Proposals for Energy Saving

G, C T S Note) S L, Z L, Z S (Other) 1 (100V) 2 (200V) 3 (110V) 4 (220V) 7 (240V) 8 (48V) 5 (24V) 6 (12V) AC Fluid and ambient temperature Fluid temperature C Ambient temperature C Temperature condition Power supply Water (standard) Air (standard) Oil (standard) High Note 3) temp. oil (D.N.)

Made to Order

(C) (C) (C) (C) (C) (C) Cushion valve CL1 1.

High Vacuum Angle Valve, XL Series

Valve side exhaust 29 Series XLS High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm XLS/Without control power supply Grommet (G) D Conduit (C) J K 27010 E D G B C G(PF)1/2 Terminal (T) J K2 J H 29010 L 25 33 B C G(PF)1/2 DIN terminal (D) J K L C B F A 29.5 39 B C G(PF)1/2 6 to 9 22 A (mm) A B 104 L 48 62 C D F G H J E K 41 60 95 43 Model XLS-16G XLS-16C XLS-16D XLS-16T XLS-25G XLS-

Electric Rotary Table

Connector C Actuator side (8) (Terminal no.) 1 2 5 6 (14) (18) A1 B1 (13.5) (17.7) (17.7) Cable length (L) [m] 1 3 5 8 A B C 1 2 1.5 3 5 8 A6 B6 (30.7) Connector A 15 16 (14.7) Connector D L (11) (10) 8 A B C LE-CP/Cable length: 8 m, 10 m, 15 m, 20 m ( Produced upon receipt of order) Controller side 10 (14.2) Connector C (Terminal no.) 1 2 5 6 (5.5) (6.3) 15 Actuator side (14) (18) (Terminal

Table of Contents

2 U seal Retaining ring for hole type C HNBR Tool steel y !

LFE-OMY0008

[F 1] OUT1 33 No.LFE*-OMY0008 H_1(H_2) H_1(H_2) H_1(H_2) H_1(H_2) H1(H2) H1(H2) H1(H2) H1(H2) H1(H2) H1(H2) H1(H2) H1(H2) 0 0 0 0 ON ON ON ON 0 0 0 0 0 0 0 0 ON ON ON ON 49 34 No.LFE*-OMY0008 H_1(H_2) H_1(H_2) H_1(H_2) H_1(H_2) H1(H2) H1(H2) H1(H2) H1(H2) H1(H2) H1(H2) H1(H2) H1(H2) H1(H2) H1(H2) H1(H2) H1(H2) 0 0 0 0 ON ON ON ON 0 0 0 0 0 0 0 0 ON ON ON ON 35 No.LFE*-OMY0008 [F 2] OUT2

One-touch Fittings

-02m1 M14 x 1 17 17 28.4 14 9.7 12 15 13.3 13.1 10.4 4.5 32.4 3/8 KQ2E06-03m1 M14 x 1 19 17 30.7 16.3 9.7 12 15 13.3 13.1 10.4 4.5 35.9 Connection thread Rc L1 M L2 m: A (Brass), N (Brass + Electroless nickel plating) Release button dimensions X Y Bulkhead Male Elbow: KQ2LE 2 x Applicable tubing B M H1 (Width across flats) H2 (Width across flats) B E D Effective area [mm2] Min. port size

CV/MVGQ

O.D. of cover : 1.7 mm Socket Coil ML2B Cover Hook For DC C J G5-S 3.

CV/MVGQ

O.D. of cover : 1.7 mm Socket Coil ML2B Cover Hook For DC C J G5-S 3.

Prevents Micro-Bubbles

Non-locking type Locking type C (H1) (H2) 60 A B E C (H1) (H2) 2-P B Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com SMC A B E L J B 2-P 2-F K Body material: PFA N G A D L K 4-M Non-locking type Locking type 60 C (H1) (H2) A B SMC E J B 2-P (mm) Dimensions A B C

High Purity Chemical Valve

E (H1) (H2) 2 x P B C SMC A B E L J B 2 x P 2 x F K Body material: PFA N G A D L K 4 x M Non-locking type Locking type 60 (H1) (H2) C A B SMC E J B 2 x P (mm) Dimensions A B C D E F H1 G H2 J K L M N P Model Body material LVH20m LVH30m LVH40m LVH20m LVH30m LVH40m LVH20m LVH30m LVH40m M5 x 0.8 30 33 54.5 10 10 75 76.5 22 22 27 Rc 1/8, 1/4, NPT 1/8, 1/4 (SUS) Stainless steel 36 47 81 13

CM2

Dd9 t m L d Part no. l Trunnion Nut CD-S02 CD-S03 0.040 0.076 8 0.9 1.6 19.5 24.5 7.6 Type C 8 for axis Material: Carbon steel 0.040 0.076 10 1.15 1.35 29 34 9.6 Type C 10 for axis Applicable bore size (mm) 20 25, 32 40 D C B d H Part no.

Manually Operated Integral Fitting Type/Threaded Type Series LVH

(H1) (H2) 2 x P B C SMC A B E L J B 2 x P 2 x F K Body material: PFA N G A D L K 4 x M Non-locking type Locking type 60 (H1) (H2) C A B SMC E J B 2 x P (mm) Dimensions D G E C M P N L K J H2 F H1 B A Model Body material LVH20 LVH30 LVH40 LVH20 LVH30 LVH40 LVH20 LVH30 LVH40 M5 x 0.8 10 10 54.5 Rc 1/8, 1/4, NPT 1/8, 1/4 27 22 22 76.5 75 33 30 (SUS) Stainless steel 19 13 81 Rc 1/4, 3/8,

5

Auto switch model Bore size (mm) 20 25 32 40 D-M9(V) D-M9W(V) D-A9(V) BM5-020 (A set of a, b, c, d) BM5-025 (A set of a, b, c, d) BM5-032 (A set of a, b, c, d) BM5-040 (A set of a, b, c, d) REA D-M9A(V) BM5-020S (A set of b, c, d, e) BM5-025S (A set of b, c, d, e) BM5-032S (A set of b, c, d, e) BM5-040S (A set of b, c, d, e) REB Switch bracket (Resin) Transparent (Nylon) Note 1) Auto switch

Fluoropolymer Fittings Hyper Fitting / Flare Type Series LQ3

Size MS Model B B side (Center) A side (Left) C side (Right) E1 E1 E2 E2 E3 E3 F G H1 H2 H3 L1 L1 L2 L2 L3 L3 M1 M2 M3 Applicable tubing O.D.

REC

D RS Q G C 22 30 35 37 0.5 Graph (2) Applicable Max.

SI Unit for Vacuum Manifold

Hysteresis H2 Sub Size Acc ess Default (dec) Content Description index [byte] 1 2 R/W 0x0064 Energy saving operation hysteresis (H2) of CH0 Set energy saving operation hysteresis (H2) for each CH. Refer to Section 5.

Hydraulic

H B (mm) C d D H B Part no.

REC

I Width across flats B1 Relieving port D C B 4-LD LH MM 2-4 3.2 N N X X Y S+Stroke Y LX Z LS+Stroke LZ ZZ+Stroke (mm) A AL B B1 B2 C D F G H H1 H2 I K LD LH LS LX LZ MM N NA Bore size Stroke range 20 M8 X 1.25 18 15.5 40 13 26 40 8 13 10 41 5 8 33.5 5 6.8 25 186 40 55 20 30 150 to 700 M10 X 1.25 25 22 19.5 47 17 32 45.5 10 13 10 45 6 8 37.5 5.5 6.8 28 186 40 55 20 34.5 150 to 700 M10 X 1.25

High Power Cylinder Series RHC

VQZ2000 (12.6) VQZ3000 (21.6) VFR2000 (16.2) VFR3000 (41.4) VFR4000 (67.0) 0.5 0.1 0.3 In-line type VFS1000 (9.0) VFS2000 (18.0) VFS3000 (36.0) VFS4000 (64.5) 2-B 5 AS221F (3.5) AS231F (3.5) AS2051F (4.5) AS220 (2.9) AS2000 (3.8) AS3001F (6.5) 1-A 1-B 1-C 2-A 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 1-C 2-A 2-B 2-B 2-B 2