Table of Contents

24 21 22 41 14 32 16 12.5 50 8 10 56.2 7 26.5 51 1/4 181 247 Axial foot style: RECL G H Width across flats B2 F G K A NA 2-RcP F AL Standard port 2-NN Pluged (M5 x 0.8) H1 H2 Width across flats B1 I D C B 4-LD LH MM 2-4 3.2 N N X X Y S + Stroke Y LX Z LS + Stroke LZ ZZ + Stroke (mm) A AL B B1 B2 C D F G H H1 H2 I K LD LH LS LX LZ MM N NA Bore (mm) Stroke range 20 M8 x 1.25 Up to 700 18 15.5

Standard Combinations

Note 4) Separate spacers are required for modular unit. 7 Series ACG20A/30A/40A Dimensions ACG20A N A E G P L C B C H2 H1 OUT IN SMC 2-L J OUT B M 2-K Port size O S O S Min. clearance for maintenance Drain D D Filter regulator Lubricator ACG30A/40A N A E P G L H2 H1 OUT IN SMC OUT L M K Port size Min. clearance for maintenance Drain Filter regulator Lubricator Metal bowl with level gauge

2

/A: Brass, N: Brass + Electroless nickel plated Bulkhead Connector: KQ2E H1 (Width across flats) H2 (Width across flats) L1 L2 Mounting hole M Effective area (mm2) Min. port size Applicable tubing O.D.

Smooth Cylinder/Low Speed Cylinder

(n=2, 3, 4, 5) (n-2) 2 35 + 35 (n-2) 20 + 35 (n=2, 4, 6) Note 3) D-M9V 5 35 20 (n=2, 3, 4, 5) (n-2) 2 25 + 35 (n-2) 15 + 35 (n=2, 4, 6) Note 3) D-A9V 5 25 15 (n=2, 3, 4, 5) (n-2) 2 D-M9WV D-M9AV 35 + 35 (n-2) 20 + 35 (n=2, 4, 6) Note 3) 10 35 20 (n=2, 3, 4, 5) (n-2) 2 50 + 45 (n-2) D-C7 D-C80 15 + 45 (n=2, 4, 6) Note 3) 10 50 15 (n=2, 3, 4, 5) D-H7 D-H7W D-H7NF (n-2) 2 60 + 45 (n-2) 15 +

Compact Hydraulic Cylinder

+ 55 140 + 55 n (n = 2, 4, 6, 8) (n = 4, 8, 12, 16) (n = 4, 8, 12, 16) (n = 4, 8, 12, 16) (n = 4, 8, 12, 16) (n = 4, 8, 12, 16) 130 160 2 (Different surfaces), 1 15 125 140 150 (n 2) 2 (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2 D-F5NTL 15 + 55 130 + 55 160 + 55 125 + 55 140 + 55 150 + 55 n (n = 2, 4, 6, 8) (n = 4, 8, 12, 16) (n = 4, 8, 12, 16) (n = 4, 8, 12, 16) (n = 4, 8, 12, 16) (n

Proposals for Energy Saving

Hysteresis mode OFF n-1 n-2 Pressure [n] H (fixed hysteresis) = 2 digits (ZSE5B) or 3 digits (ISE5B) H H ON Window comparator mode NO OFF n-1 n-2 Pressure 122 &RXUWHV\RI6WHYHQ(QJLQHHULQJ,QF5\DQ:D\6RXWK6DQ)UDQFLVFR&$ *HQHUDO Digital Pressure Switch With Backlight Series ZSE5B/ISE5B Pressure Setting Setting procedure 1. Setting Value Input Mode 2. OUT1 Setting Value (1) Input 3.

44

alcohol Propylene glycol MQR Bromochloroethane T n-Hexane IDK n-Hexyl alcohol Note 1) [ ] denotes the concentration.

Made to Order

2 pcs. 1 pc. n pcs.

XL

XLGV/With solenoid valve Q Port R (exhaust port) N N With double solenoid P K M L (mm) L 6.5 6.5 6.5 11 11 11 K 9 9 9 11 11 11 N 14 Model K L M N P Q M 17 15 2 6 Q 16.5 16.5 17.5 28 29 29 P Model XLGV-16 XLGV-25 XLGV-40 XLGV-50 XLGV-63 XLGV-80 3 3 3 6.5 6.5 6.5 16 With single solenoid Port P (pressure port) 29 26 32 45 Other dimensions are the same as XLG. 19 Series XLD, XLDV Smooth Exhaust

Table of Contents

(N specifications) Maximum operating pressure 1 MPa max.

Electric Rotary Table

LEY Series LEYG Series LEYG Size Stroke (mm) Pushing force (N) Size Stroke (mm) Pushing force (N) Size Stroke (mm) Pushing force (N) Size Stroke (mm) Pushing force (N) 25 32 Up to 400 Up to 500 485 588 25 32 63 25 32 485 588 300 25 32 485 736 485 736 1910 Up to 400 Up to 500 Up to 800 300 Features 10 SMC Electric Actuators Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Slide Table Compact

High Vacuum Angle Valve, XL Series

XLGV/With solenoid valve Q Port R (exhaust port) N N With double solenoid P K M L (mm) L 6.5 6.5 6.5 11 11 11 K 9 9 9 11 11 11 N 14 Model K L M N P Q M 17 15 2 6 Q 16.5 16.5 17.5 28 29 29 P Model XLGV-16 XLGV-25 XLGV-40 XLGV-50 XLGV-63 XLGV-80 3 3 3 6.5 6.5 6.5 16 With single solenoid Port P (pressure port) 29 26 32 45 Other dimensions are the same as XLG. 19 Series XLD, XLDV Smooth Exhaust

CM2

No. of auto switches mounted 2 Different sides C85 Auto switch model Same side n Different sides 1 Same side C95 D-C7 D-C80 D-H7 D-H7W D-H7BAL D-H7NF D-C73C D-C80C D-H7C 10 50 15 50 + 45 (n 2) n 2 2 15 + 45 ( ) (n = 2, 4, 6) CP95 10 60 15 60 + 45 (n 2) NCM NCA n 2 2 15 + 50 ( ) (n = 2, 4, 6) 10 65 15 65 + 50 (n 2) Dn 2 2 D-B5/B6 D-G5NTL 15 + 50 ( ) (n = 2, 4, 6) 75 10 15 -X 75 + 55

CV/MVGQ

, 8, 12, 16 90 + 55 (n 4) 2 15 + 55 (n 2) 2 n = 4, 8, 12, 16 100 + 55 (n 4) 2 n = 4, 8, 12, 16 110 + 55 (n 4) 2 120 + 55 (n 4) 2 n = 4, 8, 12, 16 n (Same side) n = 2, 4, 6, 8 2 (Different sides, Same side) 90 100 110 120 20 n = 2, 4, 6, 8 n = 4, 8, 12, 16 90 + 55 (n 4) 2 20 + 55 (n 2) 2 n = 4, 8, 12, 16 100 + 55 (n 4) 2 n = 4, 8, 12, 16 110 + 55 (n 4) 2 120 + 55 (n 4) 2 n = 4, 8

CV/MVGQ

n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2 105 + 40 95 + 40 n = 4, 8, 12, 16 90 + 40 n = 4, 8, 12, 16 85 + 40 n = 4, 8, 12, 16 80 + 40 n = 4, 8, 12, 16 n -X n = 4, 8, 12, 16 2 (Different sides, Same side), 1 75 80 90 10 65 20D-Y69/Y7PV D-Y7WV (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2 (n 2) 2 n 90 + 30 80 + 30 n = 4, 8, 12, 16 75 + 30 n = 4, 8, 12, 16 65 + 30 n = 4, 8, 12, 16 15 + 30 n = 2, 4, 6, 8 n =

REC

24 21 22 41 14 32 16 12.5 50 8 10 56.2 7 26.5 51 1/4 181 247 Axial foot style: RECL G H Width across flats B2 F G K A NA 2-RcP F AL Standard port 2-NN Pluged (M5 x 0.8) H1 H2 Width across flats B1 I D C B 4-LD LH MM 2-4 3.2 N N X X Y S + Stroke Y LX Z LS + Stroke LZ ZZ + Stroke (mm) A AL B B1 B2 C D F G H H1 H2 I K LD LH LS LX LZ MM N NA Bore (mm) Stroke range 20 M8 x 1.25 Up to 700 18 15.5

Prevents Micro-Bubbles

Dimensions LLHAStations 4-Mounting hole for W Y K A D L2 L1 N Non-locking type Locking type L3 G 60 (H1) (H2) C SMC SMC SMC SMC V 1/4 1/4 1/4 E 3/8 U 2-P port Pitch = B n-A port (mm) Dimensions (mm) B C D E G H1 H2 K N U V W Y A Station Model LLH2A LLH3A LLH4A 2 3 4 5 Model 46.5 31 65 67 19 10 85.5 87 18 27 19 34 M4 5.5 Symbol L1 L2 L3 L1 L2 L3 L1 L2 L3 47 36.5 94.5 76 27.5 19 125.5 127.5

High Purity Chemical Valve

E F G H1 H2 J K L M N Model LVH20m LVH30m LVH40m 30 30 52 44 11 79 10 72.5 74 4 20 37 3.5 27 36 47 81.5 56 16.5 106 19 111 113 7.5 34 46 5.5 37.5 46 60 100 68 22.5 131 20.5 139 143 8 42 57 5.5 50 483 Series LVH Dimensions/Threaded Type N Body material: PPS Body material: Stainless steel N G A G A D L Non-locking type Locking type 60 K 4 x M Non-locking type Locking type (H1) (H2) C 60 A B

REC

Screw-in Piping M5 X 0.8 Relieving port size 50 to 500mm/s Piston speed Mounting Basic, Axial foot, Front flange, Rear flange *Auto switch attachable Dimensions REC B/Basic H2 2-Rc(PT)P Width across flats B2 2-NN G G H1 Width across flats B1 Relieving port M5 X 0.8 Standard port I Relieving port 2-Eh8 D MM AL K A N N F lNA S+Stroke H F ZZ+Stroke (mm) A AL B1 B2 D E F G H H1 H2 I K MM N NA

5

(n 2) 2 (n = 2, 4, 6) Note 3) 50 + 45 (n 2) (n = 2, 3, 4, 5) D-H7 D-H7W D-H7NF 10 15 60 15 + 45(n 2) 2 (n = 2, 4, 6) Note 3) 60 + 45 (n 2) (n = 2, 3, 4, 5) D-C73C D-C80C 5 15 65 15 + 50(n 2) 2 (n = 2, 4, 6) Note 3) 65 + 50 (n 2) (n = 2, 3, 4, 5) D-B5 D-B64 D-G5 D-K59 5 15 75 15 + 50(n 2) 2 (n = 2, 4, 6) Note 3) 75 + 55 (n 2) (n = 2, 3, 4, 5) D-B59W 10 20 75 20 + 50(n 2) 2 (n = 2,