Modular F.R.L. Units

L How to Order AC D 30 03 DE B Option/Semi-standard: Select one each for a to j.

ZP

-01NS 08 8 KQ2H08-01NS F2 30 (Rotating angle) 10 to 32 Model A B C D E 2 F G H J K L M N P Q R S Vacuum inlet direction q Pad dia.

SYJ300/500/700

plug connector (L): 10-SYJ74M-L01 02 M plug connector (M): 10-SYJ74M-M01 02 DIN terminal (D): 10-SYJ74M-D01 02 M8 connector (WO): 10-SYJ74M-WO01 02 Approx. 300 (Lead wire length) Applicable cable O.D. 3.5 to 7 89.6 MAX.10 58[65] 91.5 84 42.6 62.5 72.7 M8 x 1 45 69.1[76.1] Approx. 300 (Lead wire length) 80.6[82.8] Pg7 90.6 70.8[73] 79.7 72.3 65.8 23 15 23 15 23 15 23 15 48 48 48 48 12 12 12

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

4 Manual override A B + 35 + B A X PE EA EB P M5 x 0.8 62.8 107.2 [111.6] (Lead wire length) G: Approx. 300 H: Approx. 600 (Pilot EXH port) 22 50.6 [57.6] 9.5 18 18 28 (P, EA, EB port) 1/4 56 L plug connector (L): 10-SY5240(R)-L-02 M plug connector (M): 10-SY5240(R)-M-02 DIN terminal (D, Y): 10-SY5240(R)-02 M8 connector (WO): 10-SY5240(R)-WO-02 D Y Applicable cable

0.4

Applicable fitting size Noise reduction (dB) Effective area (mm2) (Cv factor) Series Model A L D d VQ2000 10 AN200-KM10 59.6 80.8 26 (1.4) 22 30 Elbow fitting assembly VVQ2000-F-L(C4/C6/C8/N3/N7/N9) It is used for piping that extends upward or downward from the manifold.

Modular F.R.L. Units

L How to Order AC D A 30 03 DG Option/Semi-standard: Select one each for a to j.

Series SV

Connector specifications 1m (3.24ft) 5m (16.2ft) Straight Angle 010 050 S A M12 M12 6 6 28.3 18 30 5 50 l 31.3 14.9 30 5 34 50 48 l 5 1 2 1 2 5 4 3 4 3 Socket connector pin arrangement Socket connector pin arrangement Terminal no.

Table of Contents

ISA2 52.5 l/min 2.5 l/min IS 10 l/min 100 l/min PF2A511 105 l/min 5 l/min ZSM 20 l/min 200 l/min 210 l/min 10 l/min PF2 PF2A521 IF 50 l/min 500 l/min 525 l/min 25 l/min PF2A551 Data Sensor Flow rate range 0.5 l/min 2 l/min 5 l/min 10 l/min 20 l/min 40 l/min 100 l/min 0.5 l/min 4 l/min PF2W504 PF2W504T 0.35 l/min 4.5 l/min 16 l/min 2 l/min PF2W520 PF2W520T 1.7 l/min 17l/

VFS

02 Pressure center VFS2510-E-01 02 DIN terminal: Double VFS2210-D Y-01 02 Closed center VFS2310-D Y-01 02 Exhaust center VFS2410-D Y-01 02 Pressure center VFS2510-D Y-01 02 EVS VFN With light/surge voltage suppressor Lead wire O.D.

Modular/F.R.L. Units Series AC

A 10 B 14 D 14 Port size M5 x 0.8 1/8 1/4 3/8 1/4 3/8 1/2 1/4 3/8 1/2 3/4 Model Note 1) E100-M5 E200-01 E200-02 E200-03 E300-02 E300-03 E300-04 E400-02 E400-03 E400-04 E400-06 30 23.5 28 B Center of F.R.L. body D A 32 30 30 32 36 36 E500-06 3/4 32 40 44 Piping adapter AC50, AC55, AC60, AC50A AC60A, AC50B, AC55B AC60B, AF50, AF60, AR50 AR60, AL50, AL60, AW60 E600-06 3/4 48 53 35 E600-10 1

Modular F.R.L. Unit

06 IS1000E-30 IS1000E-30 02 03 04 IS1000E-20 01 02 03 Note 6) Pressure switch with piping adapter 02 03 04 IS1000E-40 Note 6) Y24-01 02 Y34-01 02 Y34-01 02 Y44-02 03 Y54-03 04 Y14-M5 Cross interface Note 1) in part numbers for a round pressure gauge indicates a type of connection thread.

CG5-S

d Material: SUS440 (pin) SUS304 (snap ring) D C d Dd9 H1 B1 t m t l m L (mm) Part no.

/

Conduit terminal U 100.5 E J D I M A C H L B F K N.C.

CG5-S

d Material: SUS440 (pin) SUS304 (snap ring) D C d Dd9 H1 B1 t m t l m L (mm) Part no.

KR

(mm) Note) Weight (g) D Applicable tubing KGF04-01 KGF04-02 KGF06-01 KGF06-02 KGF06-03 KGF08-01 KGF08-02 KGF08-03 KGF10-02 KGF10-03 KGF12-02 KGF12-03 1 8 4 15 23 11 16 14 11 13 15 17 13.1 10.4 14 27 31 27.5 31 33.5 29 32.5 33.5 34.5 36.5 35 37 41 4 5.6 10 Connection thread 1 4 17 14 17 19 14 17 19 17 19 17 1 8 15 22 25 17 24 24 27 30 36 31 1 4 12 6 3 8 1 8 1 4 3 8 1 4 3 8 1 4 3 8 11 13 14

A

NVHS2000 1/8, 1/4 1/8 40 56 36 28 22 25 NVHS3000 1/4, 3/8 1/4 53 74 45 48 28 30 NVHS4000 1/4, 3/8, 1/2 3/8 70 80 48 54 36 30 D I M E N S I O N S S E R I E S (N)VHS 3 P O R T VA LV E H O W T O O R D E R S E R I E S (N)VHS S H U TO F F V A LV E S (N)VHS 00 W I T H L O C K I N G FA C I L I T Y Standard N North American B O D Y S I Z E A N D A P P L I C A B L E FRL S E R I E S 2 2000 3 2500,

A

O A D D A T A P E R M I S S I B L E L A T E R A L L O A D W (N) 1N = 0.102kgf H O W T O O R D E R C O M P A C T G U I D E C Y L I N D E R Stroke (mm) Bore Size Model 10 20 25 30 40 50 75 100 125 150 175 200 12 MGPM 24 19 17 14 13 26 22 MGP 12 MGPL 37 27 22 35 30 23 18 16 MGPM 38 31 27 23 21 37 32 T Y P E O F B E A R I N G P O R T I N G 16 MGPL 54 40 32 54 47 35 28 M Slide Bearing L Ballbush

Secondary Batteries

*Order part numbers for auto switches alone are D-M9BW(V)L-900, D-M9BW(V)SDPC-900, D-Y7BW(V)L-900, D-Y7BW(V)SDPC-900 and D-Z80L-900. *The auto switch is shipped together but not assembled.

SYJ3000/5000/7000

DIN terminal (D): SYJ7140-D01 02 M8 connector (WO): SYJ7140-WO01 02 L plug connector (L): SYJ7140-L01 02 Applicable cable O.D. 3.5 to 7 Approx. 300 (Lead wire length) 91 104.2 Max. .10 57.5 [64.5] 83.5 72.2 42.1 62 M8 x 1 57.1 44.5 (Lead wire length) Approx. 300 68.6 [75.6] 20 20 20 20 Pg7 95.1 [97.3] 85.3 [87.5] 94.2 86.8 80.3 22 22 22 22 64.3 63 63 63 63 22 22 22 22 31.5 31.5 31.5 31.5

SX

(L): SX5 40(R)-L 02 M plug connector (M): SX5 40(R)-M-02 Manual override (Press and turn for the locking type.)