Electric Actuator/Slider Type

M N() W M N() W W P3 P1 PE PE P4 P2 CNP2 CNP2 P(+) P(+) Regeneration option Regeneration option C C D D Encoder Encoder CN2 CN2 L11 L11 L21 L21 Note) For single phase 200 to 240 VAC, power supply should be connected to L1 and L3 terminals, with nothing connected to L2.

Pin Clamp Cylinder Series C(L)KQG/C(L)KQP

G P G P t = 1 mm x 2 t = 0.5 mm x 2 (21) (6) 3 3 MK t = 1 mm x 2 t = 0.5 mm x 2 CKQ CLKQ (66) 330.05 330.05 CK1 38 With shims (Clamping height: HIGH type) With shims (Clamping height: LOW type) CLK2 33 33 (66) 72 120 38 C W W K 120 SR SR 65 (Guide tube O.D.)

Proposals for Energy Saving

8 @5 @3 w !6 !5 !1 !2 !0 Actuators !3 !

90

q q 1 unit q w Set value can be copied up to 10 units.

Compact Manifold Regulator Series ARM5

t y ARJ w r AR425 to 935 t AMR e ARM u y u q i ARP r IR o Replacement Parts Component Parts IRV Description Material Part no.

Series VQ Base Mounted Metal Seal/Rubber Seal

Description Material Note q w e No.

ITV

circuit EXH w Exhaust solenoid valve q Air supply solenoid valve u Pressure sensor r Diaphragm EXH e Pilot chamber y Exhaust valve u Pressure sensor t Supply valve r Diaphragm e Pilot chamber EXH t Supply valve SUP SUP OUT OUT EXH ITV1000 ITV2000, 3000 Block diagram Supply pressure q Air supply solenoid valve Input signal Output pressure r Diaphragm i Control circuit Pilot valve w Exhaust

IC

Step 20 Step 5 P4 Set pressure P3 P2 The deviation is corrected manually (with keys).

Series VS

If only connecting size 1 end plates to manifold. (2) AXT502-4-2 must be ordered separately. 4 S Series VS R8 Rubber Seal HOW TO ORDER MANIFOLD ASSEMBLIES FOR (4-PIN EURO CONNECTOR) PLUG-IN VALVE BASES VV8 1 5 03S W 03 D T X6 4-PIN EURO CONNECTOR X6 X13 X17 X53 * For wiring options, please refer to page 13 for more information.

IC

0 q CONTROLLER PRESSURE OUT w Position Detection Switch Flow Sensor Pressure Control Pressure Sensor e w r RUN 4 3 2 1 CH kPa 4 3 2 1 SW t e y D-IN RUN UP SET P-ON DOWN STOP READ r u i o t y u i o !

DOC1020530

Connecting a servo motor of the wrong axis to U, V, W, or CN2 of the driver may cause a malfunction. 12. The illustration of the 24 V DC power supply is divided between input signal and output signal for convenience. However, they can be configured by one. -6- (2) Using 1-phase 200 V AC to 240 V AC power supply for LECSN2-T Note 1. Between P3 and P4 is connected by default. 2.

New

Stepless control of air pressure proportional to an electrical signal Maximum supply pressure:5.0 MPa 5.0 MPa Power consumption 3 W or less 3 W or less Set pressure range:0.01 to 3.0 MPa 0.01 to 3.0 MPa Maximum flow rate:3000 L/min [ANR] 3000 L/min [ANR] Digital pressure display Supply pressure: 5.0 MPa Set pressure: 3.0 MPa Fluid: Air, N2, O2, Ar Air, N2, O2, Ar Wetted parts: Fluorine grease

ITV

S1 S2 Preset pressure OFF OFF P1 ON OFF P2 OFF ON P3 ON ON P4 For safety reasons, it is recommended that one of the preset pressures be set to 0MPa. 1.12-16

ZSE3/ISE3

Window comparator mode (one for positive pressure is same) Hysteresis is 3 digit, so set P1 and P2 (also P3 and P4) at least 7 digit. Window comparator mode (P1< P2, P3< P4) Hysteresis mode (P1 P2, P3 P4) (Hysteresis = 3 digits fixed) Hysteresis (Adjustable) Hysteresis (Fixed) Hysteresis (Fixed) ON ON OFF OFF P1 (P3) P2 (P4) 1 digit is the minimum setting pressure unit.

LCD Readout Digital Pressure Switch Series ZSE3 (For Vacuum)/ISE3 (For Positive Pressure) For General Pneumatics Easy pressure setting with the digital display Can be integrated with a vacuum unit, Series ZX ZSE ISE ZSP PS ISA PSE IS ISG ZSM Built-in fail

Hysteresis mode (P1 P2, P3 P4) PSE (Hysteresis = 3 digits fixed) Hysteresis (Variable from 0) Hysteresis (Fixed) Hysteresis (Fixed) 1 digit is the minimum setting pressure unit. ON IS ON OFF OFF ISG P1 (P3) P2 (P4) P1 (P3) P2 (P4) ZSM Pressure Low High Vacuum Low High Pressure Low High Vacuum Low High 1 output type with failure prediction function 1. Input mode for set point value 2.

ZISE3.eng

P1 (P3) P2 (P4) P1 (P3) P2 (P4) Pressure low Pressure high Vacuum low Vaccum high Pressure low Pressure high Vacuum low Vacuum high Filter gasket (ZX1-FG) : Hysteresis mode (same as for positive pressure use) When the value of hysteresis is set to 2 digits or less, the switching output might chatter due to fluctuation of the input pressure around its set point.

CEx-OMQ0013

(DC1224V) 1. 1-1 CEU2 1 2 32 32 1 16 P1 P2 P3 . P16 s1 s1 s1 s1 s2 s2 s2 s2 ... ... ... ... s32 s32 s32 s32 0.5mm) 1 2 , 2. 30mm 30mm 3.

1

When more than 3 types of nozzle are needed, A and B channels are available for selection; thus 2 outputs x 2 channels = 4 outputs are available. 50 ISA2 IS 0 0 Time AUTO-SHIFT terminal ZSM Set value of OUT2 (CH.B) Set value of OUT1 (CH.B) Set value of OUT2 (CH.A) Set value of OUT1 (CH.A) 10 [ms] Nozzle 1 Nozzle 2 Nozzle 3 Nozzle 4 50 GND PF2 P3 P4 P1 P3 P4 P1 After 10 [ms] is passed, display

MONOSASHI-KUN WITH BRAKE CONTROLLER

Program P1 P2 P3 P16 S1 S1 S1 S1 S2 S2 S2 S2 Step S32 S32 S32 S32 Following are CEU2s special feature: 1. Predictive Control & Learning Function (Allow High Repeatability and Precision, 0.5mm) With learning function, after every execution, brake point will be amended, according to the deviation of stopping position from setting position.

Model: 40 (Standard, for IZTB40 Bar), Input, Output Specification: None (or NPN, IZTC41), Power Supply Cable Length: 3 (3m)