Type: -, Cooling Method: -, Cooling Capacity: 4,700/5,100 W (50/60 Hz), Piping thread type: G (PT-G conversion fitting set included), Optional specifications: Compatible with deionized water (pure water) piping

Cooling Capacity: 050 (Cooling Capacity: 4700/5100W, 50/60 Hz), Cooling Method: A (Air-cooled Refrigeration), Thread: F (G w/PT-G Conversion Fitting Set), Option: B (Earth Leakage Breaker)

Cooling Capacity: 050 (Cooling Capacity: 4700/5100W, 50/60 Hz), Cooling Method: A (Air-cooled Refrigeration), Thread: F (G w/PT-G Conversion Fitting Set), Option: M [Applicable to DI Water (Deionized Water) Piping]

Cooling Capacity: 050 (Cooling Capacity: 4700/5100W, 50/60 Hz), Cooling Method: A (Air-cooled Refrigeration), Thread: F (G w/PT-G Conversion Fitting Set), Option: BJ (B + J)

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Series 10-, 21- AF-A Air Filter

Air Filter Series 1021AF-A How to Order * "J" must always be selected. Clean series 10 AF 03 A 30 F J B 21 AF 03 A 30 F J B Copper, fluorine and silicone-free + Low particle generation q w e r t Air filter Option/Semi-standard: Select one each for a to e. Option/Semi-standard symbol: When more than one specification is required, indicate in alphanumeric order.

Booster Regulator Series VBA1110 to 4200 1

AV AU AF 2 times of pilot pressure is outlet pressure.

Direct Operated Precision Regulator Series ARP20/30/40  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

Digital pressure switch (Electrical entry: Wiring top entry) Digital pressure switch (Electrical entry: Wiring bottom entry) Square embedded type pressure gauge Option Round type pressure gauge J J J J H Dimensions Center of piping H H Center of piping Center of piping H Center of piping Standard specifications Model P1 P2 A B Note 1) C D F J K ARP20(K) ARP30(K) ARP40(K) 28.5 Note 2) 1/8

Direct Operated Precision Regulator ARP20/30/40 Series  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

Digital pressure switch (Electrical entry: Wiring top entry) Digital pressure switch (Electrical entry: Wiring bottom entry) Square embedded type pressure gauge Option Round type pressure gauge J J J J H Dimensions Center of piping H H Center of piping Center of piping H Center of piping Standard specifications Model P1 P2 A B Note 1) C D F J K ARP20(K) ARP30(K) ARP40(K) 2 Note 2) 40 1/8

Table of Contents

ZS-20-5A-50 . 1 pc.

Cooling Capacity: Cooling Capacity: 4700/5100W, 50/60 Hz, Cooling Method: Water-cooled Refrigeration, Thread: Rc, Option: Automatic Water Supply Function

Type: -, Cooling Method: -, Cooling Capacity: 4,700/5,100 W (50/60 Hz), Piping thread type: Rc, Optional specifications: With automatic water supply

Type: -, Cooling Method: -, Cooling Capacity: 4,700/5,100 W (50/60 Hz), Piping thread type: NPT (PT-NPT conversion fitting set included), Optional specifications: With automatic water supply

Type: -, Cooling Method: -, Cooling Capacity: 4,700/5,100 W (50/60 Hz), Piping thread type: NPT (PT-NPT conversion fitting set included), Optional specifications: With automatic water supply

Cooling Capacity: 050 (Cooling Capacity: 4700/5100W, 50/60 Hz), Cooling Method: A (Air-cooled Refrigeration), Thread: N (NPT w/PT-NPT Conversion Fitting Set), Option: J (Automatic Water Supply Function)

Cooling Capacity: 050 (Cooling Capacity: 4700/5100W, 50/60 Hz), Cooling Method: W (Water-cooled Refrigeration), Thread: Rc, Option: J (Automatic Water Supply Function)

Cooling Capacity: 050 (Cooling Capacity: 4700/5100W, 50/60 Hz), Cooling Method: W (Water-cooled Refrigeration), Thread: N (NPT w/PT-NPT Conversion Fitting Set), Option: J (Automatic Water Supply Function)

Cooling Capacity: 050 (Cooling Capacity: 4700/5100W, 50/60 Hz), Cooling Method: A (Air-cooled Refrigeration), Thread: Rc, Option: J (Automatic Water Supply Function)

Proposals for Energy Saving

with M5 thread Flow direction: Right to left With element service indicator Size 1/8 1/4 3/8 1/2 3/4 1 1 1/2 2 01 02 03 04 06 10 14 20 2B, 150 4B, 250 8B, 350 11B, 450 22B, 550 37B, 650 75B, 850 Rc NPT G 1/8 1/4 3/8 1/2 3/4 1 1 1/2 Nil J M R T Nil B C D Option Accessory Size Bore size RT T R JR JRT MR J MRT JT MT M 03 06 04 01 02 20 14 Size 10 2B, 150 4B, 250 8B, 350 11B, 450 22B, 550 37B

Vacuum System Peripherals:

Series ZM 13-14-20 4.