LJ1H

1 85 90 35 Stroke + 334 2-T-slot 2 90 62 3-8H 10 depth 20 Stroke + 32 92 Body mounting reference plane 90 (T-slot pitch) 3.3 20 67 5.8 1.7 5.3 62 T-slot 1 dimensions (Switch groove) 8-6.6 92 58 10 10 Stroke + 216 11.5 The body mounting reference plane should be used as a standard when mounting onto equipment.

ZP

(Pad diameter: 20 mm or less only) ZP T 10 F N B5 A8 With adapter From p. 62 p. 119 From p. 127 ZP T 10 F N J 10 B5 A10 With buffer From p. 65 p. 120 From p. 129 q w e r t y u Ball joint type w Pad diameter t Buffer stroke q Vacuum inlet direction T Vertical R Lateral (With One-touch fitting) 10 10 13 13 16 16 20 20 25 25 32 32 40 40 50 50 Stroke [mm] Pad diameter [mm] 10 to 16 20 to 50 10

ZP

ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3-T (10/13/16) UM:-A5 ZP3-T (10/13/16) B:-A5 ZP3-T (10/13/16) UM:-B5 ZP3-T (10/13/16) B:-B5 ZP3-T (10/13/16) UM:-A12-@ ZP3-T (10/13/16) B:-A12-@ ZP3-T (10/13/16) UM:-A12-04 ZP3-T (10/13/16) B:-A12-04 ZP3-T (10/13/16

smcmaintenancepartslist

Note) For wear ring A of 10, please consult with SMC. Seal kit includes a grease pack (10: 5 g and 10 g, 15: 10 g). Order with the following part number when only the grease pack is needed.

Table of Contents

0 o @0 i A A MX MTS MY CY !4 !3 y e !2 q r t o !6 @0 !4 !1 q !6 i t y e !5 r u !

CRB2/CRBU2/CRB1

Single vane type Double vane type 0 -5 +4 0 a r n n R e o 9 g o g t 0 0 n a i e 9 +4 0 a t t 0 i a o r 0 1 e t 1 n n o 8 g o R 0 e n r i a g a +4 0 t a n n r t g a n o e r o R n i 2 t o a 7 t i 0 t o a R t o +4 0 R For size 40 actuators, a parallel keyway will be used instead of chamfer.

Table of Contents

Single vane type Double vane type +4 0 9 0 a a r r n n e n n g g g o o e e n i i t t 1 2 a a a 8 7 r t t 0 -5 +4 0 o o 0 0 n R R +4 0 +4 0 o 0 i 0 0 t a 9 1 t o e e R g g n n a a r r n n o o i i t t a a Chamfer Chamfer t t o o Chamfer A port B port Chamfer A port Chamfer R R A port B port B port A port B port A port B port For size 40 actuators, a parallel keyway will be used instead

Table of Contents

10-10 0 5 10 t i o o n L DTime [min] Operation cycles -X e e a a l l k k a t e l u w w g a a c 2 e i o o g g 1 O-ring seals separate vacuum and atmosphere. t Employs a magnetically coupled rodless cylinder with no air leakage from moving parts. n 1 r a L L e e e Particulate generation from the linear guide unit has been reduced with the use of a stainless steel linear guide and low particulate

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Single vane type Double vane type +4 0 9 0 a a r r n n e n n g g g o o e e n i i t t 1 2 a a a 8 7 r t t 0 -5 +4 0 o o 0 0 n R R +4 0 +4 0 o 0 i 0 0 t a 9 1 t o e e R g g n n a a r r n n o o i i t t a a Chamfer Chamfer t t o o Chamfer A port B port Chamfer A port Chamfer R R A port B port B port A port B port A port B port For size 40 actuators, a parallel keyway will be used instead

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Single vane type Double vane type +4 0 9 0 a a r r n n e n n g g g o o e e n i i t t 1 2 a a a 8 7 r t t 0 -5 +4 0 o o 0 0 n R R +4 0 +4 0 o 0 i 0 0 t a 9 1 t o e e R g g n n a a r r n n o o i i t t a a Chamfer Chamfer t t o o Chamfer A port B port Chamfer A port Chamfer R R A port B port B port A port B port A port B port For size 40 actuators, a parallel keyway will be used instead

Table of Contents

4 u t t q t u y !3 u e !3 !8 t y e !2 !1 !3 !6 r A A A A !4 i u q i !4 r y t y !2 o !5 r u t q !5 e i o !2 r Component Parts No. Description Material Note No. Description Material Note Body A O-ring PBT NBR q !3 Elbow body O-ring PBT NBR w !4 Body B O-ring Electroless nickel plated Brass NBR e !5 Body B O-ring Electroless nickel plated Brass NBR r !

V100

VK Nil F N T Rc G NPT NPTF Passage symbol Body size N.C. (Normally closed) A N.O.

5 Port Solenoid Valve Series SY3000/5000/7000/9000

Individual SUP spacer assembly + Individual EXH spacer assembly (stacked) Individual EXH spacer assembly Individual SUP spacer assembly t t SUP port EXH port + t 11 15 18 20 1 4 Series Assembly part no. Port size M5 x 0.8 10-SY3000 SY3000-39-2A 10-SY5000 SY5000-39-16 A 10-SY7000 SY7000-39-16 A t 11 15 18 20 1 4 Series Assembly part no.

Fluoropolymer Piping Equipment

-T-R10 LQ1E22-T-R11 LQ1E31-T-R1 LQ1E31-T-R2 LQ1E31-T-R8 LQ1E31-T-R9 LQ1E32-T-R1 LQ1E32-T-R8 LQ1E32-T-R9 LQ1E32-T-R10 LQ1E41-T-R1 LQ1E41-T-R2 LQ1E41-T-R3 LQ1E41-T-R8 LQ1E41-T-R9 LQ1E51-T-R8 LQ1E61-T-R1 8 x 6 10 x 8 12 x 10 6 x 4 8 x 6 10 x 8 12 x 10 8 x 6 6 x 4 12 x 10 19 x 16 6 x 4 10 x 8 12 x 10 19 x 16 10 x 8 8 x 6 6 x 4 19 x 16 25 x 22 25 x 22 19 x 16 Body size (according to the combination

ZP

W Dimensions: With Adapter ZP2-T W-B5 ZP2-T 20 W-B5 7 7 20 8 12 11 M5 x 0.8 M5 x 0.8 4 4 6 6 A (14) (14) 8 8 Y Y a A a C C b B 20 21 Dimensions Model Dimensions a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 2 x 2 2.5 3 Y Model ZP2-T3507W-B5 ZP2-T4010W-B5 ZP2-T5010W-B5 ZP2-T6010W-B5 ZP2-T4020W-B5 ZP2-T5020W-B5 ZP2-T6020W-B5 ZP2-T8020W-B5 2 x 1.5 0.5 0.5 10 11 2.5 0.8 ZP2

Electric Actuator/Slider Type

3 q u t y u o A !9 r e @0 !0 !2 !5 !6 !4 i A w A-A Component Parts No. Description Material Note No.

KJ

Model Port A size Port B size No. of Port A Porting Port A Port B Model 6 8 4 8 10 12 Rc Rc 6 8 10 6, R 6, R 6, R 8, R 8, R 8, R 10, R 10, R 10, R 6 8 10 4 6 KM11 One-touch fitting One-touch fitting 6, 10 1 4 3 8 KM12 One-touch fitting Rc female thread 6, 10 KM13 One-touch fitting One-touch fitting 3 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main

LX

13 75.5 59 52 27 [18] Stroke + 127 15 (39) (52) N x P The dimension inside [ ] shows the location at which the home position switch operates. 58 28 U 36: T-slot pitch 20 5 N C (5.1) 4 5.5 10 5.8 36 10.5 1 0.2 6.5 6.5 1 3 39 28 3.3 T-slot A +0.030 0 depth 4 C +0.030 0 depth 4 L-M6 4H9 Body mounting reference plane Work piece mounting reference plane T-slot A dimension T-slot B dimension

AC

Then, the charging time (T) for a 100l tank, V 10 T = t x = 110 x = 110(s). 10 10 T = t x = 49 x = 49(s). 10 10 V 10 T = t x = 12.4 x = 24(s). 100 10 V 10 1.13-2 VBA1110 to 4200 Size Selection Pulsation is decreased by using tank. If secondary capacity is undersized, pulsation may occur.

V

www.stevenengineering.com I 6.11 VACUUM VACUUM PADS SERIES ZP H O W T O O R D E R ZPT P A D V E R T I C A L T Y P E W I T H O U T B U F F E R ZPT V A C U U M E N T R Y ( A L S O M O U N T I N G T H R E A D D I A) P A D D I A M E T E R S Y M B O L T H R E A D D I A M E T E R 2~ 8 10~ 16 20~ 32 40 50 02 2 04 4 06 6 08 8 10 10 13 13 16 16 20 20 25 25 32 32 40 40 50 50 P A D M AT E R I A L Male