Thermo-con/Rack Mount Type

500 0 0 Circulating fluid temperature [C] 0 10 20 30 40 50 60 70 Circulating fluid temperature [C] 0 10 20 30 40 50 60 70 Pump Capacity (Thermo-con Outlet) HECR002-A When high-pressure pump mounted 0.14 0.10 0.12 Discharge pressure [MPa] Discharge pressure [MPa] Tap water 0.08 Tap water 0.10 0.06 0.08 Ethylene glycol 20% Ethylene glycol 20% 0.06 0.04 0.04 0.02 0.02 0 0 1 2 3 4 0 0 1 2 3 4

53

time 1 min 30 s 20 s Max.

Lightweight and Compact

min 30 s 20 s Max.

33

HED Polypropylene skid HEA Model Weight [kg] Dimensions [mm] HRSE012-A-10 35 Height 745 x Width 465 x Depth 575 HRSE018-A-10 HRSE012-A-10-T 42 Height 745 x Width 465 x Depth 620 HRSE018-A-10-T HRSE012-A-20 38 Height 745 x Width 465 x Depth 575 HRSE018-A-20 HRSE024-A-20 HRSE012-A-20-T 45 Height 745 x Width 465 x Depth 620 HRSE018-A-20-T HRSE024-A-20-T HRSE012-A-23 41 Height 790 x Width 470

Table of Contents

Applicable cylinder bore size (mm) Model Metric size Inch size ASP 3.2 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" AS1001F 6, 10, 16, 20 ASN AS2001F 20, 25, 32 AS2051F 20, 25, 32, 40 AQ AS3001F 40, 50, 63 ASV AS4001F 63, 80, 100 AK Flow Rate and Effective Area ASS AS1001F AS2001F AS3001F AS2051F AS4001F Model JIS Symbol Metric size 6 6 8 10 6 8 3.2, 4, 6 4 10, 12 12 ASR Tubing O.D.

AS

Applicable cylinder bore size (mm) Speed controller with Model Port size 4 6 8 10 12 One-touch fittings for AS121-M5 M5 x 0.8 6, 10, 16, 20 1 8 AS221-01 R 20, 25, 32 metal body specifications 1 4 AS221-02 R 20, 25, 32, 40 3 8 AS321-03 R Uses flame resistant resin as standard.

AZ1000

140 160 180 200 Flow rate (slpm, N2) AZ1000 100 psig (0.69 MPa) 40 psig (0.28 MPa) Inlet pressure: 80 psig (0.55 MPa) 20 psig (0.14 MPa) 1.5 (38.1) 50 0.34 2.25 (57.2) 40 0.28 Delivery pressure (MPa) Delivery pressure (psig) 30 0.21 0.69 (17.5) 20 0.14 2.00 (50.8) 10 0.07 A 0 0.00 0.88 (22.4) 0 20 40 60 80 Flow rate (slpm, N2) 2 x 10-32 UNF depth 0.25 (6.3) (Mounting hole) Connections inch

Series AP500

0.14 0 10 0.00 0.07 0 100 200 300 400 Flow rate (slpm, N2) 0.69 (17.5) Max. 5.6 (142.2) AP1000 100 psig (0.69 MPa) 40 psig (0.28 MPa) Inlet pressure: 80 psig (0.55 MPa) 20 psig (0.14 MPa) 1.5 (38.1) 50 0.34 2.25 (57.2) 40 0.28 Delivery pressure (MPa) Delivery pressure (psig) 30 0.21 20 0.14 2.00 (50.8) A 10 0.07 0 0.00 0.88 (22.4) 0 20 40 60 80 Flow rate (slpm, N2) 2 x 10-32 UNF depth 0.3

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type

Applicable cylinder bore size (mm) Model Metric size Inch size ASP 3.2 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" AS1001F 6, 10, 16, 20 ASN AS2001F 20, 25, 32 AS2051F 20, 25, 32, 40 AQ AS3001F 40, 50, 63 ASV AS4001F 63, 80, 100 AK Flow Rate and Effective Area ASS AS1001F AS2001F AS3001F AS2051F AS4001F Model JIS Symbol Metric size 6 6 8 10 6 8 3.2, 4, 6 4 10, 12 12 ASR Tubing O.D.

Speed Controller with One-touch Fitting

02-07PA 1/4" 11.2 23.4 32.7 (32.8) 20 (20) AS22m1F-02-09PA 5/16" 13.2 23.9 33.2 (33.3) 14.2 20 (21) AS22m1F-02-11PA 3/8" 15.5 26.4 35.7 (35.8) 15.6 21 (22) AS32m1F-03-07PA 1/4" 3/8 21 (21.7) 7.2 20.9 30.2 (30.3) 1/4 17 (17.5) 22.6 36.6 35 29 (28.5) 27.4 (26.9) 13 13.3 38 (39) AS32m1F-03-09PA 5/16" 13.2 22.7 33.9 (34.3) 14.2 38 (40) AS32m1F-03-11PA 3/8" 15.5 26.7 37.9 (38.3) 28.2 15.6 39 (

SL5200

0.14 30 0.21 15 0.10 20 0.14 10 0.07 10 0.07 5 0.03 0 0.00 0 0.00 0 20 40 60 80 100 120 Flow rate (slpm, N2) 0 4 8 12 16 20 24 28 32 Flow rate (slpm, N2) Hastelloy is a registered trademark of Haynes International.

Series AK1000

22.4) 2 x 10-32 UNF depth 0.25 (6.3) (Mounting hole) 0 0.00 0 20 40 60 80 Flow rate (slpm, N2) AK1000HF 100 psig (0.69 MPa) 30 psig (0.21 MPa) Inlet pressure: 50 psig (0.34 MPa) 60 0.41 50 0.34 Delivery pressure (psig) Dlivery pressure (MPa) 40 0.28 30 0.21 20 0.14 10 0.07 0 0.00 0 20 40 60 80 100 120 140 160 180 200 Flow rate (slpm, N2) Hastelloy is a registered trademark of Haynes International

Table of Contents

20 25 25 28 36 24 17.5 25 20 18.5 21 16 16 20 20 25 30 Grooves (Except 12, 16, 20, 25) (mm) Use grooves section a and section b in the figure below of the cylinder body for firmly fixing in the following case.

MGG

the same as those on pages 17, 18, 19 and 20.

Flow Control Equipment

2.5 to 6 6 to 20 20 to 40 40 to 63 63 to 100 AS13l1F AS13l1F AS23l1F AS33l1F AS43l1F / 1 8, / 1 4 / 1 4, / 3 8 / 1 2 Elbow (Metal Body) M5 6 to 20 20 to 32 20 to 40 40 to 63 63 to 100 AS12l1 AS22l1 AS22l1 AS32l1 AS42l1 / 1 8 4.1-7 / 1 4 / 3 8 / 1 2 In-line 6 to 20 20 to 32 20 to 40 40 to 63 63 to 100 AS1001F AS2001F AS2051F AS3001F AS4001F 4.1-9 Dual Speed Controller 6 to 20 20 to 32 20

Dual Speed Controller with One-touch Fitting Series ASD

0.15 0.3 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Effective area (mm2) Effective area (mm2) Effective area (mm2) 40 0.6 0.1 0.2 30 0.4 5 10 20 0.05 0.1 0.2 10 0 Number of needle rotations 5 10 0 0 0 Number of needle rotations 5 10 0 0 Number of needle rotations 10 20 15-9-68 Dual Speed Controller for Low Speed Operation With One-touch Fitting Series ASD-FM

reduces flow setting time

2 AQ w t y q i o e ASV AK !0 VCHC ASR ASQ u @0 Meter-in type Meter-out type Component Parts No.

CATALOG

~60OC -20~60OC -20~60OC -20~60OC -20~60OC -20~60OC -20~60OC -20~60OC -20~60OC -20~60OC Material Polyurethane Polyurethane Polyurethane Polyurethane Polyurethane Polyurethane Polyurethane Polyurethane Polyurethane Polyurethane Courtesy of Steven Engineering, Inc. !

Guide Cylinder Series MGG

T 2 x P (Rc, NPT, G) Q AH AG S U W K L B R A AL I J AI AJ AP 4 x AK hole AA AB V Y + Stroke X Z + Stroke For 4 x AO AG AN AI Cutout window AM Mounting dimensions (mm) Bore size (mm) 20 25 32 40 50 Stroke range (mm) AA AB AG AH AI AJ AK AL AM AN AO AP B I J K L M N O A 11 11 112 125 82 95 6.6 9 65 115 M6 25 108 30 55 60 80 25 45 M6 x 1 depth 9 90 75, 100, 125, 150, 200 14 13 134 150 92 108

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

P Bore size (mm) W V U T S Z X Y Q Y R R Q HR HN 20 20 107 (115) 12 (14) 104 11 21 47.5 40 48 82 12 26 157 30 M6 x 1 depth 9 Rc 1/8 25 20 25 107 (115) 12 (14) 25.3 37 104 11 21 48 46 57 100 13 31 175 37 Rc 1/8 M6 x 1 depth 13 32 25 32 110 (118) 12 (14) 28.3 40 106 11 21 49 52 65 114 16 38 201 37 Rc 1/8 M6 x 1 depth 13 40 32 40 121 (130) 12 (15) 31.3 43 123 11 25 53 62 84 138 20 47 238 44