Cooling Capacity: 30 kW, Type: Clean/DI Water, Pump Inverter Control: None, Option: N+Y

Cooling Capacity: 30 kW, Type: Clean/DI Water, Pump Inverter Control: None, Option: Y+Z

Cooling Capacity: 30 kW, Type: Clean/DI Water, Pump Inverter Control: None, Option: NPT Fitting

Cooling Capacity: 30 kW, Type: Clean/DI Water, Pump Inverter Control: None, Option: Circulating Fluid Automatic Recovery

Cooling Capacity: 30 kW, Type: Clean/DI Water, Pump Inverter Control: None, Option: DI Control Kit

Cooling Capacity: 30 kW, Type: Clean/DI Water, Pump Inverter Control: None, Option: C+D+N+W

Cooling Capacity: 030 (30 kW), Type: 2 (Clean/DI Water), Pump Inverter Control: None, Option: NW (N+W)

Cooling Capacity: 008 (8 kW), Type: 2 (Clean/DI Water), Pump Inverter Control: None, Option: CN (C+N)

Cooling Capacity: 015 (15 kW), Type: 2 (Clean/DI Water), Pump Inverter Control: None, Option: CN (C+N)

Cooling Capacity: 002 (2 kW), Type: 2 (Clean/DI Water), Pump Inverter Control: None, Option: CN (C+N)

Cooling Capacity: 8 kW, Type: Clean/DI Water, Pump Inverter Control: None, Option: C+N

Cooling Capacity: 15 kW, Type: Clean/DI Water, Pump Inverter Control: None, Option: C+N

Cooling Capacity: 2 kW, Type: Clean/DI Water, Pump Inverter Control: None, Option: C+N

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ZR1--CN . 1 pc.

LEC-OM02704CN

AC200230VL1L2L3 AC100120VL31.2 3. 2131 1 3 1 1.1.3 CC-Link142 0.001[mm] 0.01[mm] 0.1[mm] 1[mm] 9 0 [r/min] 020 [ms] 020 [ms] DWELL 020 [ms] 03 (4.2) 1312255 (1) CC-Link (a) CC-Link (b) CC-Link 1 2 CN 1 CN 1 CN6 CN6 CN P 3 CN P 3 CN2 CN2 1 4 1 (2) CC-Link (a) PD06PD08PD12PD14CN6 CC-Link CC-LinkCN6 (b) CC-Link CC-Link ( 1 ) ( 2 ) CN 1 CN 1 CN6 CN6 CN P 3 CN P 3 CN2

Vacuum System Peripherals:

Switch lead wire length ZSE1 Switch lead wire length Nil Lead wire length 0.6 m L Grommet type Lead wire length 3 m Lead wire length 0.6 m C Electronic: ZSE1 Connector type Lead wire length 3 m Without connector CL CN ZSM1 Nil Lead wire length 0.6 m L Grommet type Lead wire length 3 m Diaphragm: ZSM1 The following columns shall be filled in by SMC.

ZX

Grommet (3 m) C Connector (0.6 m) CL Connector (3 m) CN Without connector Combination of supply valve and release valve Unit for replacement Pilot valve Voltage Manual operation Refer to page 13-2-54 for details.

44

10 14 15.8 18.7 5.8 6.6 KK130 H2 H2 M L 15 17 22.2 7.6 DM d 16 17 24.3 8.5 KDM 21 22 28 9.3 KB Swivel Elbow: KFG2V KR Applicable tubing size (mm) O.D.

Table of Contents

Straight Union: KFH H2 (width across flats) H1 (width across flats) Applicable tubing (mm) I.D.

Fluoropolymer Piping Equipment

Note 2) For details of the applicable tubing sizes, refer to page 945. 901 LQ1 Series Dimensions Space saving union tee reducing: LQ1T-S-R B side M2 B side M2 H2 2 x B M1 M1 H1 (E2) 2 x B H2 (L2) L2 M1 M3 M3 F F A side C side A side C side 1/4 1/4 1/4 (E1) (E3) G (E3) H1 H3 H3 G H1 L1 L3 L3 (L1) Class 2 to 5 Type T1 Type T2 Class 2 to 5 M2 B side B side M2 H2 (E2) H1 M1 2 x B 2 x B H2 (L2