Cooling Capacity: 10 kW, Cooling Method: Water-cooled, Pipe Thread: N [NPT, (w/Rc-NPT conversion Fitting)], Option: w/Caster Adjuster-foot and w/Fluid Fill Port, Manual Fill

Cooling Capacity: 15.7kW, Thread: NPT, w/Rc-NPT Conversion Fitting, Option: A + K

Cooling Capacity: 20.5kW, Thread: NPT, w/Rc-NPT Conversion Fitting, Option: A + K

Cooling Capacity: 25kW, Thread: NPT, w/Rc-NPT Conversion Fitting, Option: A + K

Cooling Capacity: 11.5kW, Thread: NPT, w/Rc-NPT Conversion Fitting, Option: A + K

Cooling Capacity: 150 (15.7kW), Thread: N (NPT, w/Rc-NPT Conversion Fitting), Option: AK (A + K)

Cooling Capacity: 200 (20.5kW), Thread: N (NPT, w/Rc-NPT Conversion Fitting), Option: AK (A + K)

Cooling Capacity: 250 (25kW), Thread: N (NPT, w/Rc-NPT Conversion Fitting), Option: AK (A + K)

Cooling Capacity: 100 (11.5kW), Thread: N (NPT, w/Rc-NPT Conversion Fitting), Option: AK (A + K)

Cooling Capacity: 100 (10 kW), Cooling Method: W (Water-cooled), Pipe Thread: N [NPT, (w/Rc-NPT conversion Fitting)], Option: AK (w/Caster Adjuster-foot and w/Fluid Fill Port, Manual Fill)

Table of Contents

Applicable cylinder bore size (mm) Model Metric size Inch size ASP 3.2 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" AS1001F 6, 10, 16, 20 ASN AS2001F 20, 25, 32 AS2051F 20, 25, 32, 40 AQ AS3001F 40, 50, 63 ASV AS4001F 63, 80, 100 AK Flow Rate and Effective Area ASS AS1001F AS2001F AS3001F AS2051F AS4001F Model JIS Symbol Metric size 6 6 8 10 6 8 3.2, 4, 6 4 10, 12 12 ASR Tubing O.D.

Cooling Capacity: 150 (15 kW), Cooling Method: W (Water-cooled), Pipe Thread: N (NPT, w/Rc-NPT Conversion Fitting), Power Supply: 40 [3-phase 380 to 415 VAC (50/60 Hz)]

Cooling Capacity: 15 kW, Cooling Method: Water-cooled, Pipe Thread: NPT, w/Rc-NPT Conversion Fitting, Power Supply: 40 [3-phase 380 to 415 VAC (50/60 Hz)], Option: -

Cooling Capacity: 15 kW, Cooling Method: Water-cooled, Pipe Thread: NPT, w/Rc-NPT Conversion Fitting, Power Supply: 46 [3-phase 380 to 415 VAC (50/60 Hz); 3-phase 460-480 VAC (60 Hz)], Option: -

AZ1000

140 160 180 200 Flow rate (slpm, N2) AZ1000 100 psig (0.69 MPa) 40 psig (0.28 MPa) Inlet pressure: 80 psig (0.55 MPa) 20 psig (0.14 MPa) 1.5 (38.1) 50 0.34 2.25 (57.2) 40 0.28 Delivery pressure (MPa) Delivery pressure (psig) 30 0.21 0.69 (17.5) 20 0.14 2.00 (50.8) 10 0.07 A 0 0.00 0.88 (22.4) 0 20 40 60 80 Flow rate (slpm, N2) 2 x 10-32 UNF depth 0.25 (6.3) (Mounting hole) Connections inch

Series AP500

0.14 0 10 0.00 0.07 0 100 200 300 400 Flow rate (slpm, N2) 0.69 (17.5) Max. 5.6 (142.2) AP1000 100 psig (0.69 MPa) 40 psig (0.28 MPa) Inlet pressure: 80 psig (0.55 MPa) 20 psig (0.14 MPa) 1.5 (38.1) 50 0.34 2.25 (57.2) 40 0.28 Delivery pressure (MPa) Delivery pressure (psig) 30 0.21 20 0.14 2.00 (50.8) A 10 0.07 0 0.00 0.88 (22.4) 0 20 40 60 80 Flow rate (slpm, N2) 2 x 10-32 UNF depth 0.3

Speed Controller with One-touch Fitting

02-07PA 1/4" 11.2 23.4 32.7 (32.8) 20 (20) AS22m1F-02-09PA 5/16" 13.2 23.9 33.2 (33.3) 14.2 20 (21) AS22m1F-02-11PA 3/8" 15.5 26.4 35.7 (35.8) 15.6 21 (22) AS32m1F-03-07PA 1/4" 3/8 21 (21.7) 7.2 20.9 30.2 (30.3) 1/4 17 (17.5) 22.6 36.6 35 29 (28.5) 27.4 (26.9) 13 13.3 38 (39) AS32m1F-03-09PA 5/16" 13.2 22.7 33.9 (34.3) 14.2 38 (40) AS32m1F-03-11PA 3/8" 15.5 26.7 37.9 (38.3) 28.2 15.6 39 (

SL5200

0.14 30 0.21 15 0.10 20 0.14 10 0.07 10 0.07 5 0.03 0 0.00 0 0.00 0 20 40 60 80 100 120 Flow rate (slpm, N2) 0 4 8 12 16 20 24 28 32 Flow rate (slpm, N2) Hastelloy is a registered trademark of Haynes International.

Series AK1000

22.4) 2 x 10-32 UNF depth 0.25 (6.3) (Mounting hole) 0 0.00 0 20 40 60 80 Flow rate (slpm, N2) AK1000HF 100 psig (0.69 MPa) 30 psig (0.21 MPa) Inlet pressure: 50 psig (0.34 MPa) 60 0.41 50 0.34 Delivery pressure (psig) Dlivery pressure (MPa) 40 0.28 30 0.21 20 0.14 10 0.07 0 0.00 0 20 40 60 80 100 120 140 160 180 200 Flow rate (slpm, N2) Hastelloy is a registered trademark of Haynes International

Table of Contents

20 25 25 28 36 24 17.5 25 20 18.5 21 16 16 20 20 25 30 Grooves (Except 12, 16, 20, 25) (mm) Use grooves section a and section b in the figure below of the cylinder body for firmly fixing in the following case.