CRBU

Example: For M3 bolt: L max. = 6mm (mm) (mm) (mm) Size Size 15 20 30 Size 10 15 20 30 d1 d2 L1 L2max Y 30 15 2.5 3.3 20 2.5 3.3 4.2 2.5 M3 X 0.5 M4 X 0.7 M5 X 0.8 2.5 2.5 to 3 2.5 to 4 2.5 to 4.5 5 (8 Y) to (Y 1) 6 (9 Y) to (Y 1.5) 7 (10 Y) to (Y 1.5) 8 (13 Y) (Y 2) Y 1 Y 1.5 Y 1.5 Y 2 3 to18 3 to19 3 to 10 5 to 13 1.5mm or more, L1: Standard chamfering part Symbol: A15 Symbol

•

L Y 0 __D . .

High Vacuum Angle Valve

How to Order [Option] XLGV M9N 16 A 1 G L Flange size 16, 25, 40 1 q e u r t XLGV M9N 50 A 1 G L Flange size 50, 63, 80 i w y o !0 !

Made to Order

Double clevis CT 2 x N D E M Y CD hole H10, Axis d9 RR CW CU CX +0.4 +0 T L CZ 0.1 0.3 [mm] Part no.

smcmaintenancepartslist

For 80 and 100, remove the seal retainer and lock piston seal. q i u r y w y L o t e !

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

plug connector M plug connector Electrical Entry DC/ 24 V, 6 V, 12 V 48 V, 100 V 110 V ( Option) Grommet (G) Grommet terminal (E) Conduit terminal (T) DIN terminal (D), (Y) L plug connector (L) M plug connector (M) Note) Note) Light Surge voltage suppressor Note) VF1000/VF3000 only.

Table of Contents

y Return spring Stainless steel CAC406 u Body Dimensions: Bracket A J 4-G C 1.5 B D E L 4-H Valve mounting hole F Bracket Mounting Dimensions/Bracket Material: Stainless Steel (mm) A B C D E F G H J L Valve model Bracket part no.

PFxx-OMY0005

Y 0: 10 (L/pulse) 1: 100 (L/pulse) OUT1 setting (PLS) 1320 0x0528 0 R/W 1000 L range 0: 0.1 (L/pulse) 1: 1(L/pulse) 2000 L range 0: 1 (Ft3/pulse) 1: 10 (Ft3/pulse) OUT1 accumulated pulse converted value setting 1330 0x0532 0 R/W PLS1_Ft3 U8 0 Y OUT1 setting (PLS/Err) 1ot (Selection of output type) Setting of OUT1 output normal and reserved output.

E-ITV-STD-RF-A

The expect ed perf orm ance and saf et y assurance w i l l be t he responsi bi l i t y of t he person w ho has det erm i ned t he com pat i bi l i t y of t he syst em .

ZP

w r q ZPR 10 D N J 10 04 A10 y Connection thread (Male thread) R Width across flats G Buffer specification e H (Buffer body) A10 M10 x 1 A14 M14 x 1 J Rotating K Non-rotating Width across flats K J L L t Vacuum inlet (One-touch fitting) 04 4 06 6 08 8 Width across flats M Model A B C D E 2 F G H J K L M N P Vacuum inlet direction q Pad dia.

Air Cylinder

Applicable bore size A1 L L1 MM Y-J010C 10 8 15.2 21 M4 x 0.7 Part no. Applicable bore size A1 L1 MM NDH10 NX R1 U1 Part no.

4-channel Flow Monitor ( compatible)

U8 0x02 (2) 3: 1Sor (OUT1 turns red at ON) 4: 2SoG (OUT2 turns green at ON) 5: 2Sor (OUT2 turns red at ON) Set the connection range of PF2A5. 0: 10 L 1: 50 L 2: 100 L 3: 200 L 4: 500 L rAnG (PF2A5, Selection of connection range) Y U8 0x00 1 R/W (0) Set the connection range of PF2W5. 0: 4 L 1: 16 L 2: 40 L 3: 100 L 4: 250 L rAnG (PF2W5, Selection of connection range) Y U8 0x00 2 R/W (0) Set

Table of Contents

ISA2 52.5 l/min 2.5 l/min IS 10 l/min 100 l/min PF2A511 105 l/min 5 l/min ZSM 20 l/min 200 l/min 210 l/min 10 l/min PF2 PF2A521 IF 50 l/min 500 l/min 525 l/min 25 l/min PF2A551 Data Sensor Flow rate range 0.5 l/min 2 l/min 5 l/min 10 l/min 20 l/min 40 l/min 100 l/min 0.5 l/min 4 l/min PF2W504 PF2W504T 0.35 l/min 4.5 l/min 16 l/min 2 l/min PF2W520 PF2W520T 1.7 l/min 17l/

Table of Contents

2 i r i t y w w e !0 !0 !2 !5 o !0 !4 q q y u !1 !3 r t !1 M5 type U10/32 type M5 type U10/32 type !1 y !2 u !4 !3 i !5 u e r r t w e o !0 i o q q t y !0 !2 w !

Electric Actuators

Nil Standard motor SMC controller Series LC1 compatible L R Left Right Lead screw lead G R Y Matsushita Electric Industrial Co., Ltd.

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

220VAc 5 24VDC 6 12VDC 9 Others (Special Order) E L E C T R I C A L E N T R Y O P T I O N S None Z With Indicator Light and Surge Voltage Suppressor F Through Base H O W T O O R D E R M A N I F O L D FOR FURTHER TECHNICAL DETAILS ON THIS PRODUCT, REQUEST CATALOG REFERENCE N233 2.71 SOLENOID VALVES SERIES NVFS H O W T O O R D E R M A N I F O L D / O P T I O N P A R T S A S S E M B L Y S E

Metal Seal/Rubber Seal Series VQ Body Ported

Description Zinc die-casted Zinc die-casted Body Body w w Stainless steel Aluminum/HNBR Spool/Sleeve Spool valve e e Resin Resin Piston Piston r Pilot valve assembly r Pilot valve assembly Note) L M G 2 Note) L M G 2 VQ111(H) (Y) Voltage 1 to 6 VQ111(H) (Y) Voltage 1 to 6 Single Single VQ110L L M 2 VQ110L L M 2 Double (Latching) Double (Latching) Voltage 1 to 6 Voltage 1 to 6 Note) L M G

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Flange bracket material: Carbon steel 7-6-19 20 Series CQ2 Accessory Bracket Double Knuckle Joint Single Knuckle Joint For I-G012, I-Z015A I-G02, I-G03 For I-G04, I-G05 I-G08, I-G10 For Y-G012, Y-Z015A Y-G02, Y-G03 For Y-G04, Y-G05 Y-G08, Y-G10 ND hole H10 Axis d9 ND hole H10 Axis d9 Material: Carbon steel Material: Cast iron Material: Carbon steel Material: Cast iron NDH10 NX Applicable

Electric Actuator/Slider Type

Conductor size: AWG24 cable type M LEC Y C 1 Cable length (L) Motor type Y AC servo motor L 0.2 m J 0.5 m 1 1 m 3 3 m Cable description M MECHATROLINK-2cable U MECHATROLINK-3cable Not available for the MECHATROLINK-2cable. LEC-CYMis JEPMC-W6002-E manufactured by YASKAWA CONTROLS CO., LTD.

Table of Contents

Nil Standard motor SMC controller Series LC1 compatible L R Left Right Lead screw lead G R Y Matsushita Electric Industrial Co., Ltd.