New New Process Gas Diaphragm Valve For wide variety of applications from semiconductor to general. Multiple port available in various configurations Compression, Rc, R, NPT Cleaned for O2 service Air Operated Type Series AK3542/4542  Compact and light

Methyl Chloride SF6 CH3Cl Disilane Methyl Fluoride Si2H6 CH3F Silicon Tetrachloride Methanol SiCl4 CH3OH Silicon Tetrafluoride Methylsilane SiF4 CH3SiH3 Dichlorosilane Halocarbon 21 SiH2Cl2 CHCl2F Silane Chlorine SiH4 Cl2 Trichlorosilane Chlorine Trifluoride SiHCl3 ClF3 Sulfur Dioxide Carbon Monoxide SO2 CO Diethyltelluride Germane Te(C2H5)2 GeH4 Tungsten Hexafluoride Hydrogen Sulfide WF6 H2S

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ZR1--CN . 1 pc.

LEC-OM02704CN

AC200230VL1L2L3 AC100120VL31.2 3. 2131 1 3 1 1.1.3 CC-Link142 0.001[mm] 0.01[mm] 0.1[mm] 1[mm] 9 0 [r/min] 020 [ms] 020 [ms] DWELL 020 [ms] 03 (4.2) 1312255 (1) CC-Link (a) CC-Link (b) CC-Link 1 2 CN 1 CN 1 CN6 CN6 CN P 3 CN P 3 CN2 CN2 1 4 1 (2) CC-Link (a) PD06PD08PD12PD14CN6 CC-Link CC-LinkCN6 (b) CC-Link CC-Link ( 1 ) ( 2 ) CN 1 CN 1 CN6 CN6 CN P 3 CN P 3 CN2

Vacuum System Peripherals:

Switch lead wire length ZSE1 Switch lead wire length Nil Lead wire length 0.6 m L Grommet type Lead wire length 3 m Lead wire length 0.6 m C Electronic: ZSE1 Connector type Lead wire length 3 m Without connector CL CN ZSM1 Nil Lead wire length 0.6 m L Grommet type Lead wire length 3 m Diaphragm: ZSM1 The following columns shall be filled in by SMC.

ZX

Grommet (3 m) C Connector (0.6 m) CL Connector (3 m) CN Without connector Combination of supply valve and release valve Unit for replacement Pilot valve Voltage Manual operation Refer to page 13-2-54 for details.

IDX-OM-W035

CN MC V V CN CN PRS PRS IDFB37E IDFB55E/75E-46 CM GFCI R FM FM16 MC THR MC1 MC1 MC2 CM PE PRS MC2 PRS1 FM PE PRS2 PRR PRR ILS C01 THR W1 TB T TB1 W2 TB2 MC1 PRR C01 CM C1 MC2 PRS1 GFCI P PRS2 THR OLR P EDV PC EDV PE T V IDFB Series 6-4 6-3 IDX-OM-W035 6 6-5 (IDFB55E,75E) (IDFB22E,37E) ,, IDFB Series 6-5 6-4 IDX-OM-W035 7 K 7 K 7-1 ( ) 7-2 240psi (1.6MPa

1

New Products Guide 1 Directional Control Valves Actuators Vacuum Equipment CAT.E00-6A INDEX New Products Guide 1 Directional Control Valves 5 Port Solenoid Valve Fieldbus System (For Input/Output) 2/3 Port Mechanical Valve Series SY3000/5000/7000 Series EX600 Series VM100/200 P .6 P .264 P .322 Actuators Foot Pedal Type 5 Port Mechanical Valve XT34-60/67 Air Cylinder Air Cylinder Series CJ2

CATALOG

32 4.05 20 O 0.55 1.30 1/8 NPT 1.47 40 3.41 12.01~45 40 4.37 20 O 0.59 1.60 1/4 NPT 1.82 50 4.00 12.01~55 50 5.27 20 O 0.59 1.87 1/4 NPT 1.82 63 4.00 12.01~55 63 5.27 Note: Long Stroke design is a three piece construction: Rod Cover, Head Cover and Tube Body D I M E N S I O N S S I N G L E C L E V I S T Y P E NC(D)GCN_-_ A N D NC(D)GCA_-_ BORE S I N G L E C L E V I S ( I N C H) CE CH CM CN

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Dimensions (RS-232C without optional unit) Driver 5 100 40 1-5 hole 5 5 5 120 130 5 5 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Driver input/output signal list (CN-1/F connector) Driver dimensions Pin no. Pin no.

Dedicated Controller

Dimensions (RS-232C without optional unit) Driver 5 100 40 1-5 hole 5 5 5 120 130 5 5 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Driver input/output signal list (CN-1/F connector) Driver dimensions Pin no. Pin no.

Electric Actuator with Integrated Guide

Dimensions (RS-232C without optional unit) Driver 5 100 40 1-5 hole 5 5 5 120 130 5 5 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Driver input/output signal list (CN-1/F connector) Driver dimensions Pin no. Pin no.

IDX-OM-W093

GFCI EDV PE TDR BK WH GR SY BU IDF80/90-20-T BR B A A B YE AC 200/200,220V 50/60Hz OR G/Y / IDF60/70/80/90 Series 12-4 IDX-OM-W093 T IDF60/70-30-T SIGNAL CM OLR FM MC MC2 PRS PRS2 ILS THR C11 TB CN GFCI EDV PE TDR APR IDF80/90-30-T SIGNAL CM FM MC MC2 PRS PRS2 ILS THR C11 TB CN GFCI EDV PE TDR APR IDF60/70/80/90 Series 12-5 IDX-OM-W093

ZR

ZR1--CN . 1 pc.

SMC Pneumatic Clean Series

Cn is rounded down to the nearest whole number, using no more than three significant figures.

SMC Pneumatic Clean Series

Cn is rounded down to the nearest whole number, using no more than three significant figures.

SMC Pneumatic Clean Series

Cn is rounded down to the nearest whole number, using no more than three significant figures.

SMC

Cn is rounded down to the nearest whole number, using no more than three significant figures.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

P411020-5 P411030-5 P411040-5 P411050-5 Model CRB1LW50 CRB1LW63 CRB1LW80 CRB1LW100 Connector/Without lead wire CN Connectors are available only for auto switch types R73, R80, T79. Lead wire with connector part nos.

CRB2/CRBU2/CRB1

P411020-5 P411030-5 P411040-5 P411050-5 Model CRB1LW 50 CRB1LW 63 CRB1LW 80 CRB1LW100 Connector, Without lead wire CN Notes) Connectors are available only for auto switch types D-R73, D-R80, D-T79.

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P411020-5 P411030-5 P411040-5 P411050-5 Model CRB1LW50 CRB1LW63 CRB1LW80 CRB1LW100 Connector/Without lead wire CN Connectors are available only for auto switch types R73, R80, T79. Lead wire with connector part nos.