Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

5.5 4.6 5.5 JSXD41-C Sm04 720 50 Brass/Stainless steel 3/4 20 38 0.30 9.5 8.2 9.5 JSXD51-C Sm06 880 60 Brass/Stainless steel 1 25 225 11.0 13.0 JSXD61-C Sm10 1460 70 Bronze 1 1/4, 32A 35 415 19.6 23.0 0.03 1.0 JSXD71-Bm(12, 32) 5500/3000 80 Bronze 1 1/2, 40A 40 560 26.4 31.0 JSXD81-Bm(14, 40) 6900/4100 90 Bronze 2, 50A 50 880 42.8 49.0 JSXD91-Bm(20, 50) 8500/5500 *1 The flow rate characteristics

Ionizer

(Standard: 80 mm-pitch) Maintenance detection level selection switch KJH04-M5-X34 30 20 Position Detection Switch Flow Sensor Pressure Control Pressure Sensor Balance adjustment trimmer 14 19 20 16 Note) The maximum bar length is 1260 mm. The air purge nozzles are arranged at an 80 mm-pitch.

Vacuum Pad with Ejector

Response Time *2) [ms] ZHP[]BM[]-07[] ZHP[]BM[]-10[] ZHP[]BM[]-12[] ZHP[]BM[]-15[] 63 295 143 120 86 80 455 221 190 140 2) Response time means a period of time that the vacuum pressure reaches 57 kPa after the externally installed valve has been turned ON when the bellows type pad is used and the supply pressure is 0.35 MPa.

HRX-OM-Q040_E

HRS050-A-20, HRS050-W-20Read before using. HRS060-A-20, HRS060-W-20Thank you for purchasing SMCs Thermo-chiller. 2.

Vacuum Pad with Ejector ZHP Series Pad Diameter: ø63, ø80 ZK2 ZQ Ejector and pad are integrated. ZR Space saving and reduced piping labor! Bellows type with groove ZB ZA Two-stage ejector ZX More efficient ejector 30% reduced 50% increased ZM Air Suction

20 10 0 100 Suction flow [L/min(ANR)] Air consumption [L/min(ANR)] Vacuum pressure Vacuum pressure [kPa] Vacuum pressure [kPa] 80 60 Suction flow 40 20 Air consumption 0 0 10 20 30 40 Supply pressure [MPa] Suction flow [L/min(ANR)] ZHP-10 ZHP-10 (Supply pressure: 0.35 MPa) 100 90 80 70 60 50 40 30 20 10 0 0 0.1 0.2 0.3 0.4 0.5 0.6 100 90 80 70 60 50 40 30 20 10 0 100 Suction flow [L/min(

5-Port Solenoid Valve

SY5000222-1A [for 10 valves (20 pcs.)] SY7000221-1A [for 10 valves (30 pcs.)] SY3000222-1A [for 10 valves (20 pcs.)] SY5000221-1A [for 10 valves (20 pcs.)] SY300023-24A [for 10 valves (20 pcs.)]

MGP

m (kg) Load weight m (kg) 20 20 20 20 20 20 16 16 16 16 16 16 1 1 12 12 12 12 12 12 0.5 10 20 30 31 50 100 101 300 200 0.5 10 20 30 31 50 100 101 300 200 Stroke (mm) Stroke (mm) MGPL32 to 63 MGPL32 to 63 50 50 Load weight m (kg) Load weight m (kg) 63 63 50, 63 50 50 50, 63 50, 63 10 10 40 40 40 50, 63 40 40 40 32 32 32 32 32 32 5 10 20 30 50 40 51 100 101 300 200 5 10 20 30 50 40 51 100

smcmaintenancepartslist

Bore size 16 20 25 32 40 50 63 16 20 25 32 40 50 53 Recommended length Part No.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

20 mA 90% 10% 80% 20% 70% 30% 60% 40% 40% 60% 0.05 to 3 L/min 0.15 to 3.15 L/min 5 V 20 mA 30% 70% PF2M705 92% 8% 0.1 to 10 L/min 0.5 to 10.5 L/min 5 V 20 mA 90% 10% 80% 20% 70% 30% 60% 40% 40% 60% 0.1 to 6 L/min 0.3 to 6.3 L/min 5 V 20 mA 30% 70% PF2M710 92% 8% 0.3 to 25 L/min 1.3 to 26.3 L/min 5 V 20 mA 90% 10% 80% 20% 70% 30% 60% 40% 40% 60% 0.3 to 15 L/min 0.8 to 15.8 L/min 5 V 20 mA

Cooling Method: A (Air-cooled Refrigeration), Pipe Thread: N [NPT (w/Rc-NPT Conversion Fitting)], Power Supply: 20 [3-phase 200 VAC (50 Hz); 3-phase 200 to 230 VAC (50/60 Hz], Option: BM (B + M)

An angled supply port facilitates the supply of circulating fluid, even when units are stacked.  A large digital display provides a clear view of the current and set values. 

Cooling Capacity: 012 (Cooling Capacity: 1100/1300W, 50/60 Hz), Cooling Method: A (Air-cooled Refrigeration), Thread: N (NPT w/PT-NPT Conversion Fitting Set), Option: BM (B + M)

Cooling Capacity: 024 (Cooling Capacity: 2100/2400W, 50/60 Hz), Cooling Method: A (Air-cooled Refrigeration), Thread: N (NPT w/PT-NPT Conversion Fitting Set), Option: BM (B + M)

Cooling Capacity: 030 (Cooling Capacity: 2600/3200W, 50/60 Hz), Cooling Method: A (Air-cooled Refrigeration), Thread: N (NPT w/PT-NPT Conversion Fitting Set), Option: BM (B + M)

Cooling Capacity: 018 (Cooling Capacity: 1700/1900W, 50/60 Hz), Cooling Method: A (Air-cooled Refrigeration), Thread: N (NPT w/PT-NPT Conversion Fitting Set), Option: BM (B + M)

Cooling Capacity: 060 (Cooling Capacity: 4900/5900, 50/60 Hz), Cooling Method: A (Air-cooled Refrigeration), Thread: N (NPT w/PT-NPT Conversion Fitting Set), Option: BM (B + M)

Type: -, Cooling Method: -, Cooling Capacity: 1,100/1,300 W (50/60 Hz), Piping thread type: NPT (PT-NPT conversion fitting set included), Optional specifications: With earth leakage circuit breaker / Compatible with deionized water (pure water) piping

Type: -, Cooling Method: -, Cooling Capacity: 2,600/3,200 W (50/60 Hz), Piping thread type: NPT (PT-NPT conversion fitting set included), Optional specifications: With earth leakage circuit breaker / Compatible with deionized water (pure water) piping

Cooling Capacity: Cooling Capacity: 2100/2400W, 50/60 Hz, Cooling Method: Air-cooled Refrigeration, Thread: NPT w/PT-NPT Conversion Fitting Set, Option: B + M

Cooling Capacity: Cooling Capacity: 1700/1900W, 50/60 Hz, Cooling Method: Air-cooled Refrigeration, Thread: NPT w/PT-NPT Conversion Fitting Set, Option: B + M