Cooling Method: A (Air-cooled Refrigeration), Pipe Thread: N (NPT, w/Rc-NPT Conversion Fitting), Power Supply: 20 (3-phase 200 VAC, 50Hz; 3-phase 200 to 230 VAC, 60Hz), Option: B (w/Earth Leakage Breaker)

Cooling Method: A (Air-cooled Refrigeration), Pipe Thread: N (NPT, w/Rc-NPT Conversion Fitting), Power Supply: 20 (3-phase 200 VAC, 50Hz; 3-phase 200 to 230 VAC, 60Hz), Option: BJM (w/ Earth Leakage Breaker + w/ Automatic Fluid Fill Function + Applicable to Deionized Water Piping)

Cooling Method: A (Air-cooled Refrigeration), Pipe Thread: N (NPT, w/Rc-NPT Conversion Fitting), Power Supply: 20 (3-phase 200 VAC, 50Hz; 3-phase 200 to 230 VAC, 60Hz), Option: S (Conforming to CE/UL Standards)

Cooling Method: A (Air-cooled Refrigeration), Pipe Thread: N (NPT, w/Rc-NPT Conversion Fitting), Power Supply: 20 (3-phase 200 VAC, 50Hz; 3-phase 200 to 230 VAC, 60Hz), Option: M (Applicable to Deionized Water Piping)

Cooling Method: A (Air-cooled Refrigeration), Pipe Thread: N (NPT, w/Rc-NPT Conversion Fitting), Power Supply: 20 (3-phase 200 VAC, 50Hz; 3-phase 200 to 230 VAC, 60Hz), Option: MS (Applicable to Deionized Water Piping + Conforming to CE/UL Standards)

Cooling Method: A (Air-cooled Refrigeration), Pipe Thread: N (NPT, w/Rc-NPT Conversion Fitting), Power Supply: 20 (3-phase 200 VAC, 50Hz; 3-phase 200 to 230 VAC, 60Hz), Option: JM (w/Automatic Fluid Fill Function + Applicable to Deionized Water Piping)

Cooling Method: Air-cooled Refrigeration, Pipe Thread: NPT, w/Rc-NPT Conversion Fitting, Power Supply: 3-phase 200 VAC, 50Hz; 3-phase 200 to 230 VAC, 60Hz, Option: w/Earth Leakage Breaker

Cooling Method: Air-cooled Refrigeration, Pipe Thread: NPT, w/Rc-NPT Conversion Fitting, Power Supply: 3-phase 200 VAC, 50Hz; 3-phase 200 to 230 VAC, 60Hz, Option: w/ Earth Leakage Breaker + w/ Automatic Fluid Fill Function + Applicable to Deionized Water Piping

Cooling Method: Air-cooled Refrigeration, Pipe Thread: NPT, w/Rc-NPT Conversion Fitting, Power Supply: 3-phase 200 VAC, 50Hz; 3-phase 200 to 230 VAC, 60Hz, Option: Conforming to CE/UL Standards

Cooling Method: Air-cooled Refrigeration, Pipe Thread: NPT, w/Rc-NPT Conversion Fitting, Power Supply: 3-phase 200 VAC, 50Hz; 3-phase 200 to 230 VAC, 60Hz, Option: Applicable to Deionized Water Piping

Cooling Method: Air-cooled Refrigeration, Pipe Thread: NPT, w/Rc-NPT Conversion Fitting, Power Supply: 3-phase 200 VAC, 50Hz; 3-phase 200 to 230 VAC, 60Hz, Option: Applicable to Deionized Water Piping + Conforming to CE/UL Standards

Cooling Method: Air-cooled Refrigeration, Pipe Thread: NPT, w/Rc-NPT Conversion Fitting, Power Supply: 3-phase 200 VAC, 50Hz; 3-phase 200 to 230 VAC, 60Hz, Option: w/Automatic Fluid Fill Function + Applicable to Deionized Water Piping

Air Slide Table

25 Double-ported type MXQA 10 10 10 10 10 10 20 20 20 20 20 20 30 30 30 30 30 30 40 40 40 40 40 40 Stroke 50 50 50 50 50 50 75 75 75 75 75 100 100 100 100 125 125 125 Page 11 150 150 Low thrust with high rigidity type MXQB 10 10 10 10 10 20 20 20 20 20 30 30 30 30 30 40 40 40 40 40 Stroke 50 50 50 50 50 75 75 75 75 75 100 100 100 100 125 125 125 Page 53 150 150 Single side-ported type MXQC

Electric Actuator

35% to 85% 5 to 20 60% to 95% Lead 16: LEY32A 112 Force [lbf] 21 to 50 60% to 85% 21 to 50 80% to 95% 90 1 to 4 20% to 65% 1 to 4 40% to 95% 67.4 LEY25lA LEY25l 5 to 20 35% to 65% 5 to 20 60% to 95% 45 21 to 35 50% to 65% 21 to 35 80% to 95% 22.5 1 to 4 20% to 85% 030 40 50 60 70 80 90 LEY32l 5 to 20 35% to 85% Set value of pushing force [%] 21 to 30 60% to 85% Max. 85% Note) For the vertical

Metal Seal/Rubber Seal Series VQ Body Ported

Mixed single and double wiring is available as an option. For details, refer to page 2-4-69. Types with 10, 16, or 20 pin are also available. For details, refer to page 2-4-69.

Base Mounted Metal Seal/Rubber Seal Series VQ

) entry connector for FS, JS and PS.

Table of Contents

(Except C kit) F, P, T and S kits are provided with an exhaust on one side, while C kits are with an exhaust on both sides. The number of max. stations differs from kit to kit. (Refer to the table below.)

Digital Flow Switch (Integrated display type)

Mixture ratio (Ar : CO2 ) 92:8, 90:10, 80:20, 70:30, 60:40 Page 75 Accessories/Part number If an accessory is required separately, order using the following part numbers.

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When the DIN ra lis ncruded wlhour an slunil rhe D N ra lenqllr wll accommodale an S Lnrland one Inpul bock Input block type lnout block common specification +COM -coM Note) wlhout sr unir, the symbolis n Valve stations B E port position 2 stations N o L e l ) Double wi ng specilication 16 stations 2 stalions Nore 2) Specified layoui (Up 10 32 solenoids possible ) 20 stations U side (2 to

Digital Flow Switch

If using the product in an interlocking circuit: Provide a double interlocking system, for example a mechanical system Check the product regularly for proper operation Otherwise malfunction can result, causing an accident.