A_HEC-OM-K001 Take safety margins into consideration in the customers machine. 9.5.1 Performance of HED003 Conditions; Recirculating fluid: water (flow rate 15L/min), Facility water flow rate: 5L/min, Ambient temp.: 25oC 1) Cooling capacity 800 Facility water 10oC Facility water 25oC 600 Cooling capacity W Facility water 35oC 400 200 0 0 10 20 30 40 50 60 70 Recirculating fluid temp. oC Fig. 9-7 Cooling
MHR3-10R/MDHR3-10l MHR3-10R/MDHR3-10l 10 10 Pressure 0.6MPa 0.6MPa Pressure 8 8 0.5MPa External hold 0.5MPa Holding force (N) Holding force (N) 6 6 0.4MPa 0.4MPa 4 4 0.3MPa 0.3MPa 0.2MPa 2 2 0.2MPa L 0 10 20 30 40 50 0 10 20 30 40 50 Holding point L (mm) Holding point L (mm) Internal hold MHR3-15R/MDHR3-15l MHR3-15R/MDHR3-15l 20 20 Pressure 0.6MPa Pressure 0.6MPa 15 15 L 0.5MPa 0.5MPa Holding
min 4 15 30 40 (1.1 [gal]/min) (4.0 [gal]/min) (7.9 [gal]/min) (10.6 [gal]/min) Facility water minimum necessary flow rate L/min 10 15 25 40 (2.6 [gal]/min) (4.0 [gal]/min) (6.6 [gal]/min) (10.6 [gal]/min) Operating temperature range C 20 to 90 Temperature stability *1 C 0.3 Circulating fluid *2 Ethylene glycol solution60% 0.35 / 0.55 0.45 / 0.65 0.40 / 0.60 0.35 / 0.55 (At 4L/min) (At 15L
Manually unlocking For 20 to 32 Dust cover holding bolt Dust cover Manual unlocking bolt Manual unlocking bolt Lock ring Locking direction Locking direction Lock ring Rod side Head side Rod side Head side MLGP--F: Extension locking MLGP--B: Retraction locking 1) Remove the dust cover. 2) Screw a manual unlocking bolt (a bolt of M3 x 0.5 x 15L of more commercially available) into the lock
Caution 1) Remove the dust cover. 2) Screw a manual unlocking bolt (a bolt of M3 x 0.5 x 15l or more commercially available) into the lock ring threads as shown above, and lightly push the bolt in the direction of the arrow (head side) to unlock. 1. In order to maintain good performance, operate with clean unlubricated air.
Retraction locking Extension locking 1) Remove the dust cover. 1) Remove the dust cover. 2) Screw in the manual unlocking bolt (commercial bolt size M3 x 0.5 x 15l or more) into the lock ring threads, and lightly push it in the direction of the arrow (rear), as shown above, to unlock. 2) Screw in the manual unlocking bolt (commercial bolt size M3 x 0.5 x 15l or more) into the lock ring threads
Retraction locking Extension locking 1) Remove the dust cover. 1) Remove the dust cover. 2) Screw in the manual unlocking bolt (commercial bolt size M3 x 0.5 x 15l or more) into the lock ring threads, and lightly push it in the direction of the arrow (rear), as shown above, to unlock. 2) Screw in the manual unlocking bolt (commercial bolt size M3 x 0.5 x 15l or more) into the lock ring threads
Caution 1) Remove the dust cover. 2) Screw a manual unlocking bolt (a bolt of M3 x 0.5 x 15l or more commercially available) into the lock ring threads as shown above, and lightly push the bolt in the direction of the arrow (head side) to unlock. 1. In order to maintain good performance, operate with clean unlubricated air.
port Rc,NPT,G 1/8 Female thread, 1/4 PFA tube, LQ1 size 2 with nuts, LQ3 size 2 with nuts Port size Pilot air Supply / Exhaust port Rc,NPT,G 1/8 Female thread Body wetted areas New PFA Diaphragm PTFE Material Check valve New PFAPTFE Liquid contact seals PTFE Maximum discharge rate 1000mL/min Note1) Average discharge pressurer 0 to 0.4MPa Pilot air pressure 0.2 to 0.5MPa Air consumption 15L
Specifications and how to order Specifications Model PAF3413 Actuation Air operated Main fluid: Suction/Discharge port RcGNPT 3/8 Female thread, 1/2 Tube extension, With nut (size 4, 5) Port size Pilot air: Supply/Exhaust port Rc, G, NPT 1/8 Body wetted areas newPFA Material Diaphragm/Seal PTFE Check valve newPFA, PTFE Discharge flow rate 1 to 15L/min Average discharge pressure 0 to 0.4MPa
Measuring conditions 10-CQSXB20-50D Chamber volume Cleanliness of air supplied to chamber 15l (0.53ft3) Same quality as supply air Hitachi Electronics Engineering Corporation TS-6200 Min. measurable particle dia. 0.1m Intake rate 28.3l/min (0.99CFM) Sampling time: 5min Interval time: 55min Operation frequency: 30cpm Average piston speed: 100mm/s (3.9inls) Mounting: Horizontal no-load Supply
Vacuum Pressure Switch: ZSE2-0R-15 ZSE2-0R-15 ZSE2-0R-15L ZSE2-0R-15C ZSE2-0R-15CL ZSE2-0R-15CN Indicator light (Red) Pressure setting trimmer Indicator light (Red) Pressure setting trimmer H L SET L SET H 15 15 9 9 2-M2.5 Mounting thread 2-M2.5 Mounting thread 25 25 31 31 600(3000) 42 600(3000) 49.5 40 40 3 3 20 20 18 18 16 16 13 11 13 11 9 9 Vacuum supply port 3.3 Vacuum supply port 3.3
PF2A ZS-36-A1 ZS-36-A2 ZS-36-A3 ZS-36-A4 ZS-36-A5 2 L-type brackets, 2 mounting screws M3 x 15L For 1 station (for single unit) For 2 stations 2 L-type brackets, 2 mounting screws M3 x 25L PF2W For 3 stations 2 L-type brackets, 2 mounting screws M3 x 35L For 4 stations 2 L-type brackets, 2 mounting screws M3 x 45L PF2D For 5 stations 2 L-type brackets, 2 mounting screws M3 x 55L IF 951
Measuring conditions 10-CQSXB20-50D Chamber volume Purity of air supplied to chamber 15l Same quality as supply air Evaluation of air purity inside chamber 100 Particle concentration (particles/cf) Hitachi Electronics Engineering Corporation TS-6200 Min. measurable particle dia.: 0.1m Intake rate: 28.3l/min 10 Laser dust monitor 1 Sampling time: 5min Interval time: 55min Operation frequency
PF2A ZS-36-A1 ZS-36-A2 ZS-36-A3 ZS-36-A4 ZS-36-A5 2 L-type brackets, 2 mounting screws M3 x 15L For 1 station (for single unit) 2 L-type brackets, 2 mounting screws M3 x 25L For 2 stations PF2W 2 L-type brackets, 2 mounting screws M3 x 35L For 3 stations 2 L-type brackets, 2 mounting screws M3 x 45L For 4 stations PF2D 2 L-type brackets, 2 mounting screws M3 x 55L For 5 stations IF 951 Series
Fluid Note4) PEEKPP Body Diaphragm Check valve Fluid contact material EPDMFKM EPDMFKM Repeatability Note1) 1%(2% when the dispense volume is 5 to 15L) *Under SMC's measuring conditions Dispense pressure Note2) 10kPa 15kPa 35kPa Suction pressure Dry Wet Max.operating frequency Note3) 2Hz(Minimum ON time 200msec/Minimum OFF time 300msec) Fluid temperature 10 to 50(No freezing) Ambient temperature
. '/4 92 CX cz Without boot With boot H Z ZZ os f h , i9"'" size MM N P PG PH PL PW RR S U W .co 1110 (mm) X1US Z ZZ i 40 7 115 20 27 Y. 42 11 20 45 10 153 16 8 10'g' '-'"'' 15l:'. 29.5 51 234 244 43 112 59 242 252 50 30 % 46 10 21 50 12 168 19 0 'v 0 63 V. 16 31 % 48.5 13 23 60 16 182 23 0 W O , 80 37 'I, 55 15 23 70 20 208 28 0 I "u', '0 OJ 38 58 261 273 52 11 .2 66 1/4 "'M 49 58 280 296
Stroke (mm) Pulling force (N) Thread size Bore size (mm) M2 x 0.4 x 15l or more 12, 16 20, 25, 32 40 1.5 2 M3 x 0.5 x 30l or more 3 2 M3 x 0.5 x 30l or more 4 3 Remove the bolt for normal operation. It can cause lock malfunction or faulty release. Operating Pressure Caution 1. Apply air pressure of at least that shown in the table below to the port on the lock mechanism side.
Size, Body, Valve Type: 15L (Size: 1; Body Mat'l: Stainless Steel; Port Size: 1/4; Orifice Dia: 2, N.C.), Voltage and Electrical Entry: C (110VAC; Grommet w/Surge Voltage Suppressor), Other Voltages and Electrical Options: None, Other Options: B (NPT Thread), Mounting: XB (w/Bracket)
Size, Body, Valve Type: 15L (Size: 1; Body Mat'l: Stainless Steel; Port Size: 1/4; Orifice Dia: 2, N.C.), Voltage and Electrical Entry: C (110VAC; Grommet w/Surge Voltage Suppressor)