JXCx-OMT0028CN

1W 2 (W 12 0 ) (1-049) RESET PARA B (1-050) RESET B No. ( PLC ) No. (1-051) RESET No.

5 Port Solenoid Valve Series SY3000/5000/7000/9000

(g) n: Stations W = 30n + 50 W = 37n + 63 W = 61n + 101 W = 79n + 127 W = 100n + 151 Note 1) For more than 10 stations (more than 5 stations in case of SS5Y7), supply pressure to P port on both sides and exhaust from EA/EB port on both sides.

High Vacuum Angle Valve

e, r 1.3 x 108 1.3 x 109 B w, e 1.3 x 108 1.3 x 109 C r 1.3 x 1010 (FKM) 1.3 x 109 D w 1.3 x 108 1.3 x 1011 (FKM) E w, r 1.3 x 108 1.3 x 109 Seal material Symbol Seal material Compound no.

HRX-OM-M090

HRX-OM-M090-f Operation Manual InstallationOperation Original Instructions Thermo chiller Air-Cooled Water-Cooled refrigerated type refrigerated type HRS012-A-10HRS012-W-10HRS018-A-10HRS018-W-10HRS012-A-20HRS012-W-20HRS018-A-20HRS018-W-20HRS024-A-20HRS024-W-20Keep this manual available whenever necessary 2021 SMC CORPORATION All Rights Reserved To the users Thank you for purchasing SMCs

SY

(g) n: Number of stations W = 30n + 50 W = 37n + 63 W = 61n + 101 W = 79n + 127 W = 100n + 151 Note 1) For 10 stations or more (5 stations or more in case of SS5Y7), supply pressure to P port on both sides and exhaust from EA and EB ports on both sides.

Vacuum Unit

How to Order w q e r t y ZK2 A C K 5 K W 12 08 u i q Body/Exhaust type e Combination of supply valve and release valve w Nominal nozzle size Symbol Nominal nozzle size 07 0.7 10 1.0 12 1.2 15 1.5 Symbol Body Exhaust type Symbol Supply valve Release valve N.C. N.C.

Fieldbus System

1 (R1) 5 3(R2) (P) Nil R Y Note 2) Standard (1 W) External pilot Low wattage type (0.5 W) 2-position double (Metal) 2(B) (A) 4 Note 1) When two or more symbols are specified, indicate them alphabetically.

SI Unit for Vacuum Manifold

Vendor defined parameters Index(dec) Subindex Access Parameter name Size[byte] Data Storage Section 0x0040(64) 1...16 R/W Pressure P1 2 Y 3.4.1 0x0041(65) 1...16 R/W Hysteresis H1 2 Y 3.4.2 0x0042(66) 1...16 R/W Pressure P2 2 Y 3.4.3 0x0043(67) 1...16 R/W Hysteresis H2 2 Y 3.4.4 0x0044(68) 1...16 R/W Pressure P3 2 Y 3.4.5 0x0045(69) 1...16 R/W Hysteresis H3 2 Y 3.4.6 0x0046(70) 1...16 R/W

SX

(g) n: Stations W = 30n + 50 W = 37n + 63 W = 61n + 101 W = 79n + 127 W = 100n + 151 Note) For more than 10 stations, supply pressure to P port on both sides and exhaust from EA and EB port on both sides.

LEC-OM069xx

Example: Set 20 W (100 W 20%) for the 100-W external Regenerative resistor with natural convection cooling method: Pn600 = 2 (unit: 10 W) Note 1. If Pn600 is not set to the optimum value, alarm A.320 will occur. 2. When set to the factory setting (Pn600 = 0), the DRIVERs built-in option has been used.

Valve Single Unit

(g) n: Stations W = 30n + 50 W = 37n + 63 W = 61n + 101 W = 79n + 127 W = 100n + 151 Note) For more than 10 stations, supply pressure to P port on both sides and exhaust from EA and EB port on both sides.

Valve Single Unit

(g) n: Stations W = 30n + 50 W = 37n + 63 W = 61n + 101 W = 79n + 127 W = 100n + 151 Note) For more than 10 stations, supply pressure to P port on both sides and exhaust from EA and EB port on both sides.

LEC-OM071xx

Example: Set 20 W (100 W 20%) for the 100-W external regenerative resistors with natural convection cooling method: Pn600 = 2 (unit: 10 W) Note 1. If Pn600 is not set to the optimum value, alarm A.320 will occur. 2. When set to the factory setting (Pn600 = 0), the DRIVERs built-in option has been used.

7.5

0 y t r w e u w !2 i !1 (A) 4 (B) 2 (A) 4 (B) 2 4(A) SOL.a SOL.b SOL.a SOL.b 5 (EA) 1 (P) 3 (EB) 5 (EA) 1 (P) 3 (EB) 2(B) o 5(EA)/3(EB) 1(P) SJ2C60 [N.C., N.O. valve x 1 (each)] SJ2C60K with back pressure check valve SJ2C60 [N.C. valve, N.O. valve x 1 (each)] !0 y t r q e u w !2 i !

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

NA Enclosure IP67 Refer to Note 1) of the w SI unit specifications. w q e r y t u i q Series t P, E port location r Valve stations 1 2 3 U D B For 32-output SI unit 10-SV1000 10-SV2000 10-SV3000 U side (2 to 10 stations) D side (2 to 10 stations) Both sides (2 to 20 stations) Symbol 02 Stations Note 2 stations Double wiring Note 1) w SI unit specifications 16 02 16 stations y SUP/EXH block

SZ3000

1 i w w u 6 e 5(R) SOL.a SOL.b 3(R) 1(P) SZ3B60K/With back pressure check valve 4(A) 2(B) 5(R) SOL.a SOL.b 3(R) 1(P) o 5 (R) 1 (P) 3 (R) SZ3C60 [N.C. valve, N.O. valve 1 pc. each] SZ3C60 [N.C. valve, N.O. valve 1 pc. each] 4(A) 2(B) r u !0 !

SZ3000

1 i w w u 6 e 5(R) SOL.a SOL.b 3(R) 1(P) SZ3B60K/With back pressure check valve 4(A) 2(B) 5(R) SOL.a SOL.b 3(R) 1(P) o 5 (R) 1 (P) 3 (R) SZ3C60 [N.C. valve, N.O. valve 1 pc. each] SZ3C60 [N.C. valve, N.O. valve 1 pc. each] 4(A) 2(B) r u !0 !

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

DC (17 mA), 0.95 W DC (40 mA) Note 3) Power consumption (Current) 12 VDC 0.4 W DC (34 mA), 0.95 W DC (80 mA) Note 3) Note 1) Use dry air to prevent condensation when operating at low temperatures.

4 Port Solenoid Valve Common Specifications Series SJ2000/3000

0 y t r w e u w !2 i !1 (A) 4 (B) 2 (A) 4 (B) 2 4(A) SOL.a SOL.b SOL.a SOL.b 5 (EA) 1 (P) 3 (EB) 5 (EA) 1 (P) 3 (EB) 2(B) o 5(EA)/3(EB) 1(P) SJ3C60 [N.C., N.O. valve x 1 (each)] SJ3C60K with back pressure check valve SJ3C60 [N.C. valve, N.O. valve x 1 (each)] !0 y t r q e u w !2 i !

45

AXT100-DS25015 030 050 L Terminal no.