Made to Order

CM2R series (mm) Bore size (mm) BM MF MH NN ZZ 20 25 32 40 M10 x 12.5 13 26.5 M20 x 1.5 142.5 M14 x 1.5 13 29 M26 x 1.5 149 M14 x 1.5 13 29 M26 x 1.5 151 MH + Adjustment M16 x 1.5 16 32 M32 x 2 186 ZZ + 2 x Stroke + Adjustment (A: 25 mm, B: 50 mm) (mm) BM CG1 series Bore size (mm) BM S Rubber bumper MH Air cushion MH ZZ ZZ 20 25 32 40 50 63 M6 x 1 23 135 21 133 77 M6 x 1 23 140 21 138 77

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Data Front mounting flange Y + Stroke ZZ + Stroke Series MGP Bore size (mm) 12 16 20 25 Manufacturable stroke MGPM, MGPL Common Dimensions A B L BL BM B + Stroke MB (Width across flats) A + Stroke 50.5 (54.5) 22 (27) 3.5 25 (29) M5 x 0.8 5 to 30 Bore size (mm) 12 16 20 25 32 40 50 63 80 100 BM (Adjusting bolt) 51 (56) 22 (27) 3.5 25.5 M6 x 1 MA MB BM MC MH 61 (71) 26 (36) 4.5 30.5 M8 x 1.25

Table of Contents

style Double clevis style B L F G D Note) 10 16 20 25 28 10 mm 16 mm 20 mm 25 mm 28 mm 16 10, 20, 30, 40, 50, 60 20 10, 20, 30, 40, 50, 60 25 10, 20, 30, 40, 50, 75, 100 28 10, 20, 30, 40, 50, 75, 100 Note) Available only for MQQL.

Vacuum Pad with Ejector ZHP Series Pad Diameter: ø63, ø80 ZK2 ZQ Ejector and pad are integrated. ZR Space saving and reduced piping labor! Bellows type with groove ZB ZA Two-stage ejector ZX More efficient ejector 30% reduced 50% increased ZM Air Suction

20 10 0 100 Suction flow [L/min(ANR)] Air consumption [L/min(ANR)] Vacuum pressure Vacuum pressure [kPa] Vacuum pressure [kPa] 80 60 Suction flow 40 20 Air consumption 0 0 10 20 30 40 Supply pressure [MPa] Suction flow [L/min(ANR)] ZHP-10 ZHP-10 (Supply pressure: 0.35 MPa) 100 90 80 70 60 50 40 30 20 10 0 0 0.1 0.2 0.3 0.4 0.5 0.6 100 90 80 70 60 50 40 30 20 10 0 100 Suction flow [L/min(

CG5-S

(mm) Bore size (mm) WA WB WH W ZZ 20 22 16 23 30 118 25 22 16 25 30 123 32 22 16 28.5 25 125 40 22 16 33 20 143 50 25 18 40.5 20 167 63 25 18 47.5 20 167 80 30 22 60.5 20 201 100 31 22 71 20 202 10 Series CG5-S Dimensions R V Axial foot type (L)/CG5LNS S + Stroke H GA GB Width across flats B1 2-Rc P H1 D B LH I AL A K KA MM Width across flats NA LT M X Y X Y 8-J 4-LD C 0.1 LS + Stroke LX

CG5-S

GA GB 2-P Bore size A AL B1 H H1 MM ZZ W 10 M BM H1 20 14 12.7 11.0 25.4 4.0 1/4-28 108.4 25 14 12.7 12.6 28.4 4.8 5/16-24 111.4 Max.

CJ5-S

-X Bore size (mm) W WA WB WH ZZ 2020 30 22 16 23 118 25 30 22 16 25 123 Data 32 25 22 16 28.5 125 40 20 22 16 33 143 50 20 25 18 40.5 167 63 20 25 18 47.5 167 80 20 30 22 60.5 201 100 20 31 22 71 202 10-14-13 14 Series CG5-S Dimensions R V Axial foot style (L): CG5LNS S + Stroke H GA GB Width across flats B1 2-Rc P H1 D B LH I AL A K KA MM Width across flats NA LT X Y X Y M 8-J 4-LD C 0.1

CJ5-S

-X Bore size (mm) W WA WB WH ZZ 2020 30 22 16 23 118 25 30 22 16 25 123 Data 32 25 22 16 28.5 125 40 20 22 16 33 143 50 20 25 18 40.5 167 63 20 25 18 47.5 167 80 20 30 22 60.5 201 100 20 31 22 71 202 10-14-13 14 Series CG5-S Dimensions R V Axial foot style (L): CG5LNS S + Stroke H GA GB Width across flats B1 2-Rc P H1 D B LH I AL A K KA MM Width across flats NA LT X Y X Y M 8-J 4-LD C 0.1

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Note 2) Use standard power supply cables for 3 m and 10 m lengths. 19 20 19 m 20 m End bracket/IZS40-BE Intermediate bracket/IZS40-BM End bracket Intermediate bracket Note) The number of intermediate brackets required, as listed below, depends on the bar length. Two end brackets are always required regardless of the bar length.

Compact Electric Actuator Series LG1

mm Lead 150 Slide screw 20 mm Lead 500 10 mm Lead Ball screw Horizontal specification Maximum speed 1000 600 500 930 740 20 mm Lead 100W mm/s 500 Slide screw 20 mm Lead 180 10 mm Lead Ball screw 100W Nm Rated thrust 90 20 mm Lead 50 Slide screw 20 mm Lead Rolled 0.05 Repeatable positioning accuracy Ball screw Ground 0.02 mm 0.1 Rolled Slide screw Motor output Horizontal specification

Cooling Capacity: Cooling Capacity: 1500/1700W, 50/60 Hz, Cooling Method: Water-cooled Refrigeration, Thread: NPT w/PT-NPT Conversion Fitting Set, Option: B + M

Cooling Capacity: 018 (Cooling Capacity: 1500/1700W, 50/60 Hz), Cooling Method: W (Water-cooled Refrigeration), Thread: N (NPT w/PT-NPT Conversion Fitting Set), Option: BM (B + M)

Pulse Valve

JSXFAH6-10m1-Bm JSXFAH6-10m2-Bm JSXFAH6-10m3-Bm JSXFAH6-10m4-Bm Outlet pipe dimensions A 68 108 68 108 B 173 5 213 5 173 5 213 5 Thread type G1" x 50 G1" x 90 Pipe thread (Pipe for the OUT port) 68 68 50 108 108 90 1" (ANSI) G1" G1" 1" (ANSI) 9 Pulse Valve Valve for Dust Collector JSXFA Series Dimensions: JSXFAH/Immersion Type Dimensions on the tank side A A 69 +1 0 0.3 A 0.4 ANSI 6" 168.3

MGG

Dimensions 20 to 50 Front mounting flange BM R MH Y + Stroke ZZ + Stroke Front mounting flange 63 BM R MH Y + Stroke ZZ + Stroke (mm) Adjustment 0 to 25mm Adjustment 0 to 50mm Bore size (mm) Y BM R MH ZZ MH ZZ 20 25 32 40 50 63 48 164 73 189 12 86 M6 x 1 48 171 73 196 12 86 M6 x 1 50 175 75 200 12 88 M8 x 1.25 65 208 90 233 13 99 M12 x 1.75 58 227 83 252 14 M12 x 1.75 114 65 236 90 261 14

Ionizer

Balance adjustment trimmer 4 x M4 x 0.7 depth 5 14 19 20 (For mounting, opposite side: Same) 13 17 7 Connection cable IZS31-CF-X210 14.9 16 20 20 52 (Cable length: Refer to the above table.) 65 8P modular jack (Plug for sensor cable) Maintenance detection level selection switch 15 100 4 x M4 x 0.7 depth 5 20 900 Connection cable length L (For mounting, opposite side: Same) 7 16 26 58 80x2

Thermo-chiller HRS offers convenient functions, self diagnosis and check display for easy maintenance.  An angled supply port facilitates the supply of circulating fluid, even when units are stacked.  A large digital display provides a clear view of the current and set values.  The dustproof filter is integrated with the grill of the front panel allowing mounting and removal of the HRS filter

Thermo-chiller HRS offers convenient functions, self diagnosis and check display for easy maintenance.  An angled supply port facilitates the supply of circulating fluid, even when units are stacked.  A large digital display provides a clear view of the current and set values.  The dustproof filter is integrated with the grill of the front panel allowing mounting and removal of the HRS filter

Thermo-chiller HRS offers convenient functions, self diagnosis and check display for easy maintenance.  An angled supply port facilitates the supply of circulating fluid, even when units are stacked.  A large digital display provides a clear view of the current and set values.  The dustproof filter is integrated with the grill of the front panel allowing mounting and removal of the HRS filter

smcmaintenancepartslist

Bore size 16 20 25 32 40 50 63 16 20 25 32 40 50 53 Recommended length Part No.

MGP

m (kg) Load weight m (kg) 20 20 20 20 20 20 16 16 16 16 16 16 1 1 12 12 12 12 12 12 0.5 10 20 30 31 50 100 101 300 200 0.5 10 20 30 31 50 100 101 300 200 Stroke (mm) Stroke (mm) MGPL32 to 63 MGPL32 to 63 50 50 Load weight m (kg) Load weight m (kg) 63 63 50, 63 50 50 50, 63 50, 63 10 10 40 40 40 50, 63 40 40 40 32 32 32 32 32 32 5 10 20 30 50 40 51 100 101 300 200 5 10 20 30 50 40 51 100