The HRW series thermo-chiller is a high-performance device for circulating a fluid at a constant temperature (Water-cooled type).  Energy saving is substantially increased by exchanging cooling water and heat directly.  The HRW can achieve reduction in power consumption as it does not have a compressor, and reduction in the amount of facility water used because heat is exchanged directly

Table of Contents

/Y/YZ VFS3320-D/DZ/Y/YZ VFS3420-D/DZ/Y/YZ VFS3520-D/DZ/Y/YZ Lead wire O.D.

Process Valve Series VNA

For DZ, the length is longer by 17 mm.

VFS

/Y/YZ VFS3320-D/DZ/Y/YZ VFS3420-D/DZ/Y/YZ VFS3520-D/DZ/Y/YZ Lead wire O.D.

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

VFS2320-D/DZ/Y/YZ VFS2420-D/DZ/Y/YZ VFS2520-D/DZ/Y/YZ Lead wire O.D.

Table of Contents

For DZ, the length is longer by 17 mm.

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

closed center: VFR331 -E, VFR341 -DZ 3 position exhaust center: VFR341 -E, VFR341 -DZ 3 position pressure center: VFR351 -E, VFR351 -DZ 0 1 0 1 0 1 2 x 5.6 2 x 5.6 5 5 69 69 (Mounting hole) (Mounting hole) 41 50 37 52.5 37 52.5 180 170 Other dimensions are the same as the single type.

VFR

VFR331 -DZ 3 position exhaust center: VFR341 -E, VFR341 -DZ 3 position pressure center: VFR351 -E, VFR351 -DZ 2-5.6 (Mounting hole) 2-5.6 (Mounting hole) Other dimensions are the same as the single type.

Process Valve

For DZ, the length is longer by 17 mm.

V100

DC EZ, TZ, DZ, YZ (100 VDC or more) EZ, TZ, DZ, YZ (100 VDC or more) Z EZ, TZ, DZ, YZ (24 VDC or less) Note) W/ surge voltage suppressor is available only for grommet type. 4-8-3 4 Series VP300/500/700 Precautions Be sure to read before handling. For Safety Instructions and Solenoid Valve Precautions, refer to page 4-18-2. Caution Change of Actuation Caution How to Use DIN Terminal 1.

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

Symbol Thread type R Rc N NPT F G DIN terminal with light (With surge voltage suppressor) V V V All voltages DZ DIN terminal without connector (With surge voltage suppressor) V V V All voltages o Option u Rated voltage AC DN DC Symbol Option Nil None Symbol Rated voltage 5 24 VDC 6 12 VDC Symbol Rated voltage Symbol Rated voltage 1 100 VAC 7 240 VAC 2 200 VAC 8 48 VAC 3 120 (110) VAC B 24

Process Valve

For DZ, the length is longer by 17 mm.

Coolant Valve

DZ 618 Coolant Valve: Air Operated/External Pilot Solenoid VNC Series Model Port size Flow rate characteristics Weight (kg) Air operated External pilot solenoid Orifice dia.

2/3 Port Valve

Teflon is a registered trademark of DuPont. 4.2-15 VNB 10A, 15A, 20A, 25A Port size Standard EZ, TZ and DZ are 9 mm longer.

The HRW series thermo-chiller is a high-performance device for circulating a fluid at a constant temperature (Water-cooled type).  Energy saving is substantially increased by exchanging cooling water and heat directly.  The HRW can achieve reduction in power consumption as it does not have a compressor, and reduction in the amount of facility water used because heat is exchanged directly

The HRW series thermo-chiller is a high-performance device for circulating a fluid at a constant temperature (Water-cooled type).  Energy saving is substantially increased by exchanging cooling water and heat directly.  The HRW can achieve reduction in power consumption as it does not have a compressor, and reduction in the amount of facility water used because heat is exchanged directly

The HRW series thermo-chiller is a high-performance device for circulating a fluid at a constant temperature (Water-cooled type).  Energy saving is substantially increased by exchanging cooling water and heat directly.  The HRW can achieve reduction in power consumption as it does not have a compressor, and reduction in the amount of facility water used because heat is exchanged directly

The HRW series thermo-chiller is a high-performance device for circulating a fluid at a constant temperature (Water-cooled type).  Energy saving is substantially increased by exchanging cooling water and heat directly.  The HRW can achieve reduction in power consumption as it does not have a compressor, and reduction in the amount of facility water used because heat is exchanged directly

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

For Grommet B port (CYL. 1 port) A port (CYL. 2 port) EZ, TZ, DZ, LZ, MZ (24 VDC or less) Plug Note) W/surge voltage suppressor is available only for grommet type. Type of actuation N.C. N.O.

NCQ2/CQ2

CQ2 D CQ2 DZ CQ2 D CQ2 DZ CQ2 D CQ2 DZ CQ2 DZ CQ2 DZ CQ2 DZ CQ2 DZ CQ2 DZ CQ2 DZ CQ-L012 CQ-LZ12 CQ-L016 CQ-LZ16 CQ-L020 CQ-LZ20 CQ-L025 CQ-LZ25 CQ-L032 CQ-L040 CQ-L050 CQ-L063 CQ-L080 CQ-L100 Without switch 12 CQ-F012 CQ-D012 With switch Without switch 16 CQ-F016 CQ-D016 With switch Without switch 20 CQ-F020 CQ-D020 With switch Without switch 25 CQ-F025 CQ-D025 With switch 32 40 50 63 80