K V 1 10 XLA S P1P2 XL XL Conductances combined When each of the separate conductances are given as C1, C2 and Cn, the composite conductance C is expressed as: C=1/(1/C1+1/C2++1/Cn) when in series, and C=C1+C2++Cn, when in parallel.
Valve Body (for Swagelok) Body (for VCR) Spacer (optional) P 33 Series XSA High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm Electrical entry Grommet (G) Electrical entry Conduit (C) F G 27010 F G D 29010 H C G(PF)1/2 DIN terminal (D) F G J C H 29.5 39 H C OUT IN A P G(PF)1/2 6 to 9 22 E B (body dimension) P (fitting size) 2-M5 Thread depth M A Terminal (T) F G2 (Bs) J (XSA S) 25 33 H K
Valve Body (for Swagelok) Body (for VCR) Spacer (optional) P 33 Series XSA High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm Electrical entry Grommet (G) Electrical entry Conduit (C) F G 27010 F G D 29010 H C G(PF)1/2 DIN terminal (D) F G J C H 29.5 39 H C OUT IN A P G(PF)1/2 6 to 9 22 E B (body dimension) P (fitting size) 2-M5 Thread depth M A Terminal (T) F G2 (Bs) J (XSA S) 25 33 H K
Vacuum L = Effective area H = Fixed hysteresis (3digits) H H L P2(n2) P2(n2) H H L P1(n1) P1(n1) 0 0 Time ON 0 0 Normal mode Time ON Output OFF Normal mode Output Time OFF ON Reversed mode Time Output ON Reversed mode OFF Output Time OFF Time Peak display mode 7 PZ/ISE3, Z/ISE4, 4B, 4E, Z/ISE5B, 6B PPSE100 High High Peak mode high High High Peak mode high High Pressure Vacuum Pressure Vacuum
Conductances combined When each of the separate conductances are given as C1, C2 and Cn, the composite conductance C is expressed as: C=1/(1/C1+1/C2+...1/Cn) when in series, and C=C1+C2+...Cn, when in parallel.
When 00 01 11 70 h is input to the register, please do as following.
Cn = Const. : Time it takes for ozone to generate cracks (h) C: Ozone concentration (ppm) n: Constant that varies depending on the rubber material Take the logarithm and rearrange the above equation as follows: log = K n logC K: Constant YU.S Zuev and S.I.
Start flag 0: no send Numerical data input 2 1: send 1 Step data No 0 to 63 Data writting 3 Operation Note) 1 1: Absolute 2: Relative 4 H 5 L Speed 2 0 to 65500 mm/s 6 3 7 2 Position 4 +/-2147483647 0.01mm 8 1 9 0 ID1 Numerical 10 H 11 L Acceleration 2 0 to 65500 mm/s2 data input 12 H 13 L Deceleration 2 0 to 65500 mm/s2 Data writting 14 Pushing force 1 0 to 30 10% 15 Trigger LV 1 0 to 30
Start flag 0: no send Numerical data input 16 1: send 1 Step data No 0 to 63 Data writting 17 Operation Note) 1 1: Absolute 2: Relative 18 H 19 L Speed 2 0 to 65500 mm/s 20 3 21 2 Position 4 +/-2147483647 0.01mm 22 1 23 0 24 H ID1 Numerical 25 L Acceleration 2 0 to 65500 mm/s2 data input 26 H 27 L Deceleration 2 0 to 65500 mm/s2 Data writting 28 Pushing force 1 0 to 30 10% 29 Threshold 1
HUB CN Cables, PLC and power supply are prepared by 5. 3 CN1: CONT connector Connect the gateway unit and the controller (LEC) to communication cable (LEC-CG-). Gateway Controller input power supply 24 VDC unit CN Terminating Resistor (120 1/4W) CN4 CN4 CN4 Controller (LEC) Controller (LEC) Controller (LEC) 21 - * Refer to section 7.
Output specifications (Vacuum switch) NPN open collector, single output Analog, no output, 3 turn setting 14 Electrical entry 24, 12, 6, 5, 3 VDC/100, 110, 200, 220 VAC NPN open collector, single output Analog, no output, 200 degree setting 15 G H L LN LO M MN MO Lead wire length 300 mm Lead wire length 600 mm With lead wires (Length 300 mm) Without lead wires Without connector With lead
. + vacuum ejector) Series ZYX3000 Series ZYY3000 Ejector Valve Unit Series ZYY/ZYX How to Order Ejector Valves for ZYY3000 Connector box type LOU Lead wire/Voltage suppressor specification L Z 5 LOU 10 Y3 ZY S 15 Wiring specifications (Vacuum switch) Lead wire length 0.6m Lead wire length 3m Lead wire length 0.6m Lead wire length 3m Connector type Nil L C CL CN Grommet type Series Y3 SY3000
ZYY3000 (Solenoid valve: SY3000) HEP Related Equipment 1081 Ejector Valve Unit Series ZYY/ZYX How to Order Ejector Valves for ZYY3000 Lead wire/ Voltage suppressor specifications Connector box type LOU L Z 5 LOU 10 Y3 ZY S 15 Series Y3 SY3000 Rated voltage DC specifications 5 6 V S R 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC Wiring specifications (Vacuum switch) Lead wire length 0.6 m Nil L C CL CN
Operating port 2 x M3 x 0.5 Z ZZ H G 3 +0.03 0 depth 2.5 GA A 15 3.3 3.5 A 5.8 D4 x M4 x 0.7 3 +0.05 0 depth 2.5 3 3.5 A-A -X Model G GA H I J K M Z ZZ Individual -X MXJ6-5 MXJ6-10 MXJ6-15 11 17 17 5 17 27.5 42.5 37 43 11 17 17 5 17 27.5 42.5 37 43 13 22 20 7 20 31.5 47.5 42 48 179 Series MXJ Dimensions With stroke adjuster With adjuster on both ends MXJ6-CN With adjuster on extension end
T h e s o l e n o i d d o e s n o t o p e r a t e d i r e c t l y u p o n t h e s p o o l o r p o p p e t w i t h i n t h e v a l v e . W h a t t h e solenoid does is open a very small pilot valve. This controls the passage of air bled from the P o r p r e s s u r e p o r t o f t h e v a l v e .
Bore size MM H GA GB Width across flats B1 2-Rc P 2-TC TD D E 0 0.05 0 0.05 I E AL TE 2-TC K F TA DL2 TF TG A F S + Stroke H NA ZZ + Stroke TA cross section Manual release (Non-lock type): Suffix N Manual release (Lock type): Suffix L HN HR MO RF WL WL KA 0.1 C 8-J NA Stroke range Bore size (mm) A AL B1 C D DL2 E F GA GB H H1 HR HN (Max.)
: A6 Symbol: A7 WA C C0.5 file chamfer AL B RD B AL MM AL MM MM DC 30 30 H 30 30 L W H W1 T H H H Symbol: A10 Symbol: A11 Symbol: A12 Symbol: A13 Symbol: A14 DA DA C0.5 R sphere AL MM 30 30 DA C R sphere TP R sphere A A H C H T W1 H H H Symbol: A15 Symbol: A16 Symbol: A17 Symbol: A18 Symbol: A19 DA AL MM 30 DA MM 30 MM 30 MM 30 C 30 A H H A H A A C H A H Symbol: A20 Symbol: A21 Symbol:
B1 B2 B3 CN d1 d2 d3 E FL H (Max.) L1 l1 (Min.) l2 R SR (Max.)
E B1 B2 B3 L1 TG1 T l1 (Min.) l2 FL H (Max.) d1 d2 d3 CN SR (Max.)
E B1 B2 B3 L1 TG1 T l1 (Min.) l2 FL H (Max.) d1 d2 d3 CN SR (Max.)