SX

(L): SX5 40(R)-L 02 M plug connector (M): SX5 40(R)-M-02 Manual override (Press and turn for the locking type.)

Series SV

U D B U side (2 to 10 stations) D side (2 to 10 stations) Both sides (2 to 20 stations) Series SV2000 ... ... 20 For 20 stations Stations 2 stations Symbol 02 Note Note 1) Double wiring specification ... ... ... ...

ZP

If the leakage volume is 30 L/min (ANR), the vacuum pressure of the S type is 20 kPa : l @ l ., and for the L type it is 33 kPa :' l @' l .'. If the leakage volume is 5 L/min (ANR), the vacuum pressure of the S type is 80 kPa ; l = l B, and for the L type it is 47 kPa ;' l =' l B'.

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

P, E port location U D B U side (2 to 10 stations) D side (2 to 10 stations) Both sides (2 to 20 stations) Pilot type Internal pilot External pilot Nil R Valve stations Series 10-SV1000 Series 10-SV2000 P: Flat ribbon cable 26 pins PH: Flat ribbon cable 10 pins P: Flat ribbon cable 26 pins PH: Flat ribbon cable 10 pins 02 02 02 02 2 stations 2 stations 2 stations 2 stations Double wiring

smcmaintenancepartslist

For 20 to 63, remove the lock piston seal. d. For 80 and 100, remove the seal retainer and lock piston seal. q i u r y w y L o t e !

Style: Pressure Switch w/ T-Spacer, Body Size: 20 (AC20), Thread Type: Rc, Port Size: 02 (1/4), Set Pressure Range: 6 (0.1 to 0.6 MPa), Lead Wire Length: 0.5m, Pressure Unit of the Scale Plate: MPa

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

) M5 x 0.8 (SYJ714R: X port) + 58[65] 54.5 42.6 26 20 X 1/4, 1/8 (P, R port) 23 15 48 L plug connector (L): 10-SYJ74M-L01 02 M plug connector (M): 10-SYJ74M-M01 02 DIN terminal (D): 10-SYJ74M-D01 02 M8 connector (WO): 10-SYJ74M-WO01 02 Approx. 300 (Lead wire length) Applicable cable O.D. 3.5 to 7 89.6 MAX.10 58[65] 91.5 84 42.6 62.5 72.7 M8 x 1 45 69.1[76.1] Approx. 300 (Lead wire length)

2/3 Port Valve

Solenoid valve (Port size) D, T G, C S S L, Z S L, Z T 1 (2mm) 2 (3mm) 3 (4.5mm) 4 (6mm) 5 (8mm) 6 (10mm) VX21 VX22 VX23 (1) 01( ) 02( ) 02( ) 03( ) 04( ) 02( ) 03( ) 04( ) 1 8 1 4 1 4 1 4 3 8 1 2 AC 3 8 1 2 Ordering Example (Example) Series VX21, Orifice size 2 mm, Rc(PT)1/8, 100V AC Grommet. With surge voltage suppressor.

Vacuum Pad

If the leakage volume is 30 L/min (ANR), the vacuum pressure of the S type is 20 kPa : l @ l ., and for the L type it is 33 kPa :' l @' l .'. If the leakage volume is 5 L/min (ANR), the vacuum pressure of the S type is 80 kPa ; l = l B, and for the L type it is 47 kPa ;' l =' l B'.

Compact 5-Port Solenoid Valve

Note 02 2 stations Double wiring*1 Symbol Stations Note 02 2 stations Double wiring*1 16 16 stations 02 2 stations Specified layout*2 (Up to 32 solenoids available) 10 10 stations 02 2 stations Specified layout*2 (Up to 20 solenoids available) y SUP/EXH block assembly 24 24 stations 20 20 stations *1 Double wiring: 2-position single, double, 3-position, and 4-position valves can be used

SV

Valve stations Stations 2 stations Symbol 02 Note P, E port location (1) U D B Double wiring specifications U side (2 to 10 stations) D side (2 to 10 stations) Both sides (2 to 20 stations) 16 02 16 stations 2 stations (2) Specified layout (up to 32 solenoids possible.)

VFS

02 Pressure center VFS2510-E-01 02 DIN terminal: Double VFS2210-D Y-01 02 Closed center VFS2310-D Y-01 02 Exhaust center VFS2410-D Y-01 02 Pressure center VFS2510-D Y-01 02 EVS VFN With light/surge voltage suppressor Lead wire O.D.

VFR

L plug connector Closed center: VFR2310-LExhaust center: VFR2410-LPressure center: VFR2510-LM plug connector Closed center: VFR2310-MExhaust center: VFR2410-MPressure center: VFR2510-MDIN terminal Closed center: VFR2310Exhaust center: VFR2410Pressure center: VFR251001 02 01 02 01 02 01 02 01 02 01 02 01 02 D Y 01 02 D Y 01 02 D Y Applicable cable O.D. 6 to 8 [4.5 to 7] Light/Surge voltage

CG5-S

Material: SUS440 (pin) SUS304 (snap ring) D C d Dd9 H1 B1 t m t l m L (mm) Part no.

Table of Contents

of transfer Cylinder stroke Bore size Port 15mm (RSH20) 20mm (RSH32) 20mm 32mm 20 32 15 20 20 32 Z73 D L RSH RS1H 30 50 Z73 D L Bore size Number of auto switches 50mm 63mm 80mm 50 63 80 Thread type Nil S 2 pcs. 1 pc.

VQZ1000/2000/3000

mounting hole 48 (58) 15 15 1.5 1.5 P 3 5 1 2-PE port 2-Rc 1/8 3(R2), 5(R1) port 22.2 die-cast hole (For manifold gasket positioning) Rc 1/4 1(P) port 3 4 5 3 4 5 L plug connector (L): VQZ3 20 1(R)-L-C6/C8/C10/02 DIN terminal (Y): VQZ3 20 1(R)-Y-C6/C8/C10/02 300 157 (Lead wire length) 72 Indicator light 30.5 <35.5> 163.5 MAX.10 75 Applicable cable O.D. 3.5 to 7 Pg.7 Indicator light Cover

ZP

C B G Model A B C D 2 E F G H J K L M Vacuum inlet direction q Pad dia.

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

11.5 18 1/4 (R1, R2 port) 31.5 34 63 L plug connector (L): 10-SYJ7243-L01 02 M plug connector (M): 10-SYJ7243-M01 02 DIN terminal (D, Y): 10-SYJ7243D Y01 02 M8 connector (WO): 10-SYJ7243-WO01 02 Applicable cable O.D. 3.5 to 7 Approx. 300 (Lead wire length) 91 83.5 57.5 [64.5] 72.2 42.1 M8 x 1 62 57.1 (Lead wire length) Approx. 300 44.5 68.6 [75.6] 20 Pg7 20 20 20 127.2 [131.6] 107.6 [112]

Modular F.R.L. Units

L How to Order AC D 30 03 DE B Option/Semi-standard: Select one each for a to j.

SYJ3000/5000/7000

22 11.5 34 18 1/4 (R1, R2 port) 31.5 63 M plug connector (M): SYJ7140-M01 02 DIN terminal (D): SYJ7140-D01 02 M8 connector (WO): SYJ7140-WO01 02 L plug connector (L): SYJ7140-L01 02 Applicable cable O.D. 3.5 to 7 Approx. 300 (Lead wire length) 91 104.2 Max. .10 57.5 [64.5] 83.5 72.2 42.1 62 M8 x 1 57.1 44.5 (Lead wire length) Approx. 300 68.6 [75.6] 20 20 20 20 Pg7 95.1 [97.3] 85.3 [87.5