32 ZP32U 35 4 10 Model Size D10 A 10 ZP10D B 12 C 4 D 13 E 10.7 F 15 Y U40 ZP40U 43 7 13.7 U50 6 7 10 17 D16 16 ZP16D 18 4 13 11.7 16 D25 25 ZP25D 28 4 15 15.5 20 D40 40 ZP40D 43 7 18 24.2 29 13-11-59 60 Series ZP Replacement Parts: Pad Unit (With lock ring/Without lock ring) Bellows (B)/With Lock Ring Buffer Mounting Nut Pad diameter: 6 to 8 ZP06B to 08B

VM

steel roller Polyacetal roller Hard steel roller Roller lever VM121-01-01 VM121-01-01S VM130-01-01 VM131-01-01S VM123-M5-01 VM123-M5-01S VM133-M5-01 VM133-M5-01S Mechanical operation Manual operation One way roller lever VM121-01-02 VM121-01-02S VM131-01-02 VM131-01-02S VM123-M5-02 VM123-M5-02S VM133-M5-02 VM133-M5-02S Straight plunger VM120-01-05 VM130-01-05 VM122-M5-05 VM132-M5-05 VM-08B

ZP

ZP20U 23 4 9.5 U25 ZP25U 28 4 9.5 U32 ZP32U 35 4 10 Model Size D10 A 10 ZP10D B 12 C 4 D 13 E 10.7 F 15 Y U40 ZP40U 43 7 13.7 U50 6 7 10 17 D16 16 ZP16D 18 4 13 11.7 16 D25 25 ZP25D 28 4 15 15.5 20 D40 40 ZP40D 43 7 18 24.2 29 13-11-59 60 Series ZP Replacement Parts: Pad Unit (With lock ring/Without lock ring) Bellows (B)/With Lock Ring Buffer Mounting Nut Pad diameter: 6 to 8 ZP06B to 08B

ZP

U20 ZP20U 23 4 9.5 U25 ZP25U 28 4 9.5 U32 ZP32U 35 4 10 Model Size D10 A 10 ZP10D B 12 C 4 D 13 E 10.7 F 15 Y U40 ZP40U 43 7 13.7 U50 6 7 10 17 D16 16 ZP16D 18 4 13 11.7 16 D25 25 ZP25D 28 4 15 15.5 20 D40 40 ZP40D 43 7 18 24.2 29 13-11-59 Series ZP Replacement Parts: Pad Unit (With lock ring/Without lock ring) Bellows (B)/With Lock Ring Buffer Mounting Nut Pad diameter: 6 to 8 ZP06B to 08B

VM

operation Roller lever VM121-01-01 VM121-01-01S VM131-01-01 VM131-01-01S VM123-M5-01 VM123-M5-01S VM133-M5-01 VM133-M5-01S Polyacetal roller Hard steel roller VM121-01-02 VM121-01-02S VM131-01-02 VM131-01-02S VM123-M5-02 VM123-M5-02S VM133-M5-02 VM133-M5-02S Polyacetal roller One way roller lever Hard steel roller Straight plunger VM120-01-05 VM130-01-05 VM122-M5-05 VM132-M5-05 VM-08B

ZP

U20 ZP20U 23 4 9.5 U25 ZP25U 28 4 9.5 U32 ZP32U 35 4 10 Model Size D10 A 10 ZP10D B 12 C 4 D 13 E 10.7 F 15 Y U40 ZP40U 43 7 13.7 U50 6 7 10 17 D16 16 ZP16D 18 4 13 11.7 16 D25 25 ZP25D 28 4 15 15.5 20 D40 40 ZP40D 43 7 18 24.2 29 13-11-59 Series ZP Replacement Parts: Pad Unit (With lock ring/Without lock ring) Bellows (B)/With Lock Ring Buffer Mounting Nut Pad diameter: 6 to 8 ZP06B to 08B

5-Port Solenoid Valve

Connector Connecting Base Clip Dual flow fitting Ordering Example How to Order Dual Flow Fitting SS5Y3-10F1-08B-CM *SY3100-5U1 *SY30M-120-1A-C8 SY 0M 120 1A 3 C8 D-sub, Flat Ribbon The asterisk denotes the symbol for the assembly.

One-touch Fittings

[mm] Model D1 D2 L Weight [g] 8 KQ2C-08B 13.6 9.2 2.6 0.1 10 KQ2C-10B 16.2 11.2 2.7 0.1 12 KQ2C-12B 18.8 13.2 2.7 0.2 16 KQ2C-16B 24.2 17.2 3.2 0.3 : B (Black), R (Red), YR (Orange), BR (Brown), Y (Y ellow), G (Green), CB (Sky blue), GR (Gray), W (White), BU (Blue) : B (Black), R (Red), YR (Orange), BR (Brown), Y (Y ellow), G (Green), CB (Sky blue), GR (Gray), W (White), BU (Blue) Inch Size

Micro Mechanical Valve Series VM1000

06SA VM122-M5-06SA VM132-M5-06SA VM-06BS 45 g Cross roller plunger Polyacetal roller VM120-01-07A VM130-01-07A VM120U-01-07A VM130U-01-07A VM122-M5-07A VM132-M5-07A VM-07B 43 g Hard steel roller VM120-01-07SA VM130-01-07SA VM120U-01-07SA VM130U-01-07SA VM122-M5-07SA VM132-M5-07SA VM-07BS 45 g Toggle lever VM120-01-08A VM130-01-08A VM120U-01-08A VM130U-01-08A VM122-M5-08A VM132-M5-08A VM-08B

ZP

U20 ZP20U 23 4 9.5 U25 ZP25U 28 4 9.5 U32 ZP32U 35 4 10 Model Size D10 A 10 ZP10D B 12 C 4 D 13 E 10.7 F 15 Y U40 ZP40U 43 7 13.7 U50 6 7 10 17 D16 16 ZP16D 18 4 13 11.7 16 D25 25 ZP25D 28 4 15 15.5 20 D40 40 ZP40D 43 7 18 24.2 29 13-11-59 Series ZP Replacement Parts: Pad Unit (With lock ring/Without lock ring) Bellows (B)/With Lock Ring Buffer Mounting Nut Pad diameter: 6 to 8 ZP06B to 08B

V100

Plug lead unit manifold 2 08 01N VV3Q1 Plug-in unit manifold VV3Q12-051 set Manifold base part no. VQ110-5L 4 set Valve part no. (1st to 4th stations) VVQ100-10A-2 1 set Blanking plate part no. (5th stations) Applicable solenoid valve (Plug lead type) VQ10-L VQ10-M VQ10-G 1 VQ100 Series Prefix the asterisk to the part nos. of the solenoid valve, etc.

3 Port Solenoid Valve Series VQ100 1

Plug lead unit manifold 2 08 01N VV3Q1 Plug-in unit manifold VV3Q12-051 set Manifold base part no. VQ110-5L 4 set Valve part no. (1st to 4th stations) VVQ100-10A-2 1 set Blanking plate part no. (5th stations) Applicable solenoid valve (Plug lead type) VQ10-L VQ10-M VQ10-G 1 VQ100 Series Prefix the asterisk to the part nos. of the solenoid valve, etc.

VQ

Stations Stasions 3 2 1 Dside Uside 02 2 stations VVQ1000-10A-2 20 20 stations Port size and thread 01N 01T 01F M5, Rc(PT)1/8 NPT1/8 NPTF1/8 G(PF)1/8 Only thread port size 1/8 style (2U type, P/E port) has choice of thread.

3 Port Solenoid Valve Series VQ100

Stations U side D side 2 stations 02 VVQ1000-10A-2 Stations4321 20 stations 20 Port size and thread M5, Rc 1/8 NPT 1/8 NPTF 1/8 PF 1/8 Nil 01N 01T 01F Only thread port size 1/8 type, (Type 2U, P/E port) has choice of thread.

3 Port Solenoid Valve Series VQ100 1

Stations U side D side 2 stations 02 VVQ1000-10A-2 Stations4321 20 stations 20 Port size and thread M5, Rc 1/8 NPT 1/8 NPTF 1/8 PF 1/8 Nil 01N 01T 01F Only thread port size 1/8 type, (Type 2U, P/E port) has choice of thread.

MANIFOLD, SUS PLATE, 4/5 PORT SOLENOID VALVE, O84, 2355.00000 lb

Compact Vacuum Unit Ejector/ Vacuum Pump System

Pressure sensor/Vacuum pressure switch mountable Note 1) NIL Sensor/ switch non-mountable base S Sensor/ switch mountable base Note 1) Select S when the model with either the pressure sensor or the pressure switch for vacuum is selected for how-to-order for the single unit (8). (3) Common supply pressure (PV) connecting port size (4) Common vacuum burst pressure (PD) port Note 2) 01 Rc1/8 01N

Compact Vacuum Unit

(Refer to Manifold on page 17.) 12 12 stations Common Release Pressure (PD) Port Size Note) Common Supply (PV) Port Size 01 01N 01F M5 Without PD port (PV = PD) M5 x 0.8 (PV PD) Rc1/8 NPT1/8 G1/8 M5 x 0.8 Nil M5 Note) Refer to on page 1 for the combinations of supply valve and release valve selectable.

This is a legacy product, and replaced byLVA20-01N-A-V-Z, FLUOROPOLYMER, VALVE, VALVE, FLUOROPOLYMER VALVES and REG, 2I, FLUOROPOLYMER, 0.44273 lb

This is a legacy product, and replaced byVT307-5DO1-01N-Q, VT3 BASE MT 1/8, VALVE, VT3/VO3 SOL VALVE 3-PORT, NA, VT3 BASE MT 1/8, 0.34012 lb