Cooling Capacity: 2kW, Temperature Set Range: 20°C to 90°C, Option: C+N

Cooling Capacity: 4kW, Temperature Set Range: 20°C to 90°C, Option: C+N

Cooling Capacity: 8 kW, Type: Ethylene Glycol, Pump Inverter Control: None, Option: C+N

Cooling Capacity: 30 kW, Type: Ethylene Glycol, Pump Inverter Control: None, Option: C+N

Please contact us for the latest version.sales@ocaire.com, HEAT EXCHANGER FOR HRW015, OTHERS, HRZ- THERMO CHILLER, 21, HRZ NO SIZE RATING

Table of Contents

ZR1--CN . 1 pc.

LEC-OM02704CN

AC200230VL1L2L3 AC100120VL31.2 3. 2131 1 3 1 1.1.3 CC-Link142 0.001[mm] 0.01[mm] 0.1[mm] 1[mm] 9 0 [r/min] 020 [ms] 020 [ms] DWELL 020 [ms] 03 (4.2) 1312255 (1) CC-Link (a) CC-Link (b) CC-Link 1 2 CN 1 CN 1 CN6 CN6 CN P 3 CN P 3 CN2 CN2 1 4 1 (2) CC-Link (a) PD06PD08PD12PD14CN6 CC-Link CC-LinkCN6 (b) CC-Link CC-Link ( 1 ) ( 2 ) CN 1 CN 1 CN6 CN6 CN P 3 CN P 3 CN2

Vacuum System Peripherals:

Switch lead wire length ZSE1 Switch lead wire length Nil Lead wire length 0.6 m L Grommet type Lead wire length 3 m Lead wire length 0.6 m C Electronic: ZSE1 Connector type Lead wire length 3 m Without connector CL CN ZSM1 Nil Lead wire length 0.6 m L Grommet type Lead wire length 3 m Diaphragm: ZSM1 The following columns shall be filled in by SMC.

Vacuum Module Series ZX

K1 A V ZX1 5 Z B D M L 15 C 0X B ZSP1 D L AMJ Applicable nozzle diameter Piping specifications Unit for replacement Nil L Grommet (0.6 m) Grommet (3 m) C Connector (0.6 m) CL Connector (3 m) CN Without connector For ejector system Manifold All ports are equipped with plugs.

ZX

Grommet (3 m) C Connector (0.6 m) CL Connector (3 m) CN Without connector Combination of supply valve and release valve Unit for replacement Pilot valve Voltage Manual operation Refer to page 13-2-54 for details.

Large Size Vacuum Module: Series ZR

ZR1--CN . 1 pc. ZS-10-5A-50 . 2 pcs.

IDX-OM-W035

CN MC V V CN CN PRS PRS IDFB37E IDFB55E/75E-46 CM GFCI R FM FM16 MC THR MC1 MC1 MC2 CM PE PRS MC2 PRS1 FM PE PRS2 PRR PRR ILS C01 THR W1 TB T TB1 W2 TB2 MC1 PRR C01 CM C1 MC2 PRS1 GFCI P PRS2 THR OLR P EDV PC EDV PE T V IDFB Series 6-4 6-3 IDX-OM-W035 6 6-5 (IDFB55E,75E) (IDFB22E,37E) ,, IDFB Series 6-5 6-4 IDX-OM-W035 7 K 7 K 7-1 ( ) 7-2 240psi (1.6MPa

Table of Contents

Dimensions (RS-232C without optional unit) Driver 5 100 40 1-5 hole 5 5 5 120 130 5 5 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Driver input/output signal list (CN-1/F connector) Driver dimensions Pin no. Pin no.

Dedicated Controller

Dimensions (RS-232C without optional unit) Driver 5 100 40 1-5 hole 5 5 5 120 130 5 5 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Driver input/output signal list (CN-1/F connector) Driver dimensions Pin no. Pin no.

Electric Actuator with Integrated Guide

Dimensions (RS-232C without optional unit) Driver 5 100 40 1-5 hole 5 5 5 120 130 5 5 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Driver input/output signal list (CN-1/F connector) Driver dimensions Pin no. Pin no.

ZR

ZR1--CN . 1 pc.

IDX-OM-V022

Series 7.3 Dimensions 7-3 IDX-OM-V022 Chapter 7 Documents 7.4 Electric circuit IDF60/70 200/200,220VAC 1PH 50/60Hz SYMBOL DESCRIPTION CM Refrigerating compressor OLR Overload relay FM Fan motor MC Magnetic contactor PRS High pressure switch PRS2 Pressure switch ILS Switch with lamp THR Thermal relay C01 Capacitor for refrigerating compressor C11 Capacitor for fan motor TB Terminal block CN

IDX-OM-W093

GFCI EDV PE TDR BK WH GR SY BU IDF80/90-20-T BR B A A B YE AC 200/200,220V 50/60Hz OR G/Y / IDF60/70/80/90 Series 12-4 IDX-OM-W093 T IDF60/70-30-T SIGNAL CM OLR FM MC MC2 PRS PRS2 ILS THR C11 TB CN GFCI EDV PE TDR APR IDF80/90-30-T SIGNAL CM FM MC MC2 PRS PRS2 ILS THR C11 TB CN GFCI EDV PE TDR APR IDF60/70/80/90 Series 12-5 IDX-OM-W093

A

32 4.05 20 O 0.55 1.30 1/8 NPT 1.47 40 3.41 12.01~45 40 4.37 20 O 0.59 1.60 1/4 NPT 1.82 50 4.00 12.01~55 50 5.27 20 O 0.59 1.87 1/4 NPT 1.82 63 4.00 12.01~55 63 5.27 Note: Long Stroke design is a three piece construction: Rod Cover, Head Cover and Tube Body D I M E N S I O N S S I N G L E C L E V I S T Y P E NC(D)GCN_-_ A N D NC(D)GCA_-_ BORE S I N G L E C L E V I S ( I N C H) CE CH CM CN

Electric Actuators

5 5 120 130 5 5 Driver input/output signal list (CN-1/F connector) Driver dimensions For LJ1, LG1, LX Pin no.