Cooling Capacity: 15 kW, Type: Clean/DI Water, Pump Inverter Control: None, Option: C+D+N+W

Cooling Capacity: 015 (15 kW), Type: 1 (Ethylene Glycol), Pump Inverter Control: None, Option: CN (C+N)

Cooling Capacity: 015 (15 kW), Type: Fluorinated Fluid, Pump Inverter Control: None, Option: CN (C+N)

Cooling Capacity: 15 kW, Type: Ethylene Glycol, Pump Inverter Control: None, Option: C+N

Cooling Capacity: 15 kW, Type: Fluorinated Fluid, Pump Inverter Control: None, Option: C+N

Cooling Capacity: 008 (8 kW), Type: 2 (Clean/DI Water), Pump Inverter Control: None, Option: CN (C+N)

Cooling Capacity: 030 (30 kW), Type: 2 (Clean/DI Water), Pump Inverter Control: None, Option: CN (C+N)

Cooling Capacity: 002 (2 kW), Type: 2 (Clean/DI Water), Pump Inverter Control: None, Option: CN (C+N)

Cooling Capacity: 8 kW, Type: Clean/DI Water, Pump Inverter Control: None, Option: C+N

Cooling Capacity: 30 kW, Type: Clean/DI Water, Pump Inverter Control: None, Option: C+N

Cooling Capacity: 2 kW, Type: Clean/DI Water, Pump Inverter Control: None, Option: C+N

Please contact us for the latest version.sales@ocaire.com, HEAT EXCHANGER FOR HRW015, OTHERS, HRZ- THERMO CHILLER, 21, HRZ NO SIZE RATING

Table of Contents

ZR1--CN . 1 pc.

LEC-OM02704CN

AC200230VL1L2L3 AC100120VL31.2 3. 2131 1 3 1 1.1.3 CC-Link142 0.001[mm] 0.01[mm] 0.1[mm] 1[mm] 9 0 [r/min] 020 [ms] 020 [ms] DWELL 020 [ms] 03 (4.2) 1312255 (1) CC-Link (a) CC-Link (b) CC-Link 1 2 CN 1 CN 1 CN6 CN6 CN P 3 CN P 3 CN2 CN2 1 4 1 (2) CC-Link (a) PD06PD08PD12PD14CN6 CC-Link CC-LinkCN6 (b) CC-Link CC-Link ( 1 ) ( 2 ) CN 1 CN 1 CN6 CN6 CN P 3 CN P 3 CN2

Vacuum System Peripherals:

Switch lead wire length ZSE1 Switch lead wire length Nil Lead wire length 0.6 m L Grommet type Lead wire length 3 m Lead wire length 0.6 m C Electronic: ZSE1 Connector type Lead wire length 3 m Without connector CL CN ZSM1 Nil Lead wire length 0.6 m L Grommet type Lead wire length 3 m Diaphragm: ZSM1 The following columns shall be filled in by SMC.

Vacuum Module Series ZX

K1 A V ZX1 5 Z B D M L 15 C 0X B ZSP1 D L AMJ Applicable nozzle diameter Piping specifications Unit for replacement Nil L Grommet (0.6 m) Grommet (3 m) C Connector (0.6 m) CL Connector (3 m) CN Without connector For ejector system Manifold All ports are equipped with plugs.

ZX

Grommet (3 m) C Connector (0.6 m) CL Connector (3 m) CN Without connector Combination of supply valve and release valve Unit for replacement Pilot valve Voltage Manual operation Refer to page 13-2-54 for details.

Air Cylinder Series CM2

-X Individual -X 1149 Series CM2X Basic Style (B) CM2XB Bore size Stroke G 2 x NN G H2 H1 Width across flats B2 Width across flats B1 2 x P (Rc, NPT, G) 2 x Eh8 NA D Effective thread length 2 x FL S + Stroke F A AL MM Width across flats KA NA N F H K N ZZ + Stroke Boss-cut style ZZ + Stroke (mm) H1 H G AL F A E MM P S ZZ B2 D H2 I FL K KA NA NN B1 N Bore size (mm) 0 0.033 0 0.033 0 0.033

Stainless Steel 316 Fittings

area (mm2) Weight (g) d M L Model H2 H1 O.D.

44

10 14 15.8 18.7 5.8 6.6 KK130 H2 H2 M L 15 17 22.2 7.6 DM d 16 17 24.3 8.5 KDM 21 22 28 9.3 KB Swivel Elbow: KFG2V KR Applicable tubing size (mm) O.D.